[Scan]
initial_time=2015-12-18T21:44:35
final_time=2015-12-18T21:44:55
ip_count=19
run=1020
dataset=5
scan=292
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.89105E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-6.7811E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.40995E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.95343E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.58328E-8
mult1=-1.00313E-8
mult2=-2.76441E-9
rf_tmon=-4.56847E-3
rf_agc=3.31734E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.58066E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65198E0
bslens_imon=2.77078E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19927E1
lens5a_imon=1.99015E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.17912E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.01908E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05251E1
cs_ea1_imon=1.08219E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09471E0
lens1_imon=1.51095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03911E1
cs_ea2_imon=1.42672E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.36243E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.3295E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15128E1
os_ea1_imon=2.38536E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26801E0
cs_ionrep_imon=9.4409E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=1.95125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=4.02364E-8
tplens_vset=1.4E-1
tplens_vmon=1.60776E0
tplens_imon=-4.65106E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50716E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.58649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98471E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.03761E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28026E0
ionrepsh_imon=8.57408E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.19547E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57103E0
os_ea2_imon=-6.85484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00604E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.20975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.43175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.31287E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.09542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.37127E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.99156E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-9.29243E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47064E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.20406E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.48416E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.25548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5108E0
defgridb_imon=6.17195E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.44234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07786E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6486E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31842E1
cs_fil1_imon=7.43715E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82778E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68097E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31827E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80052E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.84907E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71305E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80003E1	-1.19209E-4	-8.80005E1	2.38419E-5	5.07832E-3	9.34839E-2	2.73281E1	-3.26508E1	-3.26555E1	2.68406E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.46377E-2	-8.80003E1	6.91414E-4	-8.80002E1	9.53674E-5	5.05447E-3	9.36031E-2	2.73131E1	-3.26395E1	-3.26266E1	2.68178E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.50241E-2	-8.80002E1	2.6226E-4	-8.80005E1	3.33786E-4	5.31673E-3	9.34362E-2	2.73139E1	-3.26484E1	-3.26384E1	2.68154E1	1.19238E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01347E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.47149E-2	-8.80004E1	2.38419E-4	-8.80006E1	2.38419E-4	5.45979E-3	9.36031E-2	2.73117E1	-3.26621E1	-3.2614E1	2.68196E1	1.19264E-7	2.5188E-3	2.5188E-3	6.29372E-3	3.01478E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80007E1	2.38419E-4	-8.80007E1	3.33786E-4	5.48363E-3	9.35316E-2	2.73171E1	-3.26943E1	-3.26271E1	2.68166E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80006E1	4.29153E-4	-8.80004E1	2.86102E-4	5.17368E-3	9.34362E-2	2.73076E1	-3.26521E1	-3.26177E1	2.67933E1	1.19143E-7	2.51886E-3	2.51886E-3	6.323E-3	3.02977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80004E1	4.29153E-4	-8.80004E1	-1.19209E-4	5.07832E-3	9.36031E-2	2.72967E1	-3.26464E1	-3.26554E1	2.6804E1	1.1929E-7	2.52106E-3	2.52106E-3	6.3016E-3	3.01193E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.45602E-2	-8.80005E1	2.38419E-4	-8.80003E1	-1.19209E-4	5.19753E-3	9.377E-2	2.73171E1	-3.26518E1	-3.26194E1	2.68076E1	1.1929E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80002E1	3.8147E-4	-8.80002E1	1.19209E-4	5.48363E-3	9.35555E-2	2.72791E1	-3.26478E1	-3.26231E1	2.6836E1	1.19239E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80002E1	3.09944E-4	-8.80006E1	7.15256E-5	5.10216E-3	9.36985E-2	2.72799E1	-3.26212E1	-3.26494E1	2.68113E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.96929E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80004E1	-2.86102E-4	-8.80001E1	3.09944E-4	5.19753E-3	9.35793E-2	2.73153E1	-3.26861E1	-3.26452E1	2.6774E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.95385E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80003E1	-9.53674E-5	-8.80005E1	-2.38419E-5	5.22137E-3	9.36508E-2	2.73231E1	-3.26627E1	-3.26428E1	2.6792E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.95899E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.80002E1	-7.15256E-5	-8.80004E1	2.38419E-5	5.26905E-3	9.34124E-2	2.73033E1	-3.26735E1	-3.26074E1	2.6813E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.96929E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.43285E-2	-8.80004E1	1.43051E-4	-8.80004E1	-1.90735E-4	5.17368E-3	9.32932E-2	2.73424E1	-3.26789E1	-3.26152E1	2.68238E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80008E1	-1.19209E-4	-8.80001E1	2.38419E-4	5.05447E-3	9.34362E-2	2.72763E1	-3.2647E1	-3.26302E1	2.68124E1	1.19135E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80006E1	1.90735E-4	-8.80003E1	1.90735E-4	5.07832E-3	9.3317E-2	2.726E1	-3.26561E1	-3.26158E1	2.67723E1	1.19238E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.03449E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80006E1	9.53674E-5	-8.80002E1	-1.19209E-4	5.24521E-3	9.32455E-2	2.73015E1	-3.26512E1	-3.26446E1	2.68148E1	1.19186E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80004E1	7.15256E-5	-8.80003E1	2.86102E-4	5.34058E-3	9.34601E-2	2.72803E1	-3.26372E1	-3.26413E1	2.67938E1	1.19238E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80004E1	1.43051E-4	-8.80002E1	1.90735E-4	5.17368E-3	9.36031E-2	2.73045E1	-3.26697E1	-3.26337E1	2.67989E1	1.19239E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80006E1	-2.38419E-5	-8.80001E1	4.76837E-4	5.17368E-3	9.32217E-2	2.73204E1	-3.26644E1	-3.26254E1	2.68286E1	1.19239E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1