[Scan]
initial_time=2015-12-18T21:48:47
final_time=2015-12-18T21:49:06
ip_count=19
run=1020
dataset=6
scan=301
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-7.5748E-1
ql1_imon=1.43079E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=2.0E-9
ql3_vset=
ql3_vmon=-9.19402E0
ql3_imon=1.92381E-9
ql4_vset=
ql4_vmon=-9.18925E0
ql4_imon=-1.33443E-10
mult1=-9.28285E-9
mult2=-2.80644E-9
rf_tmon=-5.07119E-3
rf_agc=3.30572E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.57045E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62374E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20143E1
lens5a_imon=2.00315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05174E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.18687E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02464E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.09954E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39675E0
lens1_imon=2.63174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97974E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.4195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84435E1
cs_ef1a_imon=3.03708E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.35985E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=2.35178E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.09373E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25564E0
cs_ionrep_imon=9.3814E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02035E1
cs_anode1_imon=1.95871E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20604E0
olens4_imon=3.35194E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.21917E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26981E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.03676E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=8.57795E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54705E0
os_ea2_imon=-4.65239E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.19868E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09337E0
os_ef2alow_imon=-2.45295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41251E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.44786E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.0939E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.26594E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.95761E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-8.50857E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.8616E-6
window_vset=0.0E0
window_vmon=2.10156E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86605E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.43472E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.51967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56796E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.44772E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08893E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64862E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31771E1
cs_fil1_imon=7.82608E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86489E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.28691E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18458E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75592E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.49542E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.93552E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.7137E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-7.56955E-1	-7.34448E-1	-9.19409E0	-9.18941E0	5.24521E-3	9.3627E-2	2.72889E1	-3.26573E1	-3.26652E1	2.68239E1	1.19239E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-7.57217E-1	-7.34591E-1	-9.19452E0	-9.18918E0	5.24521E-3	9.34839E-2	2.72993E1	-3.26598E1	-3.2615E1	2.68234E1	1.1929E-7	2.51956E-3	2.51956E-3	6.3023E-3	3.00392E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.57313E-1	-7.34568E-1	-9.19442E0	-9.18922E0	5.126E-3	9.3627E-2	2.72868E1	-3.26797E1	-3.26402E1	2.68029E1	1.19234E-7	2.51911E-3	2.51911E-3	6.3074E-3	3.01609E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-7.57337E-1	-7.34949E-1	-9.19418E0	-9.18934E0	5.24521E-3	9.37462E-2	2.73195E1	-3.26651E1	-3.26128E1	2.6795E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-7.57384E-1	-7.34401E-1	-9.19456E0	-9.18932E0	4.91142E-3	9.34839E-2	2.72913E1	-3.26933E1	-3.2611E1	2.67734E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-7.57599E-1	-7.34115E-1	-9.19425E0	-9.1892E0	5.03063E-3	9.38654E-2	2.73279E1	-3.2644E1	-3.26645E1	2.68094E1	1.19237E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-7.57122E-1	-7.34377E-1	-9.19416E0	-9.18918E0	5.14984E-3	9.36508E-2	2.73153E1	-3.26729E1	-3.2599E1	2.67818E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09688E0	-7.5736E-1	-7.34377E-1	-9.19418E0	-9.18927E0	5.19753E-3	9.36508E-2	2.73081E1	-3.26524E1	-3.26675E1	2.68292E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03185E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-7.57813E-1	-7.34687E-1	-9.19421E0	-9.18925E0	5.05447E-3	9.37223E-2	2.72871E1	-3.26651E1	-3.26056E1	2.6855E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-7.57599E-1	-7.34854E-1	-9.19409E0	-9.18925E0	5.03063E-3	9.35793E-2	2.7311E1	-3.2636E1	-3.26425E1	2.6801E1	1.1929E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.01871E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09688E0	-7.57599E-1	-7.34663E-1	-9.19402E0	-9.18932E0	5.126E-3	9.35555E-2	2.73357E1	-3.26805E1	-3.26487E1	2.6792E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-7.57647E-1	-7.34782E-1	-9.1944E0	-9.18941E0	5.05447E-3	9.35793E-2	2.72955E1	-3.2647E1	-3.26086E1	2.6831E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.57742E-1	-7.34711E-1	-9.19449E0	-9.18949E0	5.48363E-3	9.33409E-2	2.73275E1	-3.2688E1	-3.26413E1	2.67845E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.57384E-1	-7.35021E-1	-9.1943E0	-9.18932E0	5.22137E-3	9.33886E-2	2.73116E1	-3.26585E1	-3.26614E1	2.68136E1	1.19239E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0071E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.57647E-1	-7.3483E-1	-9.19414E0	-9.18939E0	5.14984E-3	9.33647E-2	2.72732E1	-3.26773E1	-3.26378E1	2.68142E1	1.1929E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.57432E-1	-7.3452E-1	-9.19402E0	-9.18932E0	5.126E-3	9.3627E-2	2.72883E1	-3.26518E1	-3.26476E1	2.67833E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.57408E-1	-7.34568E-1	-9.19404E0	-9.18953E0	5.17368E-3	9.32455E-2	2.72895E1	-3.26717E1	-3.25984E1	2.68064E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.57599E-1	-7.34949E-1	-9.19397E0	-9.18939E0	5.14984E-3	9.3627E-2	2.73116E1	-3.2626E1	-3.26236E1	2.68094E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.57504E-1	-7.34806E-1	-9.1939E0	-9.18922E0	5.05447E-3	9.34839E-2	2.73281E1	-3.2695E1	-3.26484E1	2.67794E1	1.19239E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.5748E-1	-7.34901E-1	-9.19402E0	-9.18925E0	5.17368E-3	9.35078E-2	2.73021E1	-3.26981E1	-3.26254E1	2.6825E1	1.1929E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.99941E-1