[Scan]
initial_time=2015-12-18T21:38:45
final_time=2015-12-18T21:39:05
ip_count=19
run=1020
dataset=5
scan=279
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.82479E-6
ql1_vset=
ql1_vmon=-8.79996E1
ql1_imon=-7.53486E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.40122E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.22362E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58364E-8
mult1=-9.45003E-9
mult2=-2.74402E-9
rf_tmon=-4.93046E-3
rf_agc=3.28987E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=5.70834E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6912E0
bslens_imon=2.56942E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19764E1
lens5a_imon=1.98774E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53244E1
cs_ef1b_imon=3.17262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05417E1
cs_ea1_imon=1.05299E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05625E0
lens1_imon=1.5509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.98878E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03986E1
cs_ea2_imon=1.40513E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=3.0482E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.38893E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.29408E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1505E1
os_ea1_imon=2.37708E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.09025E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27122E0
cs_ionrep_imon=9.48012E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93281E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02053E1
cs_anode1_imon=1.95767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=4.04695E-8
tplens_vset=1.4E-1
tplens_vmon=1.6339E0
tplens_imon=-4.09683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26322E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26291E1
iondef2_imon=1.59598E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=9.15635E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30482E0
ionrepsh_imon=8.37816E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.19006E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54526E0
os_ea2_imon=-5.34827E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08468E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52835E-1
os_ef2bup_imon=-5.27485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=3.45481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.08799E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72826E1
iondef1_imon=1.06029E-5
iondef4_vset=2.691E1
iondef4_vmon=2.683E1
iondef4_imon=1.10727E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.41766E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.08798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1313E0
cs_ionaccel_imon=-9.16887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=1.96834E-1
window_imon=-9.96817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86558E1
mask2_imon=-5.03332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.22406E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.51144E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.29359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3746E0
defgridb_imon=6.05953E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.45044E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07677E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65811E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=6.89934E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.45945E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67912E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24506E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55831E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28778E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.86023E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.42862E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.79996E1	4.05312E-4	-8.80002E1	2.38419E-5	5.22137E-3	9.36985E-2	2.72874E1	-3.2659E1	-3.26301E1	2.67409E1	1.19239E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.79995E1	2.86102E-4	-8.80001E1	9.53674E-5	5.38826E-3	9.37223E-2	2.73026E1	-3.26784E1	-3.26347E1	2.68076E1	1.1929E-7	2.51525E-3	2.51525E-3	6.35059E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.79995E1	2.38419E-4	-8.79999E1	0.0E0	5.19753E-3	9.38892E-2	2.72773E1	-3.26735E1	-3.26839E1	2.68052E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79995E1	4.29153E-4	-8.80001E1	-1.43051E-4	5.36442E-3	9.38892E-2	2.73243E1	-3.26146E1	-3.26909E1	2.68887E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.79995E1	-1.43051E-4	-8.8E1	-4.76837E-5	5.29289E-3	9.35555E-2	2.73189E1	-3.26146E1	-3.26603E1	2.67196E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.79995E1	-9.53674E-5	-8.8E1	1.19209E-4	5.29289E-3	9.3317E-2	2.72817E1	-3.26254E1	-3.26651E1	2.68869E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79996E1	0.0E0	-8.80003E1	0.0E0	5.126E-3	9.3317E-2	2.72874E1	-3.26502E1	-3.26065E1	2.66773E1	1.1929E-7	2.50789E-3	2.50789E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.79997E1	0.0E0	-8.80002E1	1.43051E-4	5.76973E-3	9.36031E-2	2.72849E1	-3.26597E1	-3.25979E1	2.68572E1	1.19239E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.79998E1	9.53674E-5	-8.8E1	-1.43051E-4	5.14984E-3	9.33886E-2	2.72985E1	-3.26741E1	-3.26621E1	2.68908E1	1.1929E-7	2.51359E-3	2.51359E-3	6.34099E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.79998E1	2.6226E-4	-8.80004E1	1.43051E-4	5.65052E-3	9.3317E-2	2.73922E1	-3.26344E1	-3.26104E1	2.67752E1	1.1929E-7	2.51334E-3	2.51334E-3	6.26916E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.79997E1	5.24521E-4	-8.80001E1	-1.19209E-4	5.55515E-3	9.35316E-2	2.73081E1	-3.26218E1	-3.2605E1	2.68791E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.79996E1	2.86102E-4	-8.80004E1	1.43051E-4	5.48363E-3	9.31978E-2	2.73179E1	-3.26278E1	-3.26592E1	2.68019E1	1.19238E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.79994E1	-2.38419E-4	-8.80002E1	7.15256E-5	5.29289E-3	9.34601E-2	2.72901E1	-3.26753E1	-3.26224E1	2.68226E1	1.1929E-7	2.5137E-3	2.5137E-3	6.33642E-3	3.02687E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.79995E1	-2.38419E-5	-8.80003E1	0.0E0	5.36442E-3	9.33886E-2	2.72721E1	-3.26446E1	-3.25978E1	2.68028E1	1.1929E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.79995E1	2.14577E-4	-8.80005E1	7.15256E-5	5.36442E-3	9.34601E-2	2.7334E1	-3.26366E1	-3.26113E1	2.6831E1	1.19184E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00676E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.79995E1	-2.38419E-5	-8.80004E1	2.38419E-5	5.126E-3	9.35078E-2	2.7291E1	-3.26762E1	-3.26413E1	2.67902E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.9943E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.79996E1	-2.38419E-5	-8.80003E1	-7.15256E-5	5.43594E-3	9.31978E-2	2.73129E1	-3.26891E1	-3.2614E1	2.67758E1	1.1929E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.99879E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.79997E1	-2.38419E-5	-8.80001E1	7.15256E-5	5.00679E-3	9.35078E-2	2.73231E1	-3.26515E1	-3.25831E1	2.67833E1	1.19238E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.79998E1	1.19209E-4	-8.80004E1	1.90735E-4	5.43594E-3	9.3317E-2	2.72813E1	-3.25559E1	-3.25553E1	2.68221E1	1.1924E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79996E1	-2.38419E-5	-8.80002E1	2.86102E-4	5.14984E-3	9.33409E-2	2.72826E1	-3.26291E1	-3.26322E1	2.683E1	1.1929E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.006E-1