[Scan]
initial_time=2015-12-18T21:33:44
final_time=2015-12-18T21:34:04
ip_count=19
run=1020
dataset=5
scan=268
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.79076E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-8.79538E-10
ql2_vset=
ql2_vmon=1.66893E-4
ql2_imon=1.40105E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.66246E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.57877E-8
mult1=-1.00377E-8
mult2=-2.74195E-9
rf_tmon=-5.56063E-3
rf_agc=3.25243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=5.61619E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61961E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.17695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=1.09741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06605E0
lens1_imon=1.55576E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.99928E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.39649E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=3.04541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.38976E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=2.32842E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30578E0
cs_ionrep_imon=9.16549E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=1.97719E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=4.03106E-8
tplens_vset=1.4E-1
tplens_vmon=1.58775E0
tplens_imon=-1.92739E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.48356E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26447E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.90958E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=8.51778E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33327E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56947E0
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10261E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.44581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72964E1
iondef1_imon=1.12644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68531E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.39052E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=8.11411E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10131E0
cs_ionaccel_imon=-7.95896E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82558E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.32146E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=5.89508E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.43952E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07137E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=6.55418E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.07047E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67556E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74326E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62876E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22509E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.99343E-1
chamber_ion_pmon=1.1919E-7
chamber_cvt_pmon=2.51182E-3
foreline_cvt_pmon=2.51182E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.90216E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.79989E1	-2.38419E-5	-8.80002E1	2.86102E-4	5.00679E-3	9.33886E-2	2.72883E1	-3.26855E1	-3.25852E1	2.68136E1	1.19239E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.21643E-2	-8.79992E1	1.43051E-4	-8.80005E1	-2.38419E-5	4.93526E-3	9.32455E-2	2.73192E1	-3.2675E1	-3.26731E1	2.67631E1	1.19238E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.79989E1	-2.38419E-5	-8.80003E1	0.0E0	5.14984E-3	9.36747E-2	2.7311E1	-3.26537E1	-3.26726E1	2.6819E1	1.19237E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.02545E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.7999E1	2.6226E-4	-8.80001E1	9.53674E-5	5.29289E-3	9.34839E-2	2.73193E1	-3.26685E1	-3.26236E1	2.69148E1	1.19239E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.79992E1	4.76837E-5	-8.80002E1	2.38419E-4	5.48363E-3	9.35078E-2	2.73159E1	-3.26609E1	-3.26416E1	2.67547E1	1.19239E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.79991E1	1.66893E-4	-8.80002E1	1.43051E-4	5.45979E-3	9.35316E-2	2.72937E1	-3.26837E1	-3.26254E1	2.68046E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.03804E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.79991E1	-1.66893E-4	-8.80001E1	3.57628E-4	5.26905E-3	9.33409E-2	2.72895E1	-3.26609E1	-3.2638E1	2.6834E1	1.1929E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.79988E1	-9.53674E-5	-8.80004E1	2.38419E-4	5.48363E-3	9.33886E-2	2.73039E1	-3.26573E1	-3.26567E1	2.68022E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.7999E1	2.38419E-4	-8.80003E1	1.66893E-4	5.67436E-3	9.33409E-2	2.73345E1	-3.26933E1	-3.26176E1	2.68677E1	1.1929E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.79992E1	-9.53674E-5	-8.80003E1	2.86102E-4	5.31673E-3	9.3174E-2	2.72986E1	-3.26614E1	-3.26378E1	2.68418E1	1.19238E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.79996E1	3.09944E-4	-8.80003E1	2.6226E-4	5.48363E-3	9.35316E-2	2.73129E1	-3.26687E1	-3.2632E1	2.68118E1	1.19239E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79995E1	1.19209E-4	-8.80005E1	3.33786E-4	5.48363E-3	9.35316E-2	2.7324E1	-3.26832E1	-3.26148E1	2.67662E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.79993E1	2.38419E-4	-8.80003E1	5.00679E-4	5.29289E-3	9.32932E-2	2.73198E1	-3.26597E1	-3.26101E1	2.67631E1	1.19239E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.79991E1	-7.15256E-5	-8.80007E1	1.66893E-4	5.24521E-3	9.36747E-2	2.73297E1	-3.26741E1	-3.262E1	2.67367E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99083E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.79992E1	0.0E0	-8.80002E1	2.38419E-4	5.57899E-3	9.34362E-2	2.73225E1	-3.26747E1	-3.25882E1	2.69421E1	1.19239E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.79992E1	-9.53674E-5	-8.80003E1	9.53674E-5	5.48363E-3	9.3317E-2	2.72781E1	-3.2641E1	-3.2617E1	2.67301E1	1.19237E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.99613E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.79994E1	-1.43051E-4	-8.80006E1	5.00679E-4	5.53131E-3	9.32217E-2	2.72957E1	-3.26455E1	-3.26148E1	2.67487E1	1.19137E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.79995E1	2.38419E-5	-8.80001E1	3.09944E-4	5.126E-3	9.34362E-2	2.7321E1	-3.26561E1	-3.25912E1	2.6898E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.79994E1	0.0E0	-8.80003E1	2.6226E-4	5.50747E-3	9.34362E-2	2.73178E1	-3.26944E1	-3.26086E1	2.67184E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.79995E1	1.66893E-4	-8.80005E1	2.14577E-4	5.24521E-3	9.35316E-2	2.72964E1	-3.26447E1	-3.26416E1	2.68531E1	1.1919E-7	2.51182E-3	2.51182E-3	6.31798E-3	2.99343E-1