[Scan]
initial_time=2015-12-18T21:36:56
final_time=2015-12-18T21:37:16
ip_count=19
run=1020
dataset=5
scan=275
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.82992E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-7.66814E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.38545E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.33735E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.57527E-8
mult1=-9.55978E-9
mult2=-2.74456E-9
rf_tmon=-3.86954E-3
rf_agc=3.30572E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.30756E-10
bslens_vset=-6.2E0
bslens_vmon=-6.633E0
bslens_imon=2.63488E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.97509E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.16614E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05055E1
cs_ea1_imon=1.07521E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05124E0
lens1_imon=1.46688E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03617E1
cs_ea2_imon=1.40137E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.39435E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15287E1
os_ea1_imon=2.34533E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.10524E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26557E0
cs_ionrep_imon=9.38213E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.96386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=4.04048E-8
tplens_vset=1.4E-1
tplens_vmon=1.59001E0
tplens_imon=-1.23519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.4932E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.58539E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98471E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=9.01091E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28209E0
ionrepsh_imon=8.55938E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33395E1
lens5b_imon=2.19106E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52696E0
os_ea2_imon=-6.48754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32262E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.45194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.29745E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.10694E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.10276E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68928E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.38094E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=8.10289E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0911E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82593E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.28854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.64209E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.11958E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43419E0
defgridb_imon=6.22337E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33288E1
os_fil1_imon=9.44192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65864E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=7.05273E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59953E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68238E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74799E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40053E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.50592E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.45602E-2	-8.79994E1	9.53674E-5	-8.80003E1	1.19209E-4	5.53131E-3	9.34601E-2	2.72915E1	-3.26638E1	-3.26248E1	2.6819E1	1.19237E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.00676E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.42513E-2	-8.79999E1	4.76837E-5	-8.80006E1	-4.76837E-5	5.55515E-3	9.32932E-2	2.72991E1	-3.26332E1	-3.26464E1	2.67589E1	1.19239E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.48695E-2	-8.79999E1	0.0E0	-8.80006E1	1.43051E-4	5.53131E-3	9.34362E-2	2.72656E1	-3.26478E1	-3.26278E1	2.69657E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.98554E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.44831E-2	-8.79999E1	0.0E0	-8.80005E1	7.15256E-5	5.48363E-3	9.34362E-2	2.72793E1	-3.26681E1	-3.26224E1	2.67499E1	1.1924E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.79997E1	-4.76837E-5	-8.80004E1	7.15256E-5	5.57899E-3	9.3627E-2	2.73153E1	-3.26398E1	-3.26326E1	2.66388E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.79997E1	9.53674E-5	-8.80003E1	-1.43051E-4	4.95911E-3	9.3627E-2	2.73123E1	-3.26561E1	-3.26524E1	2.68166E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79998E1	-1.66893E-4	-8.80003E1	4.76837E-5	5.48363E-3	9.36508E-2	2.73009E1	-3.26771E1	-3.26068E1	2.68785E1	1.19238E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.79997E1	1.43051E-4	-8.80005E1	2.38419E-5	5.17368E-3	9.36031E-2	2.72835E1	-3.26458E1	-3.26158E1	2.69199E1	1.19237E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.79998E1	-1.66893E-4	-8.80007E1	1.19209E-4	5.8651E-3	9.36508E-2	2.72955E1	-3.265E1	-3.26218E1	2.67211E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03027E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.8E1	-3.8147E-4	-8.80007E1	3.8147E-4	5.36442E-3	9.34839E-2	2.73375E1	-3.26609E1	-3.25918E1	2.68665E1	1.19186E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.79994E1	-1.66893E-4	-8.80006E1	3.57628E-4	5.43594E-3	9.32217E-2	2.72606E1	-3.26224E1	-3.26603E1	2.67595E1	1.19238E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79994E1	2.38419E-5	-8.80003E1	2.14577E-4	5.05447E-3	9.3317E-2	2.72949E1	-3.26506E1	-3.26008E1	2.67631E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.79994E1	-9.53674E-5	-8.80004E1	2.6226E-4	5.29289E-3	9.3317E-2	2.72945E1	-3.26496E1	-3.2626E1	2.68022E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.48695E-2	-8.79998E1	-7.15256E-5	-8.80003E1	-2.38419E-5	5.43594E-3	9.32217E-2	2.73081E1	-3.26579E1	-3.26398E1	2.68893E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02769E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.50241E-2	-8.8E1	4.76837E-5	-8.80004E1	-1.90735E-4	5.36442E-3	9.33647E-2	2.72985E1	-3.26747E1	-3.26284E1	2.67421E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.47149E-2	-8.79995E1	1.19209E-4	-8.80003E1	7.15256E-5	5.50747E-3	9.32455E-2	2.72931E1	-3.26741E1	-3.26272E1	2.67884E1	1.19186E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.79996E1	-9.53674E-5	-8.8E1	-2.38419E-4	4.98295E-3	9.31501E-2	2.72874E1	-3.2649E1	-3.26402E1	2.68754E1	1.19238E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.03449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.79996E1	1.43051E-4	-8.80001E1	1.66893E-4	5.07832E-3	9.32693E-2	2.72797E1	-3.26472E1	-3.26219E1	2.68478E1	1.19186E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.79997E1	-9.53674E-5	-8.80002E1	9.53674E-5	5.43594E-3	9.35316E-2	2.72901E1	-3.27131E1	-3.26603E1	2.66682E1	1.1929E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.79998E1	4.76837E-5	-8.80001E1	3.33786E-4	5.55515E-3	9.33409E-2	2.72985E1	-3.265E1	-3.26194E1	2.68928E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9926E-1