[Scan]
initial_time=2015-12-18T21:40:06
final_time=2015-12-18T21:40:26
ip_count=19
run=1020
dataset=5
scan=282
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44059E-2
qbias_imon=-3.83125E-6
ql1_vset=
ql1_vmon=-8.79996E1
ql1_imon=-7.36022E-10
ql2_vset=
ql2_vmon=2.6226E-4
ql2_imon=1.39256E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.11017E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.57709E-8
mult1=-1.00414E-8
mult2=-2.70863E-9
rf_tmon=-4.75275E-3
rf_agc=3.32615E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.4332E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66326E0
bslens_imon=2.71315E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20308E1
lens5a_imon=1.97837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04849E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52871E1
cs_ef1b_imon=3.16794E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.0783E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0336E0
lens1_imon=1.61593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.39897E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.38879E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.35921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27982E0
cs_ionrep_imon=9.51235E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.95845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.03422E-8
tplens_vset=1.4E-1
tplens_vmon=1.61194E0
tplens_imon=-1.57345E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.48215E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26344E1
iondef2_imon=1.60532E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.87656E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22142E0
ionrepsh_imon=8.54963E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34377E1
lens5b_imon=2.19534E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56947E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0948E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41272E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.45013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.11865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.37018E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=8.1008E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-9.86907E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.64709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.74454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.22236E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26086E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.44925E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07617E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65764E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31816E1
cs_fil1_imon=8.1219E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85181E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68041E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59899E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36777E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80001E1	4.76837E-4	-8.80005E1	1.19209E-4	5.45979E-3	9.35793E-2	2.73169E1	-3.26567E1	-3.26124E1	2.6831E1	1.19239E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.27828E-2	-8.8E1	2.38419E-4	-8.80003E1	-2.38419E-5	5.57899E-3	9.34124E-2	2.73584E1	-3.2697E1	-3.26046E1	2.67956E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80002E1	1.66893E-4	-8.80002E1	3.33786E-4	5.6982E-3	9.3317E-2	2.73346E1	-3.26838E1	-3.25824E1	2.67949E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.03349E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.8E1	1.19209E-4	-8.80004E1	2.14577E-4	5.72205E-3	9.33409E-2	2.73004E1	-3.26461E1	-3.26732E1	2.68538E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.79999E1	3.57628E-4	-8.80005E1	4.52995E-4	5.43594E-3	9.36031E-2	2.72817E1	-3.26536E1	-3.26669E1	2.68406E1	1.1929E-7	2.51755E-3	2.51755E-3	6.31012E-3	3.00507E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80002E1	1.43051E-4	-8.80005E1	2.38419E-4	5.38826E-3	9.32217E-2	2.72931E1	-3.26657E1	-3.26446E1	2.67511E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80004E1	2.38419E-4	-8.80003E1	2.38419E-4	5.72205E-3	9.34124E-2	2.72913E1	-3.26476E1	-3.26332E1	2.68274E1	1.19186E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.79998E1	1.66893E-4	-8.8E1	3.33786E-4	5.55515E-3	9.36031E-2	2.72679E1	-3.26166E1	-3.26296E1	2.68178E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.8E1	3.57628E-4	-8.80004E1	3.33786E-4	5.36442E-3	9.377E-2	2.72532E1	-3.2613E1	-3.26726E1	2.68343E1	1.19238E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.8E1	3.33786E-4	-8.80003E1	1.19209E-4	5.65052E-3	9.36031E-2	2.72974E1	-3.26607E1	-3.26304E1	2.68147E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80001E1	3.09944E-4	-8.80003E1	3.33786E-4	5.38826E-3	9.35793E-2	2.72787E1	-3.26375E1	-3.2649E1	2.68576E1	1.19264E-7	2.51787E-3	2.51787E-3	6.32402E-3	3.00751E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.79997E1	3.57628E-4	-8.80002E1	3.57628E-4	5.43594E-3	9.35555E-2	2.73165E1	-3.26801E1	-3.265E1	2.68142E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.79998E1	3.8147E-4	-8.80004E1	9.53674E-5	5.24521E-3	9.37223E-2	2.72685E1	-3.26254E1	-3.26602E1	2.67949E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.79999E1	4.05312E-4	-8.8E1	1.19209E-4	5.60284E-3	9.36508E-2	2.73051E1	-3.26603E1	-3.26456E1	2.68538E1	1.19239E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80001E1	2.38419E-4	-8.80001E1	1.19209E-4	5.55515E-3	9.37223E-2	2.72945E1	-3.26225E1	-3.26419E1	2.68064E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.79997E1	2.86102E-4	-8.79997E1	4.76837E-4	5.55515E-3	9.34124E-2	2.73045E1	-3.26488E1	-3.26482E1	2.67631E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02133E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.79997E1	2.86102E-4	-8.8E1	1.90735E-4	5.19753E-3	9.34362E-2	2.73081E1	-3.26633E1	-3.26302E1	2.67962E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.79999E1	2.38419E-5	-8.79999E1	3.33786E-4	5.67436E-3	9.33409E-2	2.72732E1	-3.26384E1	-3.26549E1	2.67897E1	1.1929E-7	2.51686E-3	2.51686E-3	6.29665E-3	3.01095E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.79998E1	2.14577E-4	-8.80001E1	2.38419E-4	5.36442E-3	9.3317E-2	2.73093E1	-3.26657E1	-3.26386E1	2.6813E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.44059E-2	-8.79996E1	2.6226E-4	-8.79997E1	2.14577E-4	5.48363E-3	9.33886E-2	2.73099E1	-3.26344E1	-3.2623E1	2.67824E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9952E-1