[Scan]
initial_time=2015-12-18T21:37:23
final_time=2015-12-18T21:37:43
ip_count=19
run=1020
dataset=5
scan=276
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79094E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-7.88963E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.38956E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.32522E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58451E-8
mult1=-1.00294E-8
mult2=-2.69266E-9
rf_tmon=-6.02651E-3
rf_agc=3.22881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.66924E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6391E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=3.16578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=1.10887E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0702E0
lens1_imon=1.52837E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.40087E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83914E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=1.38806E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.31977E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.10055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=9.4881E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=1.948E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=4.03816E-8
tplens_vset=1.4E-1
tplens_vmon=1.60659E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=9.36818E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22626E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56393E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00342E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70381E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4848E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.46563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67625E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.39576E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=8.09027E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.80602E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.44955E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07521E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66182E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=7.68342E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.01088E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67943E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50583E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58071E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22608E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68903E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.79998E1	4.76837E-5	-8.80003E1	3.09944E-4	5.34058E-3	9.34124E-2	2.72907E1	-3.26813E1	-3.25791E1	2.68496E1	1.19238E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.01871E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.79998E1	-2.14577E-4	-8.80004E1	-4.76837E-5	5.14984E-3	9.33886E-2	2.72966E1	-3.2675E1	-3.26363E1	2.67942E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79999E1	-4.76837E-5	-8.80003E1	7.15256E-5	5.07832E-3	9.3317E-2	2.73461E1	-3.26383E1	-3.26321E1	2.68862E1	1.19241E-7	2.51575E-3	2.51575E-3	6.323E-3	3.00247E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80002E1	-3.09944E-4	-8.80007E1	-4.76837E-5	5.57899E-3	9.36031E-2	2.72897E1	-3.26852E1	-3.26516E1	2.67663E1	1.1929E-7	2.51359E-3	2.51359E-3	6.34661E-3	3.00676E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80002E1	-3.57628E-4	-8.80005E1	-3.57628E-4	5.55515E-3	9.32693E-2	2.73204E1	-3.26852E1	-3.26349E1	2.68601E1	1.19241E-7	2.52301E-3	2.52301E-3	6.31779E-3	2.99014E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80003E1	1.90735E-4	-8.80004E1	2.38419E-5	5.84126E-3	9.33409E-2	2.73009E1	-3.26669E1	-3.26008E1	2.67277E1	1.19235E-7	2.5199E-3	2.5199E-3	6.3016E-3	3.01748E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.79999E1	-1.90735E-4	-8.80004E1	-1.90735E-4	5.36442E-3	9.33886E-2	2.72909E1	-3.26809E1	-3.26478E1	2.69171E1	1.1929E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.8E1	4.76837E-5	-8.80002E1	1.43051E-4	5.10216E-3	9.35555E-2	2.72925E1	-3.26458E1	-3.2641E1	2.67271E1	1.19239E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80002E1	2.86102E-4	-8.80004E1	-2.38419E-5	5.22137E-3	9.35316E-2	2.72757E1	-3.26711E1	-3.26116E1	2.68286E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.79999E1	2.86102E-4	-8.80002E1	2.14577E-4	4.91142E-3	9.3174E-2	2.72945E1	-3.26968E1	-3.26101E1	2.68148E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03449E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80002E1	4.52995E-4	-8.80002E1	4.76837E-5	4.8399E-3	9.36747E-2	2.72476E1	-3.26083E1	-3.26248E1	2.67986E1	1.1929E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.79998E1	2.86102E-4	-8.80006E1	-1.66893E-4	5.48363E-3	9.34124E-2	2.72845E1	-3.26679E1	-3.26065E1	2.67613E1	1.19237E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79994E1	1.90735E-4	-8.80004E1	-2.6226E-4	5.57899E-3	9.31978E-2	2.73039E1	-3.26506E1	-3.2617E1	2.68731E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.79995E1	4.76837E-4	-8.80003E1	1.43051E-4	5.29289E-3	9.34124E-2	2.72925E1	-3.26458E1	-3.26404E1	2.67487E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.39421E-2	-8.79998E1	5.00679E-4	-8.80003E1	4.76837E-5	5.53131E-3	9.377E-2	2.72907E1	-3.26579E1	-3.26116E1	2.67595E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.79996E1	3.8147E-4	-8.80004E1	1.19209E-4	5.10216E-3	9.31978E-2	2.73193E1	-3.26372E1	-3.26549E1	2.6825E1	1.19238E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.79999E1	4.52995E-4	-8.80004E1	2.14577E-4	5.29289E-3	9.32693E-2	2.73128E1	-3.2626E1	-3.26738E1	2.67565E1	1.1929E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.79997E1	5.72205E-4	-8.80003E1	-4.76837E-5	5.14984E-3	9.3174E-2	2.7298E1	-3.26431E1	-3.26095E1	2.68319E1	1.19239E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79995E1	6.19888E-4	-8.80004E1	2.86102E-4	5.38826E-3	9.3317E-2	2.73228E1	-3.26632E1	-3.2616E1	2.67926E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.79995E1	-2.38419E-4	-8.80008E1	2.86102E-4	5.45979E-3	9.35793E-2	2.73153E1	-3.26512E1	-3.26128E1	2.67625E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1