[Scan]
initial_time=2015-12-18T21:42:48
final_time=2015-12-18T21:43:08
ip_count=19
run=1020
dataset=5
scan=288
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.84279E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.02786E-10
ql2_vset=
ql2_vmon=2.14577E-4
ql2_imon=1.40204E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.02208E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.58624E-8
mult1=-1.0511E-8
mult2=-2.70464E-9
rf_tmon=-4.16395E-3
rf_agc=3.32374E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=5.51951E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=3.16542E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=1.0858E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09062E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64374E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.41565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=3.04036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.37401E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1554E1
os_ea1_imon=2.38358E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93175E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=1.94548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=4.03167E-8
tplens_vset=1.4E-1
tplens_vmon=1.6198E0
tplens_imon=-4.36334E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.59986E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.89969E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21605E0
ionrepsh_imon=8.33452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5465E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70104E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.45482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02212E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68611E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.39774E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=8.044E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-1.00853E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56711E1
einzel_imon=7.96534E-6
window_vset=0.0E0
window_vmon=2.19145E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82573E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-3.20173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.19317E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.4415E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31814E1
cs_fil1_imon=7.44916E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.27517E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67952E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22554E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92929E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.8E1	9.53674E-5	-8.80003E1	5.48363E-4	5.60284E-3	9.38177E-2	2.73399E1	-3.26779E1	-3.26254E1	2.67187E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.8E1	2.38419E-5	-8.80004E1	4.29153E-4	5.81741E-3	9.34362E-2	2.73237E1	-3.26615E1	-3.26446E1	2.68935E1	1.1929E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79999E1	2.14577E-4	-8.80002E1	3.57628E-4	5.57899E-3	9.31501E-2	2.7308E1	-3.26673E1	-3.26408E1	2.67792E1	1.19186E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80002E1	3.33786E-4	-8.80002E1	2.14577E-4	5.48363E-3	9.30309E-2	2.73252E1	-3.26472E1	-3.26472E1	2.6768E1	1.19188E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80003E1	2.6226E-4	-8.80005E1	1.90735E-4	5.48363E-3	9.32455E-2	2.72973E1	-3.26344E1	-3.2623E1	2.6822E1	1.19239E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80001E1	2.6226E-4	-8.80004E1	2.14577E-4	5.48363E-3	9.32455E-2	2.73027E1	-3.26627E1	-3.26308E1	2.68352E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80006E1	9.53674E-5	-8.80003E1	2.38419E-4	5.55515E-3	9.34839E-2	2.73051E1	-3.26464E1	-3.26086E1	2.67938E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80002E1	1.19209E-4	-8.80003E1	1.66893E-4	5.36442E-3	9.33409E-2	2.73039E1	-3.26566E1	-3.26566E1	2.67704E1	1.19237E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80001E1	4.76837E-5	-8.80004E1	2.86102E-4	5.43594E-3	9.37223E-2	2.72957E1	-3.26531E1	-3.26278E1	2.67842E1	1.19238E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80003E1	0.0E0	-8.80003E1	2.38419E-5	5.48363E-3	9.34124E-2	2.73002E1	-3.26615E1	-3.26217E1	2.67812E1	1.19239E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80005E1	9.53674E-5	-8.80005E1	1.90735E-4	5.55515E-3	9.35555E-2	2.7324E1	-3.26626E1	-3.26001E1	2.68911E1	1.1929E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80003E1	9.53674E-5	-8.8E1	3.09944E-4	5.26905E-3	9.37223E-2	2.73291E1	-3.26789E1	-3.26356E1	2.67493E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80006E1	2.6226E-4	-8.80001E1	2.14577E-4	5.6982E-3	9.36985E-2	2.73269E1	-3.26738E1	-3.26284E1	2.68076E1	1.19239E-7	2.51701E-3	2.51701E-3	6.31827E-3	3.01155E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80003E1	3.33786E-4	-8.79999E1	3.8147E-4	5.45979E-3	9.35078E-2	2.73285E1	-3.26777E1	-3.26452E1	2.68112E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80003E1	9.53674E-5	-8.80002E1	3.09944E-4	5.10216E-3	9.36031E-2	2.72883E1	-3.26675E1	-3.26609E1	2.68262E1	1.19213E-7	2.51268E-3	2.51268E-3	6.32099E-3	3.00507E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80003E1	1.90735E-4	-8.80003E1	7.15256E-5	5.53131E-3	9.38177E-2	2.73297E1	-3.26633E1	-3.265E1	2.67818E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80002E1	1.90735E-4	-8.80004E1	1.19209E-4	5.34058E-3	9.35793E-2	2.73045E1	-3.26891E1	-3.26296E1	2.67984E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80001E1	4.52995E-4	-8.80001E1	1.66893E-4	5.36442E-3	9.36508E-2	2.73193E1	-3.26442E1	-3.26539E1	2.68847E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80002E1	1.19209E-4	-8.80001E1	1.43051E-4	5.43594E-3	9.36985E-2	2.73105E1	-3.26368E1	-3.26362E1	2.67686E1	1.19192E-7	2.52301E-3	2.52301E-3	6.33863E-3	3.00247E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80004E1	2.14577E-4	-8.80001E1	9.53674E-5	5.81741E-3	9.37462E-2	2.73363E1	-3.26404E1	-3.26446E1	2.68611E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9926E-1