[Scan]
initial_time=2015-12-18T21:47:27
final_time=2015-12-18T21:47:46
ip_count=19
run=1020
dataset=6
scan=298
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-7.58219E-1
ql1_imon=1.61251E-8
ql2_vset=
ql2_vmon=-7.3452E-1
ql2_imon=1.82536E-9
ql3_vset=
ql3_vmon=-9.19354E0
ql3_imon=6.67365E-9
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=-5.40233E-10
mult1=-1.01498E-8
mult2=-2.78648E-9
rf_tmon=-4.37423E-3
rf_agc=3.42829E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.44832E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.96901E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.15929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=1.09373E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41522E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=3.01261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04225E1
cs_ea2_imon=1.40808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.02847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=1.3651E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.36844E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=1.95629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.34377E-8
tplens_vset=1.4E-1
tplens_vmon=1.58135E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.85569E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=8.48953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.19793E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.1438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5453E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35866E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=3.44257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67313E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.87232E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=8.00583E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-2.76925E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5008E3
multb_neg_imon=7.53061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.2833E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.43928E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64919E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31789E1
cs_fil1_imon=7.5693E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.8458E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67878E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64077E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22683E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.3046E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-7.59101E-1	-7.34615E-1	-9.19507E0	-9.18946E0	5.38826E-3	9.33409E-2	2.73139E1	-3.26472E1	-3.26337E1	2.68128E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-7.58934E-1	-7.34639E-1	-9.19521E0	-9.18937E0	5.57899E-3	9.35555E-2	2.72841E1	-3.26717E1	-3.26074E1	2.67627E1	1.1929E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-7.58934E-1	-7.34448E-1	-9.19504E0	-9.18941E0	5.34058E-3	9.3627E-2	2.73207E1	-3.26654E1	-3.26382E1	2.68493E1	1.19237E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.01742E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-7.58862E-1	-7.34329E-1	-9.19468E0	-9.18939E0	5.45979E-3	9.33886E-2	2.73249E1	-3.26573E1	-3.26014E1	2.67637E1	1.1929E-7	2.51886E-3	2.51886E-3	6.33863E-3	3.00247E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.58982E-1	-7.34615E-1	-9.19449E0	-9.18932E0	5.38826E-3	9.34362E-2	2.73279E1	-3.26639E1	-3.26032E1	2.67943E1	1.1929E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.5891E-1	-7.34353E-1	-9.19456E0	-9.18908E0	5.24521E-3	9.33409E-2	2.72847E1	-3.26753E1	-3.26633E1	2.68238E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-7.58815E-1	-7.34496E-1	-9.1944E0	-9.18941E0	5.26905E-3	9.3317E-2	2.73075E1	-3.26669E1	-3.26452E1	2.68076E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.58719E-1	-7.34615E-1	-9.19476E0	-9.18961E0	5.38826E-3	9.33647E-2	2.72937E1	-3.26717E1	-3.26296E1	2.6798E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.58624E-1	-7.34591E-1	-9.19449E0	-9.18953E0	5.60284E-3	9.36508E-2	2.72666E1	-3.26705E1	-3.26158E1	2.68514E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.58576E-1	-7.34591E-1	-9.19464E0	-9.18932E0	5.60284E-3	9.35316E-2	2.72949E1	-3.26771E1	-3.26633E1	2.6846E1	1.19264E-7	2.52045E-3	2.52045E-3	6.31837E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-7.58958E-1	-7.34854E-1	-9.19414E0	-9.18925E0	5.57899E-3	9.33647E-2	2.72612E1	-3.26795E1	-3.2653E1	2.67517E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.58934E-1	-7.34258E-1	-9.19392E0	-9.18934E0	5.05447E-3	9.35078E-2	2.72962E1	-3.26549E1	-3.26207E1	2.6783E1	1.19238E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-7.58862E-1	-7.34472E-1	-9.19383E0	-9.18939E0	5.14984E-3	9.35078E-2	2.73087E1	-3.26657E1	-3.26224E1	2.68058E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.58743E-1	-7.34329E-1	-9.19356E0	-9.18956E0	5.29289E-3	9.37462E-2	2.72892E1	-3.26856E1	-3.26207E1	2.6834E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02511E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-7.58314E-1	-7.34138E-1	-9.19387E0	-9.18941E0	5.38826E-3	9.34124E-2	2.73009E1	-3.26771E1	-3.26452E1	2.67538E1	1.19238E-7	2.50898E-3	2.50898E-3	6.30192E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.58028E-1	-7.34568E-1	-9.19375E0	-9.18949E0	5.29289E-3	9.36031E-2	2.73045E1	-3.26621E1	-3.2629E1	2.6797E1	1.19239E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.02769E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-7.5798E-1	-7.3452E-1	-9.19366E0	-9.18925E0	5.4121E-3	9.34124E-2	2.73093E1	-3.26464E1	-3.26164E1	2.68175E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.5829E-1	-7.34496E-1	-9.19375E0	-9.18937E0	5.10216E-3	9.35555E-2	2.73104E1	-3.26856E1	-3.26018E1	2.67824E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.58195E-1	-7.3452E-1	-9.19366E0	-9.18956E0	5.19753E-3	9.34124E-2	2.7308E1	-3.26909E1	-3.26408E1	2.68192E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.58219E-1	-7.3452E-1	-9.19354E0	-9.18953E0	5.38826E-3	9.34362E-2	2.73135E1	-3.26506E1	-3.2629E1	2.67313E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1