[Scan]
initial_time=2015-12-18T21:32:48
final_time=2015-12-18T21:33:09
ip_count=19
run=1020
dataset=5
scan=266
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.76415E-6
ql1_vset=
ql1_vmon=-8.79991E1
ql1_imon=-9.19962E-10
ql2_vset=
ql2_vmon=4.29153E-4
ql2_imon=1.45813E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.83145E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.57773E-8
mult1=-9.78308E-9
mult2=-2.87024E-9
rf_tmon=-5.13477E-3
rf_agc=3.26661E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.51701E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.98487E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5316E1
cs_ef1b_imon=3.17623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02406E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05282E1
cs_ea1_imon=1.10599E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0738E0
lens1_imon=1.29044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03426E1
cs_ea2_imon=1.40772E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.04541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.38826E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15396E1
os_ea1_imon=2.36159E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=4.03311E-8
tplens_vset=1.4E-1
tplens_vmon=1.6174E0
tplens_imon=-3.7505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25983E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.01866E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=8.56523E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.20225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55672E0
os_ea2_imon=-8.32879E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71882E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.54487E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.45013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72886E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67253E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.39733E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=8.13093E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.50898E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=7.36478E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6151E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.44396E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07912E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=8.09187E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.72567E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67777E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51485E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19186E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69814E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79987E1	2.6226E-4	-8.80002E1	-2.14577E-4	5.50747E-3	9.34601E-2	2.72961E1	-3.26518E1	-3.26627E1	2.68238E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.79987E1	3.8147E-4	-8.80006E1	3.33786E-4	5.4121E-3	9.37223E-2	2.72871E1	-3.26591E1	-3.26314E1	2.67241E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79984E1	4.05312E-4	-8.80008E1	1.90735E-4	5.6982E-3	9.34839E-2	2.72662E1	-3.26938E1	-3.26372E1	2.68683E1	1.1929E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.02545E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.79985E1	1.19209E-4	-8.80005E1	9.53674E-5	5.34058E-3	9.34839E-2	2.73099E1	-3.26819E1	-3.2605E1	2.67872E1	1.1924E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.79986E1	1.66893E-4	-8.80008E1	1.19209E-4	5.34058E-3	9.33647E-2	2.72862E1	-3.26915E1	-3.26484E1	2.68418E1	1.1929E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99879E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.79982E1	2.86102E-4	-8.80006E1	1.90735E-4	5.19753E-3	9.34839E-2	2.73131E1	-3.26413E1	-3.2607E1	2.67635E1	1.19238E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.79984E1	9.53674E-5	-8.80004E1	2.38419E-4	5.36442E-3	9.32217E-2	2.73051E1	-3.26472E1	-3.2636E1	2.68442E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.79985E1	-2.38419E-5	-8.80007E1	-4.76837E-5	5.84126E-3	9.34601E-2	2.73153E1	-3.26567E1	-3.26128E1	2.67619E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.79987E1	2.38419E-4	-8.80004E1	7.15256E-5	5.50747E-3	9.35078E-2	2.73039E1	-3.26879E1	-3.26332E1	2.69043E1	1.19238E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.79987E1	4.52995E-4	-8.80003E1	2.86102E-4	5.79357E-3	9.32932E-2	2.73111E1	-3.26518E1	-3.26404E1	2.67241E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79989E1	1.43051E-4	-8.80005E1	0.0E0	5.36442E-3	9.35078E-2	2.73009E1	-3.27077E1	-3.26362E1	2.68695E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79988E1	-1.19209E-4	-8.80003E1	1.66893E-4	5.31673E-3	9.35078E-2	2.73417E1	-3.2662E1	-3.26296E1	2.66604E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79987E1	1.43051E-4	-8.80003E1	-7.15256E-5	5.45979E-3	9.31501E-2	2.72859E1	-3.26801E1	-3.26242E1	2.67902E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.79985E1	7.15256E-5	-8.80003E1	2.38419E-5	5.55515E-3	9.32455E-2	2.72909E1	-3.2672E1	-3.26307E1	2.68557E1	1.19239E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.98665E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.79985E1	1.66893E-4	-8.80006E1	-9.53674E-5	5.38826E-3	9.32932E-2	2.72979E1	-3.26801E1	-3.25984E1	2.66478E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.79987E1	2.86102E-4	-8.80007E1	2.38419E-5	5.22137E-3	9.34601E-2	2.73015E1	-3.2632E1	-3.2614E1	2.69157E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.79986E1	2.86102E-4	-8.80009E1	1.19209E-4	5.19753E-3	9.32932E-2	2.73228E1	-3.26767E1	-3.26413E1	2.68797E1	1.19135E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.79989E1	0.0E0	-8.80009E1	0.0E0	5.19753E-3	9.36031E-2	2.73387E1	-3.26762E1	-3.26001E1	2.67242E1	1.1929E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.79991E1	2.14577E-4	-8.80009E1	0.0E0	5.00679E-3	9.39131E-2	2.72727E1	-3.26567E1	-3.26188E1	2.69181E1	1.19188E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.79991E1	4.29153E-4	-8.80005E1	-1.43051E-4	5.34058E-3	9.3627E-2	2.72886E1	-3.26726E1	-3.25983E1	2.67253E1	1.19186E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1