[Scan]
initial_time=2015-12-18T21:44:08
final_time=2015-12-18T21:44:28
ip_count=19
run=1020
dataset=5
scan=291
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.77367E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.02918E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=1.42233E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.07207E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.58446E-8
mult1=-1.00534E-8
mult2=-2.60483E-9
rf_tmon=-3.77942E-3
rf_agc=3.4397E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.31042E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20161E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.19521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=1.10485E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06133E0
lens1_imon=1.41773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04357E1
cs_ea2_imon=1.38871E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84099E1
cs_ef1a_imon=3.05063E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.37383E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=4.28817E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15494E1
os_ea1_imon=2.3401E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63838E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=9.69994E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=1.96045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=4.03334E-8
tplens_vset=1.4E-1
tplens_vmon=1.60604E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.60001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=8.95226E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2344E0
ionrepsh_imon=8.59565E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.573E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.20667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08236E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16924E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.4489E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.10259E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.06981E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.42427E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.01574E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-9.6554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=7.67394E-6
window_vset=0.0E0
window_vmon=2.01468E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86576E1
mask2_imon=-6.45817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.72495E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.01353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.43376E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65196E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31821E1
cs_fil1_imon=7.1484E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61583E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6817E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53191E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-1.98572E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09567E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22617E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.83157E-1
res40_imon=-2.32436E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80002E1	7.15256E-5	-8.80002E1	1.43051E-4	5.57899E-3	9.33647E-2	2.72603E1	-3.2616E1	-3.26455E1	2.68196E1	1.19137E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.79999E1	1.19209E-4	-8.80002E1	1.19209E-4	5.43594E-3	9.33886E-2	2.7288E1	-3.26193E1	-3.26236E1	2.68118E1	1.1929E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79999E1	0.0E0	-8.80001E1	-2.38419E-5	5.24521E-3	9.31025E-2	2.7334E1	-3.26608E1	-3.26313E1	2.67637E1	1.1929E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80001E1	2.14577E-4	-8.8E1	4.76837E-5	5.50747E-3	9.33886E-2	2.72809E1	-3.26449E1	-3.26065E1	2.67914E1	1.19239E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80001E1	-2.86102E-4	-8.80001E1	1.66893E-4	5.72205E-3	9.35316E-2	2.73195E1	-3.26434E1	-3.26422E1	2.67878E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80002E1	-9.53674E-5	-8.80003E1	1.19209E-4	5.48363E-3	9.35793E-2	2.72985E1	-3.26446E1	-3.26002E1	2.68118E1	1.19238E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80003E1	-1.90735E-4	-8.80003E1	1.90735E-4	5.8651E-3	9.35555E-2	2.72378E1	-3.26315E1	-3.26242E1	2.6792E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80003E1	-2.14577E-4	-8.80003E1	2.14577E-4	5.45979E-3	9.34839E-2	2.73021E1	-3.26248E1	-3.26579E1	2.68052E1	1.19237E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80001E1	-1.43051E-4	-8.80002E1	2.14577E-4	4.95911E-3	9.36508E-2	2.72685E1	-3.26649E1	-3.2639E1	2.68176E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01995E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80002E1	-3.09944E-4	-8.80002E1	3.33786E-4	5.07832E-3	9.35078E-2	2.73135E1	-3.26554E1	-3.26476E1	2.684E1	1.1929E-7	2.51096E-3	2.51096E-3	6.33977E-3	3.03027E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.79999E1	-3.33786E-4	-8.80003E1	2.38419E-4	5.26905E-3	9.35555E-2	2.72937E1	-3.26573E1	-3.26603E1	2.67837E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80002E1	-2.14577E-4	-8.80002E1	4.76837E-5	5.17368E-3	9.34839E-2	2.72871E1	-3.26957E1	-3.26398E1	2.68351E1	1.19238E-7	2.51826E-3	2.51826E-3	6.32661E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80001E1	1.43051E-4	-8.80003E1	2.38419E-4	5.10216E-3	9.34362E-2	2.72799E1	-3.26663E1	-3.26272E1	2.67463E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80001E1	-9.53674E-5	-8.80002E1	-7.15256E-5	5.03063E-3	9.34362E-2	2.72811E1	-3.26621E1	-3.26675E1	2.68036E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80001E1	0.0E0	-8.80001E1	2.38419E-5	5.19753E-3	9.34362E-2	2.72733E1	-3.25894E1	-3.25623E1	2.69061E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80005E1	-1.43051E-4	-8.80002E1	0.0E0	5.19753E-3	9.33409E-2	2.72853E1	-3.26993E1	-3.26176E1	2.6816E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80005E1	-1.19209E-4	-8.80004E1	9.53674E-5	5.26905E-3	9.38177E-2	2.73039E1	-3.2626E1	-3.26374E1	2.6786E1	1.19186E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80007E1	-2.14577E-4	-8.80004E1	9.53674E-5	5.4121E-3	9.34601E-2	2.73283E1	-3.2666E1	-3.26023E1	2.67711E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80006E1	-2.14577E-4	-8.80004E1	-2.38419E-4	5.45979E-3	9.31025E-2	2.7308E1	-3.26472E1	-3.26154E1	2.68478E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80004E1	9.53674E-5	-8.8E1	1.43051E-4	4.95911E-3	9.30548E-2	2.73117E1	-3.26729E1	-3.2626E1	2.68262E1	1.19239E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01995E-1