[Scan]
initial_time=2015-12-18T21:49:40
final_time=2015-12-18T21:50:00
ip_count=19
run=1020
dataset=6
scan=303
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-7.57027E-1
ql1_imon=1.41121E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=1.95338E-9
ql3_vset=
ql3_vmon=-9.19421E0
ql3_imon=1.40872E-9
ql4_vset=
ql4_vmon=-9.18913E0
ql4_imon=-5.36323E-11
mult1=-9.57182E-9
mult2=-2.76253E-9
rf_tmon=-4.57852E-3
rf_agc=3.39164E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.63082E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63189E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05262E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5325E1
cs_ef1b_imon=3.17984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.08544E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41282E0
lens1_imon=2.62788E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.39943E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.03316E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.35053E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.36087E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=9.40519E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.34188E-8
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98605E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.94738E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30437E0
ionrepsh_imon=8.31289E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53869E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.44112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.31042E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.92999E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-8.78788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.86009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.29269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59405E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.45111E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64776E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=7.42514E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.56349E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68139E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.74889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.00676E-1
chamber_ion_pmon=1.19184E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68302E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.57551E-1	-7.34997E-1	-9.19452E0	-9.18941E0	5.53131E-3	9.3627E-2	2.73098E1	-3.26585E1	-3.25794E1	2.67601E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01871E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.57289E-1	-7.34806E-1	-9.19447E0	-9.18956E0	5.34058E-3	9.36985E-2	2.72658E1	-3.26329E1	-3.2616E1	2.68487E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-7.57122E-1	-7.34687E-1	-9.19445E0	-9.1893E0	5.26905E-3	9.34362E-2	2.73033E1	-3.27003E1	-3.25558E1	2.68707E1	1.1929E-7	2.52066E-3	2.52066E-3	6.29035E-3	2.9971E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.56955E-1	-7.34591E-1	-9.19411E0	-9.18961E0	5.31673E-3	9.31978E-2	2.73033E1	-3.26356E1	-3.26585E1	2.67523E1	1.19239E-7	2.51739E-3	2.51739E-3	6.28056E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.56598E-1	-7.34568E-1	-9.19423E0	-9.18958E0	5.6982E-3	9.31025E-2	2.73123E1	-3.26657E1	-3.26302E1	2.68556E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-7.56717E-1	-7.34639E-1	-9.19411E0	-9.18972E0	5.29289E-3	9.34362E-2	2.72769E1	-3.26747E1	-3.26128E1	2.67902E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.56621E-1	-7.34663E-1	-9.1943E0	-9.18922E0	5.07832E-3	9.32932E-2	2.73045E1	-3.26425E1	-3.26012E1	2.68151E1	1.19237E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.57217E-1	-7.34639E-1	-9.19461E0	-9.1892E0	5.22137E-3	9.32932E-2	2.72868E1	-3.26437E1	-3.26343E1	2.68268E1	1.1929E-7	2.52492E-3	2.52492E-3	6.34518E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.57217E-1	-7.34544E-1	-9.19468E0	-9.18911E0	5.29289E-3	9.33886E-2	2.72892E1	-3.26695E1	-3.2615E1	2.68376E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.57289E-1	-7.34615E-1	-9.19456E0	-9.18946E0	5.26905E-3	9.32217E-2	2.73246E1	-3.26738E1	-3.26425E1	2.67908E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-7.57313E-1	-7.34591E-1	-9.19449E0	-9.18956E0	5.45979E-3	9.33647E-2	2.73003E1	-3.26591E1	-3.26416E1	2.6834E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-7.57241E-1	-7.3452E-1	-9.19437E0	-9.1893E0	5.60284E-3	9.34839E-2	2.73075E1	-3.26468E1	-3.2664E1	2.68256E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.57265E-1	-7.34639E-1	-9.19423E0	-9.18922E0	5.45979E-3	9.33886E-2	2.73351E1	-3.26488E1	-3.26488E1	2.68028E1	1.1929E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.56979E-1	-7.35044E-1	-9.19437E0	-9.1893E0	5.03063E-3	9.30786E-2	2.72847E1	-3.26669E1	-3.26458E1	2.67571E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-7.57265E-1	-7.34854E-1	-9.19404E0	-9.18944E0	4.72069E-3	9.33886E-2	2.73279E1	-3.26591E1	-3.2653E1	2.68328E1	1.1929E-7	2.51662E-3	2.51662E-3	6.26916E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.5717E-1	-7.34591E-1	-9.1944E0	-9.18925E0	4.62532E-3	9.31978E-2	2.73039E1	-3.26813E1	-3.26326E1	2.68004E1	1.1929E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00197E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.57122E-1	-7.34663E-1	-9.19421E0	-9.18941E0	5.05447E-3	9.33886E-2	2.72874E1	-3.26384E1	-3.26331E1	2.68022E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56741E-1	-7.34639E-1	-9.19445E0	-9.18908E0	5.19753E-3	9.33647E-2	2.73187E1	-3.2659E1	-3.26331E1	2.68059E1	1.19238E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56955E-1	-7.34711E-1	-9.19402E0	-9.18927E0	5.29289E-3	9.32455E-2	2.73111E1	-3.26645E1	-3.2647E1	2.67728E1	1.1929E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.02621E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.57027E-1	-7.34735E-1	-9.19421E0	-9.18913E0	5.14984E-3	9.35078E-2	2.73033E1	-3.26651E1	-3.26074E1	2.68376E1	1.19184E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00676E-1