[Scan]
initial_time=2015-12-18T21:31:24
final_time=2015-12-18T21:31:45
ip_count=19
run=1020
dataset=5
scan=263
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.86132E-6
ql1_vset=
ql1_vmon=-8.79984E1
ql1_imon=-1.07752E-9
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.43732E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.20159E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.59285E-8
mult1=-9.71631E-9
mult2=-2.65074E-9
rf_tmon=-3.89958E-3
rf_agc=3.37001E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.02698E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.96036E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54601E1
cs_ef1b_imon=3.19173E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.0894E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08402E0
lens1_imon=1.48511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.39655E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.39025E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=2.33996E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=9.38356E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=4.04211E-8
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.48487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.54867E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=9.07671E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=8.46069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5465E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72027E1
cs_ef2a_imon=3.20723E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38869E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.46167E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72961E1
iondef1_imon=1.08328E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66358E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.40048E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=8.11528E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-9.40055E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.75915E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.43531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65883E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31806E1
cs_fil1_imon=7.35306E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62956E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.44009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40051E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.03712E-1
chamber_ion_pmon=1.19212E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3918E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.79981E1	-4.76837E-5	-8.80007E1	4.76837E-5	5.22137E-3	9.34124E-2	2.73105E1	-3.26915E1	-3.26062E1	2.66971E1	1.19188E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.43285E-2	-8.79982E1	1.90735E-4	-8.80007E1	-2.38419E-5	5.29289E-3	9.3317E-2	2.72815E1	-3.26667E1	-3.26225E1	2.67836E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.79982E1	2.86102E-4	-8.80009E1	9.53674E-5	5.43594E-3	9.34839E-2	2.73051E1	-3.2632E1	-3.26074E1	2.68761E1	1.19186E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.79979E1	3.33786E-4	-8.80006E1	5.00679E-4	5.17368E-3	9.37462E-2	2.73346E1	-3.2636E1	-3.26608E1	2.68198E1	1.19239E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.03804E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.79979E1	4.52995E-4	-8.80009E1	4.05312E-4	5.34058E-3	9.35316E-2	2.72919E1	-3.26428E1	-3.26326E1	2.66442E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.79982E1	2.6226E-4	-8.80007E1	4.29153E-4	5.43594E-3	9.35078E-2	2.72895E1	-3.26434E1	-3.25816E1	2.6631E1	1.1929E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.79981E1	9.53674E-5	-8.80008E1	3.8147E-4	5.43594E-3	9.3317E-2	2.72907E1	-3.26867E1	-3.25996E1	2.67157E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79982E1	1.43051E-4	-8.8001E1	9.53674E-5	5.26905E-3	9.36985E-2	2.73099E1	-3.26512E1	-3.26597E1	2.68358E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03712E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.79983E1	-2.6226E-4	-8.80013E1	2.6226E-4	5.45979E-3	9.38654E-2	2.73244E1	-3.26875E1	-3.2597E1	2.69327E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.79981E1	-2.6226E-4	-8.80009E1	2.14577E-4	5.34058E-3	9.34839E-2	2.73255E1	-3.26381E1	-3.26591E1	2.67309E1	1.1929E-7	2.51575E-3	2.51575E-3	6.34385E-3	3.01237E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.79981E1	-3.8147E-4	-8.80008E1	2.14577E-4	5.79357E-3	9.34362E-2	2.73616E1	-3.26597E1	-3.26278E1	2.6637E1	1.1929E-7	2.51411E-3	2.51411E-3	6.3016E-3	3.00639E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.7998E1	-4.76837E-5	-8.80005E1	2.38419E-4	5.8651E-3	9.36031E-2	2.73381E1	-3.26927E1	-3.26136E1	2.67956E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.79982E1	-3.09944E-4	-8.80007E1	1.90735E-4	5.81741E-3	9.34362E-2	2.7283E1	-3.2643E1	-3.26353E1	2.67666E1	1.1929E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.79984E1	-1.19209E-4	-8.80007E1	1.43051E-4	5.55515E-3	9.3317E-2	2.72983E1	-3.26835E1	-3.26287E1	2.68433E1	1.1929E-7	2.51615E-3	2.51615E-3	6.32151E-3	2.99483E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.79982E1	-1.66893E-4	-8.80005E1	2.6226E-4	5.38826E-3	9.36985E-2	2.73195E1	-3.26579E1	-3.26392E1	2.667E1	1.19232E-7	2.52359E-3	2.52359E-3	6.3074E-3	2.98092E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.79984E1	-2.38419E-4	-8.80005E1	-2.38419E-5	5.126E-3	9.3317E-2	2.73151E1	-3.26496E1	-3.26443E1	2.67619E1	1.19135E-7	2.51607E-3	2.51607E-3	6.32112E-3	3.00432E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.79985E1	1.66893E-4	-8.80005E1	2.38419E-5	5.05447E-3	9.32693E-2	2.73247E1	-3.26291E1	-3.26848E1	2.69427E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.79982E1	-4.76837E-5	-8.80005E1	2.38419E-5	5.34058E-3	9.35078E-2	2.73252E1	-3.26561E1	-3.25977E1	2.68376E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.79982E1	-2.6226E-4	-8.80007E1	-4.76837E-5	5.07832E-3	9.32693E-2	2.73177E1	-3.26657E1	-3.26344E1	2.68292E1	1.19188E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.79984E1	-1.90735E-4	-8.80011E1	-2.38419E-5	5.126E-3	9.32455E-2	2.72961E1	-3.26278E1	-3.26326E1	2.66358E1	1.19212E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.03712E-1