[Scan]
initial_time=2015-12-18T21:50:07
final_time=2015-12-18T21:50:26
ip_count=19
run=1020
dataset=6
scan=304
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-7.56955E-1
ql1_imon=1.40392E-8
ql2_vset=
ql2_vmon=-7.34401E-1
ql2_imon=2.02972E-9
ql3_vset=
ql3_vmon=-9.19425E0
ql3_imon=1.19374E-9
ql4_vset=
ql4_vmon=-9.18961E0
ql4_imon=-7.96437E-11
mult1=-9.6561E-9
mult2=-2.7246E-9
rf_tmon=-5.73811E-3
rf_agc=3.28289E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.62625E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.88383E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53962E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.08796E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45908E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.41565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.04195E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.35391E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.30068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.35474E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.09512E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.4845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=1.95802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.35658E-8
tplens_vset=1.4E-1
tplens_vmon=1.60118E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58689E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98317E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.96835E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=8.56523E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.13613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5429E0
os_ea2_imon=-5.37273E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71489E1
cs_ef2a_imon=3.20181E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07251E0
os_ef2alow_imon=-2.43905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10553E-1
os_ef2bup_imon=-5.08719E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10666E1
os_restr2_imon=3.44264E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.10293E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.10693E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.2249E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.94349E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-9.51639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47317E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=1.88146E-1
window_imon=-1.0976E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86466E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.43938E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07202E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6481E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.69286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68077E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58059E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.08418E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64013E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.76003E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-7.57217E-1	-7.34401E-1	-9.19473E0	-9.18951E0	5.00679E-3	9.32932E-2	2.73003E1	-3.26795E1	-3.26368E1	2.6777E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.57027E-1	-7.34615E-1	-9.19425E0	-9.18941E0	5.48363E-3	9.36508E-2	2.73057E1	-3.26713E1	-3.26223E1	2.68032E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-7.56907E-1	-7.34568E-1	-9.19402E0	-9.18925E0	5.38826E-3	9.34124E-2	2.73022E1	-3.26376E1	-3.26069E1	2.68117E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01347E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-7.56645E-1	-7.34639E-1	-9.19428E0	-9.18958E0	5.55515E-3	9.3317E-2	2.72903E1	-3.26602E1	-3.26467E1	2.6807E1	1.1929E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56788E-1	-7.34639E-1	-9.19425E0	-9.18922E0	5.38826E-3	9.34124E-2	2.72898E1	-3.26396E1	-3.26065E1	2.67943E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.56955E-1	-7.34496E-1	-9.19442E0	-9.18915E0	5.36442E-3	9.37223E-2	2.73297E1	-3.26663E1	-3.26476E1	2.68016E1	1.19239E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-7.56812E-1	-7.34568E-1	-9.19425E0	-9.18937E0	5.29289E-3	9.35793E-2	2.73165E1	-3.26482E1	-3.26314E1	2.68292E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-7.56979E-1	-7.34448E-1	-9.19447E0	-9.18934E0	5.76973E-3	9.3627E-2	2.73063E1	-3.26834E1	-3.26295E1	2.68146E1	1.19238E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.57051E-1	-7.34448E-1	-9.19464E0	-9.18906E0	5.57899E-3	9.38654E-2	2.73045E1	-3.26579E1	-3.2605E1	2.6831E1	1.1924E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00097E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.57003E-1	-7.34568E-1	-9.19442E0	-9.18901E0	5.19753E-3	9.33886E-2	2.73104E1	-3.26732E1	-3.26508E1	2.68148E1	1.19186E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.56955E-1	-7.34282E-1	-9.19442E0	-9.18927E0	5.53131E-3	9.37223E-2	2.73241E1	-3.26383E1	-3.2604E1	2.67758E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.56764E-1	-7.34258E-1	-9.19433E0	-9.18941E0	5.24521E-3	9.35316E-2	2.73351E1	-3.26675E1	-3.26506E1	2.6825E1	1.19264E-7	2.52008E-3	2.52008E-3	6.31294E-3	3.00487E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-7.56907E-1	-7.3421E-1	-9.19428E0	-9.18944E0	5.31673E-3	9.37462E-2	2.73093E1	-3.26609E1	-3.2614E1	2.68052E1					
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-7.56907E-1	-7.34353E-1	-9.19454E0	-9.18944E0	5.4121E-3	9.36985E-2	2.73111E1	-3.26711E1	-3.26356E1	2.6804E1	1.1929E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00453E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-7.56693E-1	-7.34329E-1	-9.19452E0	-9.18927E0	5.43594E-3	9.36508E-2	2.73153E1	-3.26735E1	-3.26266E1	2.68088E1	1.1929E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.56645E-1	-7.34472E-1	-9.19435E0	-9.18937E0	5.126E-3	9.3174E-2	2.73297E1	-3.26452E1	-3.26356E1	2.6822E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9926E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.56645E-1	-7.34615E-1	-9.1944E0	-9.18932E0	5.22137E-3	9.32455E-2	2.73305E1	-3.26803E1	-3.25906E1	2.67854E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.56979E-1	-7.34663E-1	-9.19416E0	-9.18963E0	5.29289E-3	9.36747E-2	2.7308E1	-3.26673E1	-3.26166E1	2.68175E1	1.1929E-7	2.51225E-3	2.51225E-3	6.27461E-3	3.01085E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56884E-1	-7.34282E-1	-9.19392E0	-9.18968E0	5.36442E-3	9.34124E-2	2.73195E1	-3.26783E1	-3.26284E1	2.68214E1	1.19188E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-7.56955E-1	-7.34401E-1	-9.19425E0	-9.18961E0	5.4121E-3	9.31978E-2	2.72985E1	-3.26573E1	-3.26278E1	2.68214E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1