[Scan]
initial_time=2015-12-18T21:32:20
final_time=2015-12-18T21:32:41
ip_count=19
run=1020
dataset=5
scan=265
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.74981E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-9.61065E-10
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=1.40791E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.91122E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.57895E-8
mult1=-9.45141E-9
mult2=-2.69865E-9
rf_tmon=-4.18798E-3
rf_agc=3.30752E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=5.4822E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=3.18547E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=1.09529E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07843E0
lens1_imon=1.47436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6429E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04139E1
cs_ea2_imon=1.39331E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84603E1
cs_ef1a_imon=3.04021E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.38989E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.34718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63838E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.40971E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.97261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=4.03484E-8
tplens_vset=1.4E-1
tplens_vmon=1.61489E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.51297E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=8.57795E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.19534E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74912E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53171E0
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71767E1
cs_ef2a_imon=3.21119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10147E0
os_ef2alow_imon=-2.64409E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.67894E-1
os_ef2bup_imon=-5.27485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.4562E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.08173E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.07547E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66142E1
iondef4_imon=1.06627E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.38399E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.12878E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-7.36173E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47146E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56556E1
einzel_imon=7.94501E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-9.02986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39376E-4
mask2_vset=0.0E0
mask2_vmon=-1.86118E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.35331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.74808E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.22236E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.44621E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07619E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65674E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31796E1
cs_fil1_imon=7.5191E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02472E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67572E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.38537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05716E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61291E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-1.88146E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59958E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79478E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79986E1	0.0E0	-8.80004E1	1.90735E-4	5.38826E-3	9.31978E-2	2.73169E1	-3.26803E1	-3.26042E1	2.68502E1	1.19239E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.79983E1	3.09944E-4	-8.80003E1	4.52995E-4	5.03063E-3	9.3317E-2	2.73118E1	-3.2645E1	-3.26487E1	2.68088E1	1.19239E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.79986E1	4.76837E-5	-8.80004E1	3.8147E-4	4.95911E-3	9.34362E-2	2.73257E1	-3.26885E1	-3.26419E1	2.68454E1	1.19079E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.79987E1	4.76837E-4	-8.80005E1	1.43051E-4	5.07832E-3	9.34601E-2	2.72957E1	-3.26691E1	-3.26372E1	2.69194E1	1.19239E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.79987E1	3.33786E-4	-8.80003E1	3.33786E-4	4.8399E-3	9.33886E-2	2.73009E1	-3.26747E1	-3.26356E1	2.67229E1	1.1929E-7	2.50882E-3	2.50882E-3	6.33436E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79985E1	3.57628E-4	-8.80004E1	1.90735E-4	5.03063E-3	9.33409E-2	2.72823E1	-3.26747E1	-3.2623E1	2.67986E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.79989E1	3.33786E-4	-8.80007E1	7.15256E-5	5.03063E-3	9.33409E-2	2.73141E1	-3.26554E1	-3.26645E1	2.68923E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.79989E1	6.19888E-4	-8.80004E1	1.66893E-4	5.36442E-3	9.31263E-2	2.72853E1	-3.26699E1	-3.25984E1	2.67247E1	1.19239E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.79987E1	4.29153E-4	-8.80003E1	2.6226E-4	5.17368E-3	9.32455E-2	2.7298E1	-3.26649E1	-3.26054E1	2.68466E1	1.19237E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.79989E1	3.33786E-4	-8.80004E1	4.52995E-4	5.26905E-3	9.35316E-2	2.73003E1	-3.26278E1	-3.26512E1	2.67848E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.7999E1	-2.38419E-5	-8.80005E1	4.29153E-4	5.10216E-3	9.35555E-2	2.73207E1	-3.26332E1	-3.26524E1	2.67746E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.03185E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79989E1	-7.15256E-5	-8.80006E1	7.15256E-5	5.05447E-3	9.32693E-2	2.72949E1	-3.26549E1	-3.25912E1	2.68214E1	1.19264E-7	2.52154E-3	2.52154E-3	6.32661E-3	3.02265E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.79989E1	1.19209E-4	-8.80005E1	0.0E0	5.53131E-3	9.31978E-2	2.73285E1	-3.26314E1	-3.26134E1	2.68496E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.79991E1	-4.52995E-4	-8.80004E1	2.14577E-4	5.4121E-3	9.33409E-2	2.72839E1	-3.26862E1	-3.26278E1	2.67723E1	1.19186E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.7999E1	1.90735E-4	-8.80003E1	6.91414E-4	5.76973E-3	9.35316E-2	2.73346E1	-3.26815E1	-3.26006E1	2.69476E1	1.1924E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.006E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.79986E1	4.52995E-4	-8.80002E1	5.48363E-4	5.55515E-3	9.36031E-2	2.73039E1	-3.26609E1	-3.262E1	2.67451E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02922E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.79986E1	2.14577E-4	-8.8E1	5.00679E-4	5.4121E-3	9.34839E-2	2.73009E1	-3.26819E1	-3.2617E1	2.68472E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.79988E1	0.0E0	-8.80006E1	4.05312E-4	5.24521E-3	9.3627E-2	2.73144E1	-3.26857E1	-3.26347E1	2.68001E1	1.19188E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.7999E1	2.38419E-4	-8.80005E1	2.86102E-4	5.34058E-3	9.35555E-2	2.73009E1	-3.26669E1	-3.26512E1	2.69259E1	1.19239E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.97901E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.79989E1	3.09944E-4	-8.80004E1	2.86102E-4	5.14984E-3	9.32932E-2	2.73045E1	-3.26669E1	-3.262E1	2.66142E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9926E-1