[Scan]
initial_time=2015-12-18T21:45:29
final_time=2015-12-18T21:45:48
ip_count=19
run=1020
dataset=5
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.84974E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-6.47151E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.39127E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.9987E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.58032E-8
mult1=-9.95712E-9
mult2=-2.7765E-9
rf_tmon=-3.83349E-3
rf_agc=3.44932E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.49352E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66348E0
bslens_imon=2.73949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.97579E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.04995E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53331E1
cs_ef1b_imon=3.16404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05032E1
cs_ea1_imon=1.1084E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10269E0
lens1_imon=1.53031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=3.00086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04152E1
cs_ea2_imon=1.40377E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83839E1
cs_ef1a_imon=3.04128E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.3646E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11036E1
os_restr1_imon=4.29093E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=2.35577E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.10228E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27144E0
cs_ionrep_imon=9.4106E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91831E2
cs_nozzle_imon=1.93443E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01796E1
cs_anode1_imon=1.95556E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=4.01776E-8
tplens_vset=1.4E-1
tplens_vmon=1.58653E0
tplens_imon=-2.6288E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.48276E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.5887E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.34942E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26021E0
ionrepsh_imon=8.50464E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3362E1
lens5b_imon=2.17944E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74614E1
cs_ef2b_imon=3.13559E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52601E0
os_ea2_imon=-7.94472E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00402E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71195E1
cs_ef2a_imon=3.18986E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06766E0
os_ef2alow_imon=-2.47701E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26949E-1
os_ef2bup_imon=-5.12675E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.43462E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.32137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.09515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.11252E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.08877E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.3423E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.98716E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13638E0
cs_ionaccel_imon=-8.415E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56343E1
einzel_imon=7.60176E-6
window_vset=0.0E0
window_vmon=2.14478E-1
window_imon=-9.35065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39301E-4
mask2_vset=0.0E0
mask2_vmon=-1.8645E1
mask2_imon=-7.36708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.35161E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.89115E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.19064E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39312E0
defgridb_imon=6.22479E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.44971E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65008E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=7.70444E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65059E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68195E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15705E-2
os_fil2_imon=-2.4629E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13424E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48144E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28845E-1
cs_fil2_imon=-2.4629E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31283E-3
inlet_lpb_pmon=3.0012E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51593E-3
foreline_cvt_pmon=2.51593E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.79771E-1
res40_imon=-2.36473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.47149E-2	-8.80003E1	-1.19209E-4	-8.80002E1	3.09944E-4	4.8399E-3	9.32932E-2	2.73275E1	-3.26514E1	-3.26307E1	2.68136E1	1.1929E-7	2.51025E-3	2.51025E-3	6.3074E-3	2.97499E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.44831E-2	-8.80004E1	2.38419E-5	-8.80001E1	3.33786E-4	5.36442E-3	9.35316E-2	2.72961E1	-3.26567E1	-3.26278E1	2.68292E1	1.19238E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80006E1	-1.43051E-4	-8.80004E1	7.15256E-5	5.22137E-3	9.3627E-2	2.7301E1	-3.26596E1	-3.26272E1	2.67624E1	1.19238E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.47149E-2	-8.80003E1	-2.86102E-4	-8.80003E1	2.38419E-4	5.36442E-3	9.34839E-2	2.72957E1	-3.26667E1	-3.26213E1	2.68196E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80004E1	-9.53674E-5	-8.80005E1	0.0E0	5.43594E-3	9.3317E-2	2.73167E1	-3.26713E1	-3.26297E1	2.68136E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80003E1	-2.86102E-4	-8.80004E1	2.38419E-5	5.14984E-3	9.35078E-2	2.73123E1	-3.26524E1	-3.2653E1	2.67908E1	1.19238E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80004E1	-1.19209E-4	-8.80001E1	0.0E0	5.29289E-3	9.37223E-2	2.72997E1	-3.26561E1	-3.26422E1	2.68599E1	1.19184E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80003E1	-9.53674E-5	-8.79999E1	1.90735E-4	5.05447E-3	9.34124E-2	2.73163E1	-3.26526E1	-3.26036E1	2.67986E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.80003E1	-2.14577E-4	-8.80004E1	1.66893E-4	5.05447E-3	9.34601E-2	2.73009E1	-3.26356E1	-3.2602E1	2.67986E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80003E1	1.19209E-4	-8.80005E1	4.05312E-4	5.126E-3	9.36031E-2	2.73045E1	-3.26711E1	-3.26452E1	2.68522E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80004E1	4.76837E-5	-8.80006E1	2.38419E-4	5.60284E-3	9.35078E-2	2.73111E1	-3.2641E1	-3.26314E1	2.67644E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80003E1	-4.76837E-5	-8.80002E1	0.0E0	5.91278E-3	9.33886E-2	2.72799E1	-3.26567E1	-3.26332E1	2.68274E1	1.19237E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00144E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79999E1	-1.66893E-4	-8.80003E1	-2.38419E-5	5.22137E-3	9.33409E-2	2.72998E1	-3.26762E1	-3.26136E1	2.67565E1	1.19188E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80003E1	-1.43051E-4	-8.80002E1	9.53674E-5	5.55515E-3	9.3317E-2	2.73134E1	-3.26897E1	-3.26296E1	2.67974E1	1.1929E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80001E1	-4.76837E-5	-8.80003E1	2.14577E-4	5.74589E-3	9.35078E-2	2.72354E1	-3.26524E1	-3.27504E1	2.68141E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.8E1	-7.15256E-5	-8.80002E1	-1.43051E-4	5.55515E-3	9.34839E-2	2.73069E1	-3.26386E1	-3.26092E1	2.68376E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80001E1	9.53674E-5	-8.80003E1	-1.19209E-4	5.43594E-3	9.34601E-2	2.73201E1	-3.26549E1	-3.26074E1	2.67628E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80001E1	7.15256E-5	-8.80002E1	2.38419E-4	5.14984E-3	9.34124E-2	2.73128E1	-3.26756E1	-3.26661E1	2.67974E1	1.1929E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80004E1	-2.14577E-4	-8.80003E1	4.29153E-4	5.24521E-3	9.33409E-2	2.73099E1	-3.26861E1	-3.26398E1	2.67974E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80001E1	-2.6226E-4	-8.80001E1	3.33786E-4	5.31673E-3	9.35078E-2	2.72937E1	-3.26765E1	-3.26446E1	2.67788E1	1.1929E-7	2.51593E-3	2.51593E-3	6.31283E-3	3.0012E-1