[Scan]
initial_time=2015-12-18T21:38:18
final_time=2015-12-18T21:38:38
ip_count=19
run=1020
dataset=5
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.78118E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-7.60472E-10
ql2_vset=
ql2_vmon=2.14577E-4
ql2_imon=1.35262E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.23125E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.57937E-8
mult1=-9.87283E-9
mult2=-2.74256E-9
rf_tmon=-4.39226E-3
rf_agc=3.38563E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=5.52142E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66571E0
bslens_imon=2.68762E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20268E1
lens5a_imon=1.98427E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.15837E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=1.0815E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07769E0
lens1_imon=1.60999E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.99364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03928E1
cs_ea2_imon=1.39783E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.39334E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15381E1
os_ea1_imon=2.36735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63809E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2295E0
cs_ionrep_imon=9.38279E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93361E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=1.97748E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=4.03717E-8
tplens_vset=1.4E-1
tplens_vmon=1.58176E0
tplens_imon=-2.91492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26374E1
iondef2_imon=1.59146E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=8.43895E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28338E0
ionrepsh_imon=8.43726E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.1991E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55511E0
os_ea2_imon=-7.57304E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71113E1
cs_ef2a_imon=3.1959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08815E0
os_ef2alow_imon=-2.61281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31983E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=3.45029E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29998E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.10745E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08984E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68227E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.41167E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=8.1113E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-8.36956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56023E1
einzel_imon=7.57316E-6
window_vset=0.0E0
window_vmon=1.91621E-1
window_imon=-1.00029E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39213E-4
mask2_vset=0.0E0
mask2_vmon=-1.86489E1
mask2_imon=-4.30351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.59949E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.2542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.37354E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45001E0
defgridb_imon=6.23682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.42542E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65984E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31775E1
cs_fil1_imon=6.73137E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59267E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33212E-2
os_fil2_imon=-2.5881E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.173E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64407E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.0726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22663E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.59989E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79997E1	0.0E0	-8.80005E1	1.43051E-4	5.17368E-3	9.33647E-2	2.72984E1	-3.2664E1	-3.26199E1	2.68026E1	1.1924E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.01862E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.79994E1	-9.53674E-5	-8.80003E1	7.15256E-5	5.07832E-3	9.34362E-2	2.72984E1	-3.26517E1	-3.26511E1	2.68226E1	1.1929E-7	2.51693E-3	2.51693E-3	6.28511E-3	3.00144E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79999E1	-7.15256E-5	-8.80004E1	2.14577E-4	5.57899E-3	9.37223E-2	2.73175E1	-3.26508E1	-3.26354E1	2.6796E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.79999E1	4.05312E-4	-8.80007E1	4.76837E-5	5.38826E-3	9.36508E-2	2.73423E1	-3.26449E1	-3.26331E1	2.67986E1	1.1919E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.79998E1	2.86102E-4	-8.80002E1	9.53674E-5	5.67436E-3	9.36985E-2	2.73081E1	-3.2638E1	-3.26524E1	2.68653E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.79996E1	0.0E0	-8.80001E1	2.38419E-4	5.4121E-3	9.36031E-2	2.72775E1	-3.26404E1	-3.2617E1	2.67842E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79993E1	2.86102E-4	-8.8E1	4.29153E-4	5.4121E-3	9.37462E-2	2.73066E1	-3.26371E1	-3.26483E1	2.68038E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.79994E1	1.19209E-4	-8.8E1	-7.15256E-5	5.24521E-3	9.37223E-2	2.72761E1	-3.26659E1	-3.26209E1	2.67836E1	1.19206E-7	2.51784E-3	2.51784E-3	6.32067E-3	3.02985E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.79998E1	4.29153E-4	-8.80002E1	-2.38419E-5	5.10216E-3	9.34839E-2	2.72864E1	-3.26187E1	-3.26731E1	2.67831E1	1.19203E-7	2.51787E-3	2.51787E-3	6.34105E-3	3.00953E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.79999E1	6.4373E-4	-8.80001E1	7.15256E-5	5.26905E-3	9.36031E-2	2.7298E1	-3.27104E1	-3.26142E1	2.68545E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.79998E1	5.24521E-4	-8.80005E1	3.33786E-4	5.00679E-3	9.35793E-2	2.73111E1	-3.26494E1	-3.25942E1	2.67806E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.79998E1	4.29153E-4	-8.80004E1	1.19209E-4	5.43594E-3	9.35078E-2	2.73117E1	-3.26885E1	-3.25906E1	2.68359E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.79999E1	4.76837E-4	-8.80005E1	-9.53674E-5	4.95911E-3	9.37462E-2	2.72886E1	-3.26719E1	-3.26321E1	2.6796E1	1.1929E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.79998E1	1.66893E-4	-8.80004E1	2.38419E-4	5.38826E-3	9.36508E-2	2.73117E1	-3.26721E1	-3.26017E1	2.67889E1	1.19237E-7	2.51025E-3	2.51025E-3	6.31858E-3	2.99613E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.79998E1	4.76837E-4	-8.80003E1	2.38419E-5	5.53131E-3	9.36985E-2	2.72835E1	-3.26494E1	-3.26422E1	2.68016E1	1.19266E-7	2.52023E-3	2.52023E-3	6.29487E-3	3.01249E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.79995E1	1.43051E-4	-8.80003E1	9.53674E-5	5.24521E-3	9.36747E-2	2.73514E1	-3.26669E1	-3.26176E1	2.67998E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.79997E1	4.76837E-4	-8.80002E1	7.15256E-5	5.07832E-3	9.35316E-2	2.73375E1	-3.26615E1	-3.26801E1	2.67926E1	1.19238E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.79995E1	0.0E0	-8.80003E1	9.53674E-5	5.29289E-3	9.36031E-2	2.73263E1	-3.26614E1	-3.25936E1	2.68094E1	1.1929E-7	2.52977E-3	2.52977E-3	6.29645E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.79997E1	7.15256E-5	-8.80002E1	-2.38419E-5	5.29289E-3	9.3317E-2	2.72696E1	-3.26633E1	-3.26416E1	2.6789E1	1.19239E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.79998E1	2.14577E-4	-8.80004E1	1.19209E-4	5.43594E-3	9.32455E-2	2.73033E1	-3.26374E1	-3.26056E1	2.68227E1	1.19238E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00302E-1