[Scan]
initial_time=2015-12-18T21:28:18
final_time=2015-12-18T21:28:41
ip_count=19
run=1020
dataset=4
scan=257
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-7.54905E-1
ql1_imon=1.37727E-8
ql2_vset=
ql2_vmon=-7.34115E-1
ql2_imon=1.9492E-9
ql3_vset=
ql3_vmon=-9.19483E0
ql3_imon=2.10702E-10
ql4_vset=
ql4_vmon=-9.18918E0
ql4_imon=6.29902E-11
mult1=-1.03665E-8
mult2=-2.86832E-9
rf_tmon=-4.80082E-3
rf_agc=3.38022E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.63431E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19538E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53196E1
cs_ef1b_imon=3.15965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05258E1
cs_ea1_imon=1.10563E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.41637E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.39613E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=2.33924E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23167E0
cs_ionrep_imon=9.44484E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.95449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.38426E-8
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.89439E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=8.49314E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57174E0
os_ea2_imon=-4.97618E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.4404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72817E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.3323E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.13256E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-8.46352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.21338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.2869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.43982E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07888E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65812E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=7.85761E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67762E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79069E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22568E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39781E-1
res40_imon=-2.32037E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-7.55048E-1	-7.34329E-1	-9.19511E0	-9.18925E0	5.26905E-3	9.38177E-2	2.73122E1	-3.2629E1	-3.26107E1	2.66721E1					
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-7.55095E-1	-7.34282E-1	-9.1948E0	-9.18956E0	5.38826E-3	9.35078E-2	2.73124E1	-3.26585E1	-3.26358E1	2.67876E1	1.1929E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-7.55334E-1	-7.34472E-1	-9.19461E0	-9.18927E0	5.24521E-3	9.37462E-2	2.73045E1	-3.26915E1	-3.26378E1	2.68725E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00942E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-7.54833E-1	-7.3452E-1	-9.19507E0	-9.18939E0	5.55515E-3	9.3627E-2	2.72999E1	-3.26718E1	-3.26196E1	2.6803E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-7.54857E-1	-7.34115E-1	-9.1949E0	-9.18944E0	5.36442E-3	9.34362E-2	2.72984E1	-3.26432E1	-3.26499E1	2.66897E1	1.1929E-7	2.52131E-3	2.52131E-3	6.32328E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-7.55048E-1	-7.34067E-1	-9.19554E0	-9.18937E0	5.34058E-3	9.36985E-2	2.72877E1	-3.26308E1	-3.25876E1	2.69295E1	1.1929E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-7.54976E-1	-7.34043E-1	-9.19535E0	-9.18925E0	5.07832E-3	9.33647E-2	2.73057E1	-3.26536E1	-3.2629E1	2.68226E1	1.19237E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.02277E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-7.55095E-1	-7.339E-1	-9.19492E0	-9.18946E0	4.98295E-3	9.36747E-2	2.72585E1	-3.26714E1	-3.25906E1	2.67485E1	1.19239E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-7.55262E-1	-7.34234E-1	-9.19423E0	-9.18953E0	4.91142E-3	9.35555E-2	2.72901E1	-3.26585E1	-3.2617E1	2.69079E1	1.1929E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0968E0	-7.54929E-1	-7.34115E-1	-9.19485E0	-9.18922E0	5.14984E-3	9.32932E-2	2.72696E1	-3.26164E1	-3.26536E1	2.68623E1	1.19237E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.54905E-1	-7.34067E-1	-9.19456E0	-9.18939E0	5.38826E-3	9.31978E-2	2.73159E1	-3.26458E1	-3.26428E1	2.67842E1	1.19239E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-7.54976E-1	-7.33995E-1	-9.19452E0	-9.18927E0	5.31673E-3	9.35078E-2	2.73287E1	-3.26938E1	-3.2626E1	2.66724E1	1.19238E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.54833E-1	-7.33805E-1	-9.19442E0	-9.18941E0	5.36442E-3	9.3627E-2	2.72817E1	-3.26368E1	-3.265E1	2.69433E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0968E0	-7.54642E-1	-7.339E-1	-9.19471E0	-9.18932E0	5.03063E-3	9.33647E-2	2.73137E1	-3.26891E1	-3.26229E1	2.68364E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.54738E-1	-7.33829E-1	-9.19445E0	-9.18925E0	5.19753E-3	9.32455E-2	2.72921E1	-3.26614E1	-3.26343E1	2.67343E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-7.5469E-1	-7.34305E-1	-9.19454E0	-9.18958E0	5.38826E-3	9.35078E-2	2.73105E1	-3.26609E1	-3.26074E1	2.66178E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03449E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.54857E-1	-7.34258E-1	-9.19473E0	-9.18961E0	5.24521E-3	9.34839E-2	2.72859E1	-3.26446E1	-3.26074E1	2.69019E1	1.19188E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.03286E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.54809E-1	-7.3421E-1	-9.19459E0	-9.18939E0	5.67436E-3	9.36508E-2	2.7298E1	-3.26366E1	-3.26207E1	2.68111E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-7.54905E-1	-7.33876E-1	-9.1949E0	-9.18956E0	5.72205E-3	9.35793E-2	2.72835E1	-3.26422E1	-3.26122E1	2.68827E1	1.1929E-7	2.52492E-3	2.52492E-3	6.33977E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.54905E-1	-7.34115E-1	-9.19483E0	-9.18918E0	5.43594E-3	9.35555E-2	2.72817E1	-3.27017E1	-3.26266E1	2.68286E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1