[Scan]
initial_time=2015-12-18T21:40:33
final_time=2015-12-18T21:40:53
ip_count=19
run=1020
dataset=5
scan=283
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.84105E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-6.98423E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.39138E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.17494E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.58109E-8
mult1=-9.51162E-9
mult2=-2.84437E-9
rf_tmon=-4.99909E-3
rf_agc=3.18555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=5.91099E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62321E0
bslens_imon=2.53571E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.0521E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54133E1
cs_ef1b_imon=3.18524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02158E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=1.0877E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06165E0
lens1_imon=1.37505E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65041E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04082E1
cs_ea2_imon=1.40578E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.02811E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.38239E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10931E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15067E1
os_ea1_imon=2.35414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25455E0
cs_ionrep_imon=9.49967E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93394E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=4.03844E-8
tplens_vset=1.4E-1
tplens_vmon=1.59675E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.49871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.58392E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.74794E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3176E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33719E1
lens5b_imon=2.18886E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55389E0
os_ea2_imon=-5.60603E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00696E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10541E1
os_restr2_imon=3.44401E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.27798E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.08423E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09615E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.39035E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=8.10386E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-6.73362E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55937E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.50157E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.42906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.03877E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31469E0
defgridb_imon=6.09115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.42558E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0832E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65773E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=8.16395E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5695E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67635E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26571E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51159E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2253E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.47923E-2	-8.80002E1	-2.14577E-4	-8.80001E1	-7.15256E-5	4.98295E-3	9.36985E-2	2.73045E1	-3.26632E1	-3.2629E1	2.68304E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80004E1	1.19209E-4	-8.80002E1	-1.90735E-4	4.74453E-3	9.3627E-2	2.72961E1	-3.26873E1	-3.26176E1	2.678E1	1.19239E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80003E1	-1.43051E-4	-8.80002E1	2.86102E-4	5.07832E-3	9.33886E-2	2.73316E1	-3.26632E1	-3.26307E1	2.67944E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80003E1	7.15256E-5	-8.80002E1	1.90735E-4	5.43594E-3	9.35555E-2	2.73033E1	-3.26626E1	-3.26107E1	2.67931E1	1.19239E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80002E1	2.86102E-4	-8.79999E1	2.14577E-4	5.34058E-3	9.34839E-2	2.72855E1	-3.2637E1	-3.26866E1	2.68007E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.8E1	1.90735E-4	-8.80001E1	2.6226E-4	5.55515E-3	9.34124E-2	2.73151E1	-3.26767E1	-3.25947E1	2.67792E1	1.1929E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80001E1	1.19209E-4	-8.8E1	1.43051E-4	5.43594E-3	9.34124E-2	2.72432E1	-3.26284E1	-3.26278E1	2.6828E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80004E1	-2.6226E-4	-8.80003E1	4.05312E-4	5.24521E-3	9.34362E-2	2.73183E1	-3.26591E1	-3.26056E1	2.67758E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80001E1	-4.76837E-5	-8.80001E1	4.52995E-4	5.43594E-3	9.36985E-2	2.73003E1	-3.26512E1	-3.25936E1	2.67938E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80001E1	0.0E0	-8.80003E1	4.29153E-4	5.38826E-3	9.32217E-2	2.73091E1	-3.26687E1	-3.25924E1	2.67949E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.79998E1	-3.09944E-4	-8.80005E1	-1.43051E-4	5.36442E-3	9.35555E-2	2.73519E1	-3.26728E1	-3.26004E1	2.68182E1	1.19192E-7	2.52509E-3	2.52509E-3	6.323E-3	3.00247E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.79999E1	-3.33786E-4	-8.80001E1	1.66893E-4	5.62668E-3	9.3317E-2	2.7299E1	-3.26634E1	-3.26242E1	2.68064E1	1.1929E-7	2.52635E-3	2.52635E-3	6.3131E-3	3.00251E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.79999E1	-4.52995E-4	-8.80002E1	1.19209E-4	5.4121E-3	9.36031E-2	2.73099E1	-3.26494E1	-3.26621E1	2.6825E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.8E1	-3.8147E-4	-8.8E1	2.6226E-4	5.34058E-3	9.33647E-2	2.72802E1	-3.26492E1	-3.2633E1	2.68076E1	1.19264E-7	2.51376E-3	2.51376E-3	6.32099E-3	2.99861E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.79999E1	-5.96046E-4	-8.8E1	2.86102E-4	5.24521E-3	9.35078E-2	2.73279E1	-3.26957E1	-3.26236E1	2.67992E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.79997E1	-3.33786E-4	-8.79999E1	4.76837E-5	5.50747E-3	9.31025E-2	2.73153E1	-3.26747E1	-3.26332E1	2.68436E1	1.1929E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.79998E1	-2.38419E-4	-8.8E1	1.43051E-4	5.43594E-3	9.33647E-2	2.72962E1	-3.2659E1	-3.26431E1	2.68232E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.79999E1	-2.14577E-4	-8.8E1	-3.57628E-4	5.55515E-3	9.3317E-2	2.73311E1	-3.26868E1	-3.26166E1	2.67862E1	1.19238E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80001E1	-3.8147E-4	-8.8E1	7.15256E-5	5.57899E-3	9.36508E-2	2.72962E1	-3.26331E1	-3.2639E1	2.67806E1	1.1929E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.8E1	-1.90735E-4	-8.80001E1	2.14577E-4	5.50747E-3	9.36985E-2	2.73189E1	-3.2653E1	-3.26032E1	2.68418E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1