[Scan]
initial_time=2015-12-18T21:29:31
final_time=2015-12-18T21:29:52
ip_count=19
run=1020
dataset=5
scan=259
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79357E-6
ql1_vset=
ql1_vmon=-8.79971E1
ql1_imon=-1.73013E-9
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.42373E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-5.43231E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.59775E-8
mult1=-7.62124E-9
mult2=-2.04792E-9
rf_tmon=-1.03344E-2
rf_agc=2.77038E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.15537E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=2.01164E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=3.18272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.01994E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04723E1
cs_ea1_imon=1.10095E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06605E0
lens1_imon=1.27261E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.99964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.39543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.39414E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.34612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.50527E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=1.96638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=4.05731E-8
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25707E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.53484E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=8.47531E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.20206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74862E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5789E0
os_ea2_imon=-8.05023E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.093E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.44689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7257E1
iondef1_imon=1.07405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6601E1
iondef4_imon=1.07332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.38026E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.11188E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82579E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.47012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6093E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.44727E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07708E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66165E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31842E1
cs_fil1_imon=6.65028E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5695E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.79094E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2267E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.50775E-3
foreline_cvt_pmon=2.50775E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.67721E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.79963E1	1.43051E-4	-8.80011E1	-2.38419E-5	5.36442E-3	9.34839E-2	2.73002E1	-3.26897E1	-3.26346E1	2.66286E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.79963E1	3.33786E-4	-8.80011E1	2.38419E-4	5.96046E-3	9.34839E-2	2.72962E1	-3.26555E1	-3.26307E1	2.67509E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79966E1	3.09944E-4	-8.80011E1	1.19209E-4	5.48363E-3	9.34362E-2	2.72957E1	-3.26573E1	-3.26284E1	2.68833E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.97704E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.79963E1	-4.76837E-5	-8.80012E1	-2.38419E-5	5.53131E-3	9.35555E-2	2.73346E1	-3.26608E1	-3.26425E1	2.67972E1	1.19188E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.79966E1	1.19209E-4	-8.80009E1	2.38419E-5	5.4121E-3	9.33409E-2	2.72931E1	-3.26951E1	-3.2614E1	2.6953E1	1.19188E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79967E1	9.53674E-5	-8.80009E1	7.15256E-5	5.45979E-3	9.32217E-2	2.73171E1	-3.26705E1	-3.2626E1	2.68701E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79965E1	4.52995E-4	-8.8001E1	0.0E0	4.95911E-3	9.33647E-2	2.73171E1	-3.26518E1	-3.26549E1	2.69085E1	1.19237E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.79966E1	3.57628E-4	-8.80009E1	0.0E0	5.48363E-3	9.35316E-2	2.72799E1	-3.26585E1	-3.26236E1	2.67878E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.79964E1	4.29153E-4	-8.80008E1	-2.38419E-5	5.24521E-3	9.3317E-2	2.72862E1	-3.26862E1	-3.25947E1	2.67926E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.79968E1	-4.76837E-5	-8.80008E1	-1.90735E-4	5.24521E-3	9.36031E-2	2.73225E1	-3.26879E1	-3.26182E1	2.67337E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.79966E1	-2.14577E-4	-8.80008E1	1.19209E-4	5.43594E-3	9.34362E-2	2.72883E1	-3.26777E1	-3.26254E1	2.68352E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03185E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.79965E1	9.53674E-5	-8.80006E1	4.76837E-5	5.43594E-3	9.34362E-2	2.73141E1	-3.26801E1	-3.26194E1	2.68364E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.79967E1	-1.66893E-4	-8.80012E1	1.90735E-4	5.126E-3	9.35316E-2	2.74048E1	-3.27009E1	-3.25304E1	2.67999E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79966E1	1.19209E-4	-8.80011E1	-2.38419E-5	5.67436E-3	9.34839E-2	2.73303E1	-3.26536E1	-3.2632E1	2.68266E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.79968E1	2.14577E-4	-8.80011E1	1.90735E-4	5.65052E-3	9.32455E-2	2.73147E1	-3.26717E1	-3.26464E1	2.6818E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.79968E1	2.38419E-5	-8.80014E1	3.09944E-4	5.4121E-3	9.35793E-2	2.73193E1	-3.2682E1	-3.26319E1	2.68052E1	1.19239E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.98156E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.79967E1	4.76837E-5	-8.8001E1	2.38419E-4	5.6982E-3	9.34601E-2	2.73093E1	-3.26753E1	-3.26236E1	2.678E1	1.19238E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.79973E1	-7.15256E-5	-8.80009E1	9.53674E-5	5.4121E-3	9.34124E-2	2.73039E1	-3.26614E1	-3.2629E1	2.67331E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.79971E1	7.15256E-5	-8.80008E1	3.8147E-4	5.34058E-3	9.31025E-2	2.73063E1	-3.265E1	-3.26308E1	2.69153E1	1.19239E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.79971E1	-1.19209E-4	-8.80009E1	-1.19209E-4	5.45979E-3	9.32217E-2	2.7257E1	-3.25707E1	-3.26134E1	2.6601E1	1.1929E-7	2.50775E-3	2.50775E-3	6.32896E-3	3.01738E-1