[Scan]
initial_time=2015-12-18T21:47:53
final_time=2015-12-18T21:48:13
ip_count=19
run=1020
dataset=6
scan=299
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.5829E-1
ql1_imon=1.4848E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=1.91762E-9
ql3_vset=
ql3_vmon=-9.19409E0
ql3_imon=3.50076E-9
ql4_vset=
ql4_vmon=-9.1893E0
ql4_imon=-2.46084E-10
mult1=-9.54774E-9
mult2=-2.7745E-9
rf_tmon=-4.69868E-3
rf_agc=3.31173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.57554E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68296E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.19137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.01991E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.07895E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42724E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04099E1
cs_ea2_imon=1.42034E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.05442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.36136E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.156E1
os_ea1_imon=2.3515E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.10091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.42682E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02278E1
cs_anode1_imon=1.94692E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20594E0
olens4_imon=3.3459E-8
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.47189E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.92132E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=8.52558E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.14704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55311E0
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42473E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67427E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.30173E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.98178E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.39723E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93639E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52788E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.43075E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07714E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64862E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31824E1
cs_fil1_imon=7.10679E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.10098E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5793E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22513E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.96533E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.58576E-1	-7.34472E-1	-9.19399E0	-9.18918E0	5.05447E-3	9.35793E-2	2.73045E1	-3.26669E1	-3.2641E1	2.68352E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.58696E-1	-7.34615E-1	-9.19406E0	-9.18894E0	5.126E-3	9.35316E-2	2.73045E1	-3.26873E1	-3.26326E1	2.68388E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.58433E-1	-7.34186E-1	-9.19414E0	-9.18913E0	5.36442E-3	9.36985E-2	2.72862E1	-3.26331E1	-3.26195E1	2.68221E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0951E0	-7.58362E-1	-7.34258E-1	-9.19404E0	-9.18937E0	5.50747E-3	9.36508E-2	2.72921E1	-3.26561E1	-3.26248E1	2.68016E1	1.19239E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.5841E-1	-7.34472E-1	-9.19406E0	-9.18906E0	5.34058E-3	9.34601E-2	2.73039E1	-3.26393E1	-3.26109E1	2.68192E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.58505E-1	-7.34353E-1	-9.19399E0	-9.18937E0	5.53131E-3	9.36985E-2	2.73032E1	-3.26709E1	-3.26379E1	2.68032E1	1.19238E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.58338E-1	-7.34639E-1	-9.19392E0	-9.18922E0	5.53131E-3	9.3317E-2	2.72829E1	-3.26567E1	-3.26332E1	2.68226E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-7.58553E-1	-7.34353E-1	-9.19406E0	-9.18951E0	5.17368E-3	9.35793E-2	2.73111E1	-3.2641E1	-3.26068E1	2.6819E1	1.1929E-7	2.51203E-3	2.51203E-3	6.35059E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.586E-1	-7.3452E-1	-9.19361E0	-9.18941E0	5.60284E-3	9.35078E-2	2.72865E1	-3.26482E1	-3.26543E1	2.681E1	1.19264E-7	2.51498E-3	2.51498E-3	6.33211E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-7.58433E-1	-7.34496E-1	-9.19378E0	-9.18949E0	5.74589E-3	9.34124E-2	2.73283E1	-3.26868E1	-3.26335E1	2.68175E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-7.59077E-1	-7.34329E-1	-9.19375E0	-9.18944E0	5.57899E-3	9.32455E-2	2.73039E1	-3.26497E1	-3.26285E1	2.67714E1	1.1929E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.586E-1	-7.34353E-1	-9.19378E0	-9.18949E0	5.26905E-3	9.35555E-2	2.73183E1	-3.26663E1	-3.26326E1	2.68569E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01742E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-7.58386E-1	-7.34353E-1	-9.19349E0	-9.18913E0	5.45979E-3	9.37462E-2	2.73105E1	-3.2641E1	-3.26374E1	2.68256E1	1.19238E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.03185E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-7.5829E-1	-7.34067E-1	-9.19361E0	-9.18891E0	5.36442E-3	9.35555E-2	2.72744E1	-3.26425E1	-3.26089E1	2.6763E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-7.58266E-1	-7.34115E-1	-9.1938E0	-9.18894E0	5.50747E-3	9.34839E-2	2.72951E1	-3.26537E1	-3.26714E1	2.6822E1	1.19239E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-7.58123E-1	-7.34472E-1	-9.19397E0	-9.18891E0	5.4121E-3	9.32217E-2	2.72995E1	-3.26747E1	-3.2616E1	2.6772E1	1.19186E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-7.58505E-1	-7.34639E-1	-9.19411E0	-9.18906E0	5.17368E-3	9.35316E-2	2.73193E1	-3.2685E1	-3.2659E1	2.68163E1	1.1929E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.58505E-1	-7.34687E-1	-9.19375E0	-9.18927E0	5.43594E-3	9.35078E-2	2.73213E1	-3.26834E1	-3.26086E1	2.67872E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.5841E-1	-7.34687E-1	-9.19394E0	-9.1893E0	5.29289E-3	9.33886E-2	2.73045E1	-3.26561E1	-3.26398E1	2.68642E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.5829E-1	-7.34711E-1	-9.19409E0	-9.1893E0	5.43594E-3	9.35555E-2	2.73183E1	-3.26681E1	-3.26356E1	2.67427E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1