[Scan]
initial_time=2015-12-18T21:49:14
final_time=2015-12-18T21:49:33
ip_count=19
run=1020
dataset=6
scan=302
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.57647E-1
ql1_imon=1.41178E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=1.96273E-9
ql3_vset=
ql3_vmon=-9.19428E0
ql3_imon=1.70323E-9
ql4_vset=
ql4_vmon=-9.18939E0
ql4_imon=-6.34193E-11
mult1=-9.99324E-9
mult2=-2.73059E-9
rf_tmon=-3.39489E-3
rf_agc=3.40666E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.63497E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19496E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.1802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=1.07318E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.77207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04375E1
cs_ea2_imon=1.39366E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.35475E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.37421E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.30786E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.34925E-8
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.94444E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=8.62652E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56032E0
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00374E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32863E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.44761E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72763E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.27678E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.94213E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-8.06708E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.67624E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.44534E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07029E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6464E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31782E1
cs_fil1_imon=7.35906E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33524E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61282E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40381E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.57408E-1	-7.34735E-1	-9.19399E0	-9.18939E0	4.95911E-3	9.34362E-2	2.73327E1	-3.26392E1	-3.2614E1	2.6786E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-7.5717E-1	-7.34639E-1	-9.19409E0	-9.1897E0	5.19753E-3	9.33886E-2	2.73243E1	-3.26705E1	-3.2644E1	2.68106E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-7.57647E-1	-7.34735E-1	-9.19435E0	-9.18987E0	5.14984E-3	9.35555E-2	2.72947E1	-3.26897E1	-3.26243E1	2.67926E1	1.1929E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.00041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.57527E-1	-7.34639E-1	-9.19459E0	-9.18932E0	4.81606E-3	9.35793E-2	2.73159E1	-3.2653E1	-3.25972E1	2.6834E1	1.1929E-7	2.51498E-3	2.51498E-3	6.33388E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.57384E-1	-7.34711E-1	-9.19409E0	-9.18956E0	5.03063E-3	9.33409E-2	2.73255E1	-3.2644E1	-3.26512E1	2.67878E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.57408E-1	-7.34544E-1	-9.19423E0	-9.18968E0	5.14984E-3	9.36031E-2	2.72853E1	-3.26585E1	-3.2614E1	2.68376E1	1.19186E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.57289E-1	-7.34758E-1	-9.1944E0	-9.18989E0	5.19753E-3	9.32693E-2	2.73069E1	-3.26933E1	-3.2632E1	2.67656E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.57313E-1	-7.34591E-1	-9.19452E0	-9.18982E0	5.29289E-3	9.30548E-2	2.72979E1	-3.26687E1	-3.26248E1	2.6855E1	1.19238E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.57456E-1	-7.34544E-1	-9.19447E0	-9.18977E0	5.34058E-3	9.32932E-2	2.72943E1	-3.26717E1	-3.26374E1	2.67902E1	1.1929E-7	2.51389E-3	2.51389E-3	6.33486E-3	2.9991E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.57241E-1	-7.34711E-1	-9.19452E0	-9.18975E0	5.07832E-3	9.33409E-2	2.73063E1	-3.26608E1	-3.26166E1	2.67938E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.57265E-1	-7.34591E-1	-9.19406E0	-9.18992E0	5.05447E-3	9.35555E-2	2.73186E1	-3.26884E1	-3.25801E1	2.67854E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.57241E-1	-7.34544E-1	-9.1943E0	-9.18937E0	4.91142E-3	9.36031E-2	2.7326E1	-3.26625E1	-3.26231E1	2.68169E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.5736E-1	-7.34878E-1	-9.19416E0	-9.18944E0	5.03063E-3	9.34601E-2	2.73249E1	-3.26915E1	-3.26188E1	2.68082E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-7.57337E-1	-7.34782E-1	-9.19423E0	-9.1898E0	5.19753E-3	9.36508E-2	2.72763E1	-3.26717E1	-3.2641E1	2.68088E1	1.19238E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.57217E-1	-7.34735E-1	-9.19397E0	-9.18961E0	5.26905E-3	9.36985E-2	2.7298E1	-3.26756E1	-3.26101E1	2.68082E1	1.19239E-7	2.5208E-3	2.5208E-3	6.32644E-3	3.00896E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.57027E-1	-7.34544E-1	-9.19416E0	-9.18953E0	5.05447E-3	9.3627E-2	2.73303E1	-3.2644E1	-3.2623E1	2.67949E1					
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-7.57027E-1	-7.34925E-1	-9.19402E0	-9.18953E0	5.126E-3	9.36985E-2	2.72986E1	-3.26461E1	-3.26201E1	2.67836E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.57265E-1	-7.34711E-1	-9.19421E0	-9.18918E0	5.07832E-3	9.35078E-2	2.73087E1	-3.26933E1	-3.26741E1	2.68304E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.57074E-1	-7.34711E-1	-9.19449E0	-9.18922E0	5.26905E-3	9.35555E-2	2.73145E1	-3.26608E1	-3.26301E1	2.67931E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.57647E-1	-7.34735E-1	-9.19428E0	-9.18939E0	5.22137E-3	9.36747E-2	2.72763E1	-3.2644E1	-3.26056E1	2.6831E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1