[Scan]
initial_time=2015-12-18T21:41:00
final_time=2015-12-18T21:41:20
ip_count=19
run=1020
dataset=5
scan=284
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.7783E-6
ql1_vset=
ql1_vmon=-8.79996E1
ql1_imon=-7.36046E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.40176E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.14783E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.57982E-8
mult1=-9.64702E-9
mult2=-2.63447E-9
rf_tmon=-5.67859E-3
rf_agc=3.32365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.48649E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.72881E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=3.18164E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02009E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0509E1
cs_ea1_imon=1.08616E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0756E0
lens1_imon=1.61488E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04279E1
cs_ea2_imon=1.42466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.38033E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.34681E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=9.43763E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=4.04368E-8
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26193E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26878E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.96251E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29295E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.21379E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51586E0
os_ea2_imon=-1.00231E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00778E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70777E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28658E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.45122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73155E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.35915E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=8.06309E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.85723E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.61856E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.44409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=5.79663E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.4457E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65486E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=7.60534E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.45537E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68114E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66566E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22651E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.07345E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80001E1	7.15256E-5	-8.80003E1	-7.15256E-5	4.98295E-3	9.33409E-2	2.73216E1	-3.27015E1	-3.25794E1	2.67989E1	1.1929E-7	2.51847E-3	2.51847E-3	6.2752E-3	3.00966E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80002E1	0.0E0	-8.8E1	2.14577E-4	5.36442E-3	9.37462E-2	2.73057E1	-3.26416E1	-3.26308E1	2.67645E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80002E1	2.14577E-4	-8.80001E1	3.33786E-4	5.126E-3	9.35555E-2	2.73051E1	-3.26567E1	-3.26349E1	2.68117E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80002E1	2.14577E-4	-8.80001E1	5.48363E-4	5.26905E-3	9.35793E-2	2.7311E1	-3.26638E1	-3.25971E1	2.67457E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80001E1	1.90735E-4	-8.80002E1	4.29153E-4	5.48363E-3	9.34839E-2	2.73093E1	-3.26699E1	-3.25972E1	2.67794E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80001E1	-4.76837E-5	-8.80004E1	1.90735E-4	5.67436E-3	9.35555E-2	2.73057E1	-3.26741E1	-3.26152E1	2.68641E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80002E1	-2.14577E-4	-8.80001E1	2.38419E-4	5.24521E-3	9.377E-2	2.72965E1	-3.26402E1	-3.26503E1	2.68112E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80001E1	2.6226E-4	-8.80003E1	2.38419E-4	5.03063E-3	9.37223E-2	2.72907E1	-3.2632E1	-3.26212E1	2.6825E1	1.19246E-7	2.52051E-3	2.52051E-3	6.32129E-3	3.00065E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.79998E1	2.38419E-4	-8.80003E1	4.76837E-5	5.26905E-3	9.37462E-2	2.73009E1	-3.2626E1	-3.25972E1	2.67446E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.8E1	9.53674E-5	-8.80002E1	2.14577E-4	5.67436E-3	9.38892E-2	2.73015E1	-3.26915E1	-3.26212E1	2.6818E1	1.1929E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.00144E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.44831E-2	-8.79998E1	9.53674E-5	-8.80003E1	2.38419E-5	5.26905E-3	9.39131E-2	2.72821E1	-3.26655E1	-3.26284E1	2.68412E1	1.1929E-7	2.51793E-3	2.51793E-3	6.31817E-3	3.00838E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.79998E1	4.76837E-5	-8.80001E1	3.33786E-4	5.38826E-3	9.34839E-2	2.73051E1	-3.26753E1	-3.26362E1	2.67824E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.79996E1	4.76837E-5	-8.79997E1	2.86102E-4	5.43594E-3	9.32217E-2	2.73117E1	-3.26603E1	-3.26272E1	2.68226E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.79996E1	2.38419E-5	-8.79999E1	2.14577E-4	5.43594E-3	9.33409E-2	2.73247E1	-3.26621E1	-3.2626E1	2.68046E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.79999E1	0.0E0	-8.8E1	3.57628E-4	5.65052E-3	9.3627E-2	2.7252E1	-3.26555E1	-3.26296E1	2.68797E1	1.1929E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.79999E1	-2.14577E-4	-8.80001E1	4.05312E-4	5.24521E-3	9.36031E-2	2.73369E1	-3.26505E1	-3.26285E1	2.67945E1	1.19238E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.79999E1	-3.57628E-4	-8.79998E1	3.33786E-4	5.43594E-3	9.36985E-2	2.72898E1	-3.26815E1	-3.25953E1	2.67538E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.8E1	0.0E0	-8.80004E1	4.29153E-4	5.126E-3	9.377E-2	2.72859E1	-3.26506E1	-3.2617E1	2.68124E1	1.19239E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80003E1	-2.14577E-4	-8.80001E1	3.57628E-4	5.07832E-3	9.36031E-2	2.73004E1	-3.26974E1	-3.25753E1	2.68514E1	1.1929E-7	2.52061E-3	2.52061E-3	6.35601E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.79996E1	-9.53674E-5	-8.80002E1	2.14577E-4	5.34058E-3	9.35793E-2	2.73155E1	-3.26878E1	-3.26193E1	2.67812E1	1.19239E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.98156E-1