[Scan]
initial_time=2015-12-18T21:34:39
final_time=2015-12-18T21:34:59
ip_count=19
run=1020
dataset=5
scan=270
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.8733E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-8.38017E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.44601E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.48497E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.57641E-8
mult1=-9.87283E-9
mult2=-2.6727E-9
rf_tmon=-4.206E-3
rf_agc=3.42649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.43249E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53178E1
cs_ef1b_imon=3.17443E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05331E1
cs_ea1_imon=1.08291E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07681E0
lens1_imon=1.54279E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.40412E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.39201E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.35763E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.3439E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.97143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=4.0383E-8
tplens_vset=1.4E-1
tplens_vmon=1.6144E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.48198E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27125E1
iondef2_imon=1.60239E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.6925E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=8.57605E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55071E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.51483E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.43968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.11572E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67674E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.37469E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=8.09649E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=8.09299E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.74834E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.96103E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.43958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08188E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65731E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31792E1
cs_fil1_imon=7.59933E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03143E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67771E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72367E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.94731E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.43285E-2	-8.79993E1	-3.33786E-4	-8.80004E1	1.90735E-4	5.14984E-3	9.39846E-2	2.73098E1	-3.26762E1	-3.26272E1	2.68371E1	1.1929E-7	2.51632E-3	2.51632E-3	6.28592E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.79993E1	-3.09944E-4	-8.80003E1	3.33786E-4	5.24521E-3	9.39608E-2	2.73141E1	-3.26777E1	-3.26248E1	2.68578E1	1.19239E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.79995E1	-3.09944E-4	-8.8E1	5.00679E-4	5.36442E-3	9.35316E-2	2.73039E1	-3.26437E1	-3.26596E1	2.67462E1	1.19237E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79996E1	4.76837E-5	-8.80002E1	2.38419E-4	5.00679E-3	9.32455E-2	2.73269E1	-3.26573E1	-3.26531E1	2.6804E1	1.1929E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.79994E1	-4.76837E-5	-8.80002E1	1.90735E-4	4.91142E-3	9.34839E-2	2.72877E1	-3.26801E1	-3.26482E1	2.69355E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.79994E1	-7.15256E-5	-8.8E1	3.33786E-4	4.88758E-3	9.36508E-2	2.73081E1	-3.26831E1	-3.26146E1	2.66899E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47923E-2	-8.79998E1	-2.38419E-4	-8.80001E1	3.09944E-4	5.24521E-3	9.34362E-2	2.72898E1	-3.26591E1	-3.26364E1	2.69193E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.46377E-2	-8.79996E1	-4.76837E-5	-8.80002E1	3.57628E-4	4.88758E-3	9.35793E-2	2.73051E1	-3.26621E1	-3.25978E1	2.68911E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.79994E1	2.14577E-4	-8.80003E1	5.24521E-4	4.95911E-3	9.36031E-2	2.72733E1	-3.26212E1	-3.25996E1	2.67547E1	1.19237E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99879E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.47923E-2	-8.79992E1	2.14577E-4	-8.80004E1	6.19888E-4	5.14984E-3	9.35316E-2	2.73144E1	-3.26724E1	-3.25785E1	2.68673E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79991E1	0.0E0	-8.80006E1	3.09944E-4	4.79221E-3	9.36031E-2	2.72903E1	-3.26767E1	-3.26254E1	2.69127E1	1.1929E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.45602E-2	-8.79989E1	-2.38419E-4	-8.80003E1	2.14577E-4	4.91142E-3	9.35316E-2	2.73088E1	-3.26447E1	-3.26765E1	2.69978E1	1.1929E-7	2.52448E-3	2.52448E-3	6.31798E-3	3.006E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.79994E1	-2.86102E-4	-8.80006E1	3.8147E-4	5.14984E-3	9.35555E-2	2.73153E1	-3.26398E1	-3.2614E1	2.66983E1	1.1929E-7	2.52454E-3	2.52454E-3	6.31321E-3	3.01193E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.47149E-2	-8.79992E1	-7.62939E-4	-8.80003E1	3.09944E-4	5.126E-3	9.33409E-2	2.72901E1	-3.26248E1	-3.26422E1	2.69013E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.44831E-2	-8.79992E1	-6.91414E-4	-8.80003E1	1.43051E-4	5.00679E-3	9.36508E-2	2.73159E1	-3.26813E1	-3.26044E1	2.69079E1	1.19238E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.79993E1	-3.33786E-4	-8.80006E1	5.72205E-4	5.05447E-3	9.38177E-2	2.73093E1	-3.26434E1	-3.26458E1	2.68623E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.97704E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.79991E1	-3.33786E-4	-8.80002E1	0.0E0	5.43594E-3	9.35316E-2	2.73105E1	-3.26633E1	-3.26356E1	2.67794E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.97901E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.47149E-2	-8.79995E1	0.0E0	-8.80003E1	1.19209E-4	5.34058E-3	9.377E-2	2.73134E1	-3.26461E1	-3.26455E1	2.68696E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79995E1	-4.29153E-4	-8.80002E1	2.86102E-4	5.22137E-3	9.35555E-2	2.73339E1	-3.26825E1	-3.26062E1	2.6855E1	1.19186E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.79992E1	-4.05312E-4	-8.8E1	2.38419E-4	5.05447E-3	9.37939E-2	2.73435E1	-3.27125E1	-3.25996E1	2.67674E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1