[Scan]
initial_time=2015-12-18T21:36:28
final_time=2015-12-18T21:36:48
ip_count=19
run=1020
dataset=5
scan=274
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79115E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-8.12519E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.40575E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.32352E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58278E-8
mult1=-9.65304E-9
mult2=-2.75853E-9
rf_tmon=-5.06988E-3
rf_agc=3.37397E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.80275E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69116E0
bslens_imon=2.59815E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19621E1
lens5a_imon=1.9795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05269E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=3.16362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02268E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05172E1
cs_ea1_imon=1.10644E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05553E0
lens1_imon=1.08489E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03837E1
cs_ea2_imon=1.44582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84905E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.39186E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15869E1
os_ea1_imon=2.32843E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23067E0
cs_ionrep_imon=9.44457E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.95269E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.03789E-8
tplens_vset=1.4E-1
tplens_vmon=1.63347E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26213E1
iondef3_imon=1.51083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.59604E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.04071E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28515E0
ionrepsh_imon=8.83486E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.20649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53737E0
os_ea2_imon=-7.55271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00395E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0954E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.45878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72892E1
iondef1_imon=1.09725E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.38676E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=8.10365E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56645E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.73297E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.51354E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=6.98735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40049E0
defgridb_imon=6.14624E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.4433E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65619E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31815E1
cs_fil1_imon=6.392E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16705E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21315E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63636E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.69483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.32863E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.8E1	2.14577E-4	-8.80005E1	9.53674E-5	5.31673E-3	9.3317E-2	2.73092E1	-3.26822E1	-3.26474E1	2.68148E1	1.19237E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00144E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.79999E1	4.76837E-5	-8.80007E1	-4.76837E-5	5.24521E-3	9.3317E-2	2.73394E1	-3.26865E1	-3.25967E1	2.69448E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79999E1	-1.19209E-4	-8.80008E1	9.53674E-5	5.43594E-3	9.35555E-2	2.72931E1	-3.26687E1	-3.26254E1	2.66555E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.79998E1	-2.86102E-4	-8.80004E1	-2.38419E-5	4.98295E-3	9.32693E-2	2.73051E1	-3.26855E1	-3.26122E1	2.6822E1	1.1929E-7	2.51393E-3	2.51393E-3	6.30212E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79997E1	2.38419E-5	-8.80005E1	2.6226E-4	5.36442E-3	9.34124E-2	2.72931E1	-3.26819E1	-3.26464E1	2.68472E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.79998E1	-1.66893E-4	-8.80008E1	2.6226E-4	5.53131E-3	9.33647E-2	2.73435E1	-3.26891E1	-3.26482E1	2.67698E1	1.1929E-7	2.52209E-3	2.52209E-3	6.26916E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.79996E1	-2.6226E-4	-8.80006E1	4.76837E-5	5.50747E-3	9.33409E-2	2.72799E1	-3.26639E1	-3.26248E1	2.66845E1	1.19238E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79998E1	1.19209E-4	-8.80007E1	-1.90735E-4	5.48363E-3	9.32217E-2	2.72976E1	-3.2655E1	-3.26527E1	2.68569E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.79994E1	1.90735E-4	-8.80005E1	2.14577E-4	5.36442E-3	9.34362E-2	2.73222E1	-3.26866E1	-3.2593E1	2.68225E1	1.1929E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.01862E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.8E1	9.53674E-5	-8.80007E1	3.33786E-4	5.10216E-3	9.3174E-2	2.72953E1	-3.26542E1	-3.2607E1	2.66412E1	1.19184E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99879E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.79997E1	-2.38419E-5	-8.80005E1	1.90735E-4	5.50747E-3	9.31263E-2	2.72829E1	-3.26314E1	-3.26104E1	2.6661E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.79997E1	1.19209E-4	-8.80002E1	1.19209E-4	5.50747E-3	9.34601E-2	2.72847E1	-3.26422E1	-3.26014E1	2.67674E1	1.19238E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.79997E1	-1.66893E-4	-8.80002E1	2.38419E-4	5.38826E-3	9.36031E-2	2.73189E1	-3.26681E1	-3.26086E1	2.68298E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.79998E1	-1.43051E-4	-8.80004E1	1.19209E-4	5.62668E-3	9.31501E-2	2.73027E1	-3.26506E1	-3.26308E1	2.68935E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.79996E1	1.90735E-4	-8.80003E1	1.19209E-4	5.43594E-3	9.31263E-2	2.72998E1	-3.26573E1	-3.26402E1	2.67307E1	1.19238E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79994E1	2.38419E-5	-8.80004E1	9.53674E-5	5.26905E-3	9.32217E-2	2.72915E1	-3.26714E1	-3.26467E1	2.68545E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.79995E1	4.76837E-5	-8.80003E1	1.19209E-4	5.53131E-3	9.31978E-2	2.72926E1	-3.26591E1	-3.26279E1	2.68169E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80001E1	7.15256E-5	-8.80002E1	1.90735E-4	5.31673E-3	9.33409E-2	2.73034E1	-3.26666E1	-3.26469E1	2.66321E1	1.1929E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.01475E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.79995E1	5.24521E-4	-8.80006E1	3.33786E-4	5.45979E-3	9.37223E-2	2.73315E1	-3.26603E1	-3.25894E1	2.68815E1	1.1929E-7	2.51182E-3	2.51182E-3	6.31798E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.79992E1	0.0E0	-8.80004E1	2.86102E-4	5.65052E-3	9.3317E-2	2.72892E1	-3.26803E1	-3.26213E1	2.6837E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1