[Scan]
initial_time=2015-12-18T21:27:47
final_time=2015-12-18T21:28:10
ip_count=19
run=1020
dataset=4
scan=256
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-7.54809E-1
ql1_imon=1.37302E-8
ql2_vset=
ql2_vmon=-7.3452E-1
ql2_imon=1.9666E-9
ql3_vset=
ql3_vmon=-9.19478E0
ql3_imon=2.54071E-10
ql4_vset=
ql4_vmon=-9.18915E0
ql4_imon=7.45535E-11
mult1=-1.22208E-8
mult2=-2.65673E-9
rf_tmon=-1.33406E-3
rf_agc=3.71729E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.69551E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.72161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52962E1
cs_ef1b_imon=3.16002E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=1.08904E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44346E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.40664E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.02126E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.39735E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.35582E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=9.41961E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=1.97791E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.39749E-8
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27029E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.99874E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=8.34894E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54951E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34064E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10619E1
os_restr2_imon=3.46347E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.09252E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72246E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68665E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.2907E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=8.10644E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.36839E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.42607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5369E0
defgridb_imon=6.40226E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.44492E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65847E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=6.64428E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00921E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67544E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.26256E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=479
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.54952E-1	-7.34377E-1	-9.19466E0	-9.18932E0	5.31673E-3	9.377E-2	2.72918E1	-3.2654E1	-3.25943E1	2.66696E1	1.19239E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.99941E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.55095E-1	-7.3421E-1	-9.19485E0	-9.18944E0	5.26905E-3	9.36508E-2	2.73027E1	-3.26823E1	-3.26334E1	2.70058E1	1.19225E-7	2.51532E-3	2.51532E-3	6.3074E-3	2.98499E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-7.54523E-1	-7.33805E-1	-9.19473E0	-9.18927E0	5.43594E-3	9.35793E-2	2.72933E1	-3.26543E1	-3.25983E1	2.70148E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00676E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.54833E-1	-7.34091E-1	-9.19487E0	-9.18939E0	5.65052E-3	9.3317E-2	2.73141E1	-3.26573E1	-3.26464E1	2.67301E1	1.1929E-7	2.52131E-3	2.52131E-3	6.29684E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-7.54523E-1	-7.3421E-1	-9.1948E0	-9.18953E0	5.48363E-3	9.35316E-2	2.73189E1	-3.26488E1	-3.26056E1	2.68196E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.54952E-1	-7.33995E-1	-9.19461E0	-9.1893E0	5.45979E-3	9.35793E-2	2.73228E1	-3.26691E1	-3.26219E1	2.67517E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.55095E-1	-7.34186E-1	-9.19502E0	-9.18918E0	5.31673E-3	9.35078E-2	2.72895E1	-3.26585E1	-3.2605E1	2.6829E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.54952E-1	-7.34282E-1	-9.1949E0	-9.18941E0	5.72205E-3	9.32217E-2	2.72988E1	-3.26641E1	-3.26226E1	2.68395E1	1.19238E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.54952E-1	-7.34067E-1	-9.19492E0	-9.18922E0	5.60284E-3	9.34124E-2	2.73121E1	-3.26623E1	-3.26419E1	2.67602E1	1.19241E-7	2.52301E-3	2.52301E-3	6.3126E-3	3.00247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.54881E-1	-7.34258E-1	-9.19471E0	-9.18961E0	5.60284E-3	9.3627E-2	2.7239E1	-3.26392E1	-3.26326E1	2.68286E1	1.1929E-7	2.51642E-3	2.51642E-3	6.3074E-3	3.02025E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.55143E-1	-7.3421E-1	-9.19461E0	-9.18968E0	5.50747E-3	9.34362E-2	2.73087E1	-3.2653E1	-3.26374E1	2.68442E1	1.19188E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.01995E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.55095E-1	-7.33924E-1	-9.19468E0	-9.18951E0	5.72205E-3	9.3627E-2	2.72971E1	-3.26454E1	-3.26442E1	2.68117E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.55382E-1	-7.34353E-1	-9.19471E0	-9.18958E0	5.50747E-3	9.34601E-2	2.734E1	-3.27071E1	-3.26429E1	2.67446E1	1.1924E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.99845E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.55358E-1	-7.34138E-1	-9.19473E0	-9.18937E0	5.38826E-3	9.3627E-2	2.72817E1	-3.26669E1	-3.26452E1	2.69289E1	1.1929E-7	2.51384E-3	2.51384E-3	6.3245E-3	2.9917E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.55072E-1	-7.34401E-1	-9.19476E0	-9.18922E0	5.31673E-3	9.36031E-2	2.73275E1	-3.26714E1	-3.26077E1	2.67578E1	1.19239E-7	2.51755E-3	2.51755E-3	6.30197E-3	3.00637E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.55072E-1	-7.34138E-1	-9.19483E0	-9.18922E0	5.26905E-3	9.33409E-2	2.72672E1	-3.26591E1	-3.26476E1	2.6777E1					
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-7.55072E-1	-7.34448E-1	-9.19476E0	-9.18946E0	5.67436E-3	9.36031E-2	2.73261E1	-3.26422E1	-3.2629E1	2.68965E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.55072E-1	-7.34711E-1	-9.19487E0	-9.1893E0	5.36442E-3	9.32455E-2	2.73134E1	-3.26549E1	-3.26036E1	2.67571E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.54881E-1	-7.34639E-1	-9.19476E0	-9.18915E0	5.03063E-3	9.35316E-2	2.72883E1	-3.26446E1	-3.26176E1	2.6798E1	1.1929E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.54809E-1	-7.3452E-1	-9.19478E0	-9.18915E0	5.65052E-3	9.33409E-2	2.72246E1	-3.26332E1	-3.27029E1	2.68665E1	1.1929E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99686E-1