[Scan]
initial_time=2015-12-18T21:39:12
final_time=2015-12-18T21:39:32
ip_count=19
run=1020
dataset=5
scan=280
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.83592E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-6.74462E-10
ql2_vset=
ql2_vmon=2.14577E-4
ql2_imon=1.40436E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.21113E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.57537E-8
mult1=-1.00173E-8
mult2=-2.7745E-9
rf_tmon=-3.50304E-3
rf_agc=3.50399E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.50997E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.78394E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19565E1
lens5a_imon=1.96705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53962E1
cs_ef1b_imon=3.17574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05377E1
cs_ea1_imon=1.09741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04894E0
lens1_imon=1.56284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6484E1
os_ef1alow_imon=2.9853E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.40782E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=3.04438E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.38761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.30312E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.31709E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.10103E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.55483E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93112E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01734E1
cs_anode1_imon=1.95767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=4.04269E-8
tplens_vset=1.4E-1
tplens_vmon=1.57949E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=8.82864E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=8.50362E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.17056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74843E1
cs_ef2b_imon=3.13613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49514E0
os_ea2_imon=-4.54621E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.18999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10147E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4183E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=3.45064E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.34494E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.1005E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.36797E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.11598E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15041E0
cs_ionaccel_imon=-9.48164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.4733E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.8338E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86622E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92589E3
multa_neg_imon=7.37101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.12679E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.44818E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07746E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65913E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31814E1
cs_fil1_imon=7.83187E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.7896E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6799E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.53597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27726E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.07839E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30419E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19188E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04964E-1
res40_imon=-2.52245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80001E1	4.29153E-4	-8.8E1	-1.90735E-4	5.22137E-3	9.32932E-2	2.72546E1	-3.26591E1	-3.26482E1	2.6849E1	1.1919E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.00852E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.79998E1	3.33786E-4	-8.79998E1	7.15256E-5	5.43594E-3	9.33886E-2	2.72991E1	-3.26446E1	-3.2614E1	2.68032E1	1.19135E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8E1	1.43051E-4	-8.79999E1	-4.76837E-5	5.62668E-3	9.32217E-2	2.73157E1	-3.26449E1	-3.26195E1	2.68105E1	1.1929E-7	2.5147E-3	2.5147E-3	6.34661E-3	2.98819E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.79996E1	1.66893E-4	-8.80001E1	2.6226E-4	5.19753E-3	9.33647E-2	2.73207E1	-3.26671E1	-3.2593E1	2.68134E1	1.1929E-7	2.52342E-3	2.52342E-3	6.30212E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.79997E1	-1.90735E-4	-8.8E1	3.09944E-4	5.14984E-3	9.34839E-2	2.73063E1	-3.26585E1	-3.26352E1	2.68033E1	1.19239E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.79996E1	4.76837E-5	-8.80001E1	2.38419E-4	5.19753E-3	9.34839E-2	2.73117E1	-3.262E1	-3.26086E1	2.68383E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.79998E1	1.43051E-4	-8.8E1	0.0E0	5.53131E-3	9.34362E-2	2.72992E1	-3.26354E1	-3.26284E1	2.68232E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.79995E1	1.43051E-4	-8.80003E1	2.38419E-4	5.29289E-3	9.34362E-2	2.72793E1	-3.26669E1	-3.25894E1	2.67547E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.79997E1	2.38419E-5	-8.80002E1	2.86102E-4	5.29289E-3	9.3317E-2	2.73069E1	-3.26753E1	-3.2629E1	2.68004E1	1.1929E-7	2.51935E-3	2.51935E-3	6.33211E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.79996E1	5.00679E-4	-8.8E1	9.53674E-5	5.43594E-3	9.36031E-2	2.73131E1	-3.26536E1	-3.26003E1	2.67854E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.79998E1	2.38419E-4	-8.80003E1	2.6226E-4	5.43594E-3	9.37462E-2	2.73039E1	-3.26614E1	-3.26142E1	2.68442E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80001E1	2.38419E-5	-8.80005E1	9.53674E-5	5.65052E-3	9.35793E-2	2.73045E1	-3.26789E1	-3.2611E1	2.68581E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.79999E1	2.38419E-5	-8.80004E1	5.48363E-4	5.36442E-3	9.3174E-2	2.72871E1	-3.26801E1	-3.26747E1	2.67716E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9841E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.79995E1	0.0E0	-8.80004E1	2.6226E-4	5.55515E-3	9.33886E-2	2.7334E1	-3.26449E1	-3.26319E1	2.68484E1	1.19135E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.79997E1	9.53674E-5	-8.80004E1	3.33786E-4	5.29289E-3	9.31978E-2	2.73109E1	-3.26567E1	-3.26306E1	2.67063E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.79998E1	-7.15256E-5	-8.80005E1	2.14577E-4	5.26905E-3	9.34839E-2	2.73173E1	-3.26523E1	-3.26113E1	2.68737E1	1.1929E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.99594E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.79998E1	-7.15256E-5	-8.80001E1	5.96046E-4	5.34058E-3	9.32932E-2	2.72991E1	-3.26837E1	-3.26128E1	2.67469E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.02545E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80001E1	-2.38419E-5	-8.8E1	2.38419E-4	5.60284E-3	9.3174E-2	2.73145E1	-3.26567E1	-3.26703E1	2.68202E1	1.1929E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80002E1	4.76837E-5	-8.80003E1	-7.15256E-5	5.24521E-3	9.33409E-2	2.72479E1	-3.2682E1	-3.27676E1	2.67879E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80001E1	2.14577E-4	-8.80006E1	1.90735E-4	5.48363E-3	9.29117E-2	2.73033E1	-3.26482E1	-3.26212E1	2.68016E1	1.19188E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1