[Scan]
initial_time=2015-12-18T21:37:51
final_time=2015-12-18T21:38:11
ip_count=19
run=1020
dataset=5
scan=277
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.85058E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-7.99286E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.37833E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.32339E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58553E-8
mult1=-9.72397E-9
mult2=-2.94079E-9
rf_tmon=-5.40613E-3
rf_agc=3.22355E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=5.66447E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68627E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=3.19714E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=1.08821E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08079E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.38552E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.38805E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.35107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.10091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=9.3637E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91842E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01497E1
cs_anode1_imon=1.95665E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=4.04638E-8
tplens_vset=1.4E-1
tplens_vmon=1.59483E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25871E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2629E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98264E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.10699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=8.38328E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.19888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57182E0
os_ea2_imon=-5.07712E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.54487E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.45194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.45582E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=8.0865E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3929E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.82594E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.45279E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07533E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65675E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31795E1
cs_fil1_imon=7.28698E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62356E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64075E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22724E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70104E-1
res40_imon=-2.28794E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.79993E1	-9.53674E-5	-8.80005E1	1.19209E-4	5.55515E-3	9.377E-2	2.72941E1	-3.26756E1	-3.26021E1	2.67157E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.79997E1	-1.19209E-4	-8.80003E1	1.43051E-4	5.03063E-3	9.34124E-2	2.73003E1	-3.26813E1	-3.26218E1	2.68755E1	1.1929E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.02813E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79996E1	2.38419E-5	-8.80005E1	1.66893E-4	5.07832E-3	9.32932E-2	2.72927E1	-3.26514E1	-3.26248E1	2.67007E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.79997E1	-1.43051E-4	-8.80002E1	-2.6226E-4	5.24521E-3	9.3317E-2	2.73267E1	-3.26482E1	-3.26356E1	2.69253E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80001E1	2.14577E-4	-8.80003E1	-9.53674E-5	5.36442E-3	9.32217E-2	2.73027E1	-3.26579E1	-3.26146E1	2.68893E1	1.19238E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.03976E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.79999E1	-9.53674E-5	-8.80001E1	1.19209E-4	5.24521E-3	9.32217E-2	2.72985E1	-3.26518E1	-3.26236E1	2.67163E1	1.1929E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79996E1	2.14577E-4	-8.79999E1	-1.90735E-4	5.22137E-3	9.32693E-2	2.72973E1	-3.26687E1	-3.26296E1	2.69127E1	1.19186E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.79999E1	1.66893E-4	-8.80001E1	1.19209E-4	5.60284E-3	9.3174E-2	2.73027E1	-3.2652E1	-3.26331E1	2.67057E1	1.1929E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.97704E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.8E1	3.33786E-4	-8.80002E1	2.38419E-4	5.24521E-3	9.32932E-2	2.73027E1	-3.2656E1	-3.25985E1	2.68749E1	1.19239E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.43285E-2	-8.8E1	3.33786E-4	-8.80002E1	1.90735E-4	5.48363E-3	9.32455E-2	2.73063E1	-3.26826E1	-3.26048E1	2.67516E1	1.1929E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99348E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.8E1	2.14577E-4	-8.80006E1	2.38419E-4	5.24521E-3	9.34362E-2	2.72959E1	-3.26432E1	-3.26909E1	2.70371E1	1.19239E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.79999E1	4.52995E-4	-8.80004E1	3.33786E-4	5.50747E-3	9.34124E-2	2.73281E1	-3.26655E1	-3.26236E1	2.69433E1	1.1929E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.50241E-2	-8.79999E1	2.38419E-4	-8.80003E1	0.0E0	5.50747E-3	9.35316E-2	2.73087E1	-3.26524E1	-3.26302E1	2.68286E1	1.19239E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.79998E1	3.33786E-4	-8.80002E1	0.0E0	5.29289E-3	9.32932E-2	2.73175E1	-3.26632E1	-3.26189E1	2.67956E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.79999E1	1.66893E-4	-8.79999E1	2.38419E-4	5.53131E-3	9.33647E-2	2.72971E1	-3.2645E1	-3.26346E1	2.6849E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02769E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80002E1	2.14577E-4	-8.80002E1	9.53674E-5	5.36442E-3	9.3627E-2	2.73228E1	-3.26366E1	-3.26219E1	2.67926E1	1.1929E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00144E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.79999E1	4.76837E-5	-8.80004E1	1.43051E-4	5.50747E-3	9.34839E-2	2.73181E1	-3.26644E1	-3.26189E1	2.68458E1	1.19239E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80001E1	0.0E0	-8.80004E1	1.19209E-4	5.48363E-3	9.34362E-2	2.73246E1	-3.26301E1	-3.26101E1	2.67631E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79998E1	-2.14577E-4	-8.80001E1	5.48363E-4	5.14984E-3	9.34839E-2	2.72843E1	-3.26487E1	-3.2637E1	2.67716E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.8E1	4.76837E-5	-8.80003E1	2.86102E-4	5.38826E-3	9.3627E-2	2.7288E1	-3.2629E1	-3.25871E1	2.6855E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1