[Scan]
initial_time=2015-12-18T21:42:21
final_time=2015-12-18T21:42:41
ip_count=19
run=1020
dataset=5
scan=287
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.85646E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.98292E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.40529E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.06635E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.57906E-8
mult1=-9.61758E-9
mult2=-2.82909E-9
rf_tmon=-4.99909E-3
rf_agc=3.31675E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.38838E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2009E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53134E1
cs_ef1b_imon=3.18721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02369E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=1.10945E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06074E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65101E1
os_ef1alow_imon=3.00476E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.38658E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=3.05168E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.37002E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10851E1
os_restr1_imon=4.26037E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.36912E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63861E1
os_ef1bup_imon=3.13126E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=9.37786E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02441E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.02607E-8
tplens_vset=1.4E-1
tplens_vmon=1.58716E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26838E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=9.0611E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24502E0
ionrepsh_imon=8.44699E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74356E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54292E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70991E1
cs_ef2a_imon=3.19382E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13043E0
os_ef2alow_imon=-2.09152E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86226E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10394E1
os_restr2_imon=3.42005E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01392E1
cs_anode2_imon=2.09459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73157E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.33451E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.00552E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20833E0
cs_ionaccel_imon=-4.96381E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55612E1
einzel_imon=7.59748E-6
window_vset=0.0E0
window_vmon=2.11894E-1
window_imon=-6.00639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39303E-4
mask2_vset=0.0E0
mask2_vmon=-1.85805E1
mask2_imon=-1.02114E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.65416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.33396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.46658E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33266E1
os_fil1_imon=9.44447E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08013E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6497E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31836E1
cs_fil1_imon=8.96712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.8591E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.29849E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.42206E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59899E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.8024E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.32305E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.18113E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80003E1	-7.15256E-5	-8.8E1	2.38419E-5	5.29289E-3	9.32693E-2	2.72955E1	-3.26554E1	-3.26627E1	2.68647E1	1.1929E-7	2.51077E-3	2.51077E-3	6.33388E-3	3.00852E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80003E1	-1.19209E-4	-8.8E1	0.0E0	5.57899E-3	9.32217E-2	2.7302E1	-3.2656E1	-3.26278E1	2.68266E1	1.19238E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80005E1	2.6226E-4	-8.80001E1	1.19209E-4	5.6982E-3	9.34124E-2	2.72842E1	-3.26753E1	-3.26214E1	2.68082E1	1.19184E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.98026E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80003E1	2.38419E-5	-8.80002E1	4.29153E-4	5.31673E-3	9.35555E-2	2.72979E1	-3.26302E1	-3.26518E1	2.68406E1	1.1929E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80001E1	-2.6226E-4	-8.8E1	1.90735E-4	5.43594E-3	9.36985E-2	2.73117E1	-3.26506E1	-3.26194E1	2.67866E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.79999E1	-5.96046E-4	-8.80001E1	2.14577E-4	5.36442E-3	9.36747E-2	2.72903E1	-3.26531E1	-3.26166E1	2.68024E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80001E1	-5.48363E-4	-8.80001E1	1.19209E-4	5.43594E-3	9.35316E-2	2.72824E1	-3.26603E1	-3.26383E1	2.68502E1	1.19188E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80003E1	-5.24521E-4	-8.8E1	2.14577E-4	5.4121E-3	9.35316E-2	2.73198E1	-3.26596E1	-3.26148E1	2.6774E1	1.19237E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.9829E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80001E1	-2.6226E-4	-8.80003E1	2.14577E-4	5.10216E-3	9.33409E-2	2.72856E1	-3.26526E1	-3.26349E1	2.68124E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.8E1	-3.57628E-4	-8.80001E1	-4.76837E-5	5.34058E-3	9.37223E-2	2.73117E1	-3.26693E1	-3.26506E1	2.67409E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80001E1	-5.24521E-4	-8.8E1	-1.43051E-4	5.50747E-3	9.34839E-2	2.72895E1	-3.26615E1	-3.26344E1	2.68111E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79999E1	-4.76837E-4	-8.80003E1	-1.43051E-4	5.76973E-3	9.36985E-2	2.73139E1	-3.26679E1	-3.26791E1	2.68142E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80003E1	-3.09944E-4	-8.80003E1	2.14577E-4	5.45979E-3	9.35555E-2	2.72991E1	-3.26621E1	-3.2614E1	2.67818E1	1.19238E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.42513E-2	-8.79998E1	-2.6226E-4	-8.80001E1	-2.38419E-5	5.38826E-3	9.33886E-2	2.73351E1	-3.26687E1	-3.26284E1	2.6798E1	1.19239E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99686E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80001E1	-2.6226E-4	-8.80004E1	3.09944E-4	5.55515E-3	9.34362E-2	2.72745E1	-3.26356E1	-3.2641E1	2.68364E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.98554E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80001E1	-4.76837E-5	-8.8E1	4.29153E-4	5.76973E-3	9.34601E-2	2.73003E1	-3.26729E1	-3.26014E1	2.67601E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.79999E1	-3.09944E-4	-8.80002E1	-2.38419E-5	5.96046E-3	9.33886E-2	2.72727E1	-3.26554E1	-3.26266E1	2.68382E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.79998E1	2.38419E-4	-8.8E1	7.15256E-5	5.81741E-3	9.35316E-2	2.73193E1	-3.26443E1	-3.26596E1	2.6777E1	1.19186E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80002E1	2.38419E-5	-8.8E1	1.90735E-4	5.45979E-3	9.31501E-2	2.72817E1	-3.26254E1	-3.26458E1	2.66727E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80005E1	1.19209E-4	-8.80004E1	1.43051E-4	5.34058E-3	9.35793E-2	2.73157E1	-3.26537E1	-3.26838E1	2.6792E1	1.19238E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1