[Scan]
initial_time=2015-12-18T21:50:34
final_time=2015-12-18T21:50:53
ip_count=19
run=1020
dataset=6
scan=305
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-7.56836E-1
ql1_imon=1.40285E-8
ql2_vset=
ql2_vmon=-7.34806E-1
ql2_imon=1.96067E-9
ql3_vset=
ql3_vmon=-9.19452E0
ql3_imon=1.08312E-9
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=-3.43919E-11
mult1=-9.94858E-9
mult2=-2.78597E-9
rf_tmon=-5.04039E-3
rf_agc=3.29788E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.6187E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65381E0
bslens_imon=2.59815E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19884E1
lens5a_imon=1.98832E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05041E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54198E1
cs_ef1b_imon=3.1966E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=1.08513E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42031E0
lens1_imon=2.55775E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64665E1
os_ef1alow_imon=2.98551E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03862E1
cs_ea2_imon=1.39807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.03903E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.35142E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11354E1
os_restr1_imon=4.31151E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1511E1
os_ea1_imon=2.36296E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63679E1
os_ef1bup_imon=3.08918E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25883E0
cs_ionrep_imon=9.32704E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02021E1
cs_anode1_imon=1.96641E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.34689E-8
tplens_vset=1.4E-1
tplens_vmon=1.62552E0
tplens_imon=-3.47571E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50679E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.59898E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98361E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.96124E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27475E0
ionrepsh_imon=8.49327E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3375E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7467E1
cs_ef2b_imon=3.13671E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55451E0
os_ea2_imon=-6.81811E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00689E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71607E1
cs_ef2a_imon=3.19023E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08013E0
os_ef2alow_imon=-2.59677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.30067E-1
os_ef2bup_imon=-5.19038E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10768E1
os_restr2_imon=3.44136E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30773E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.0959E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.09138E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.10898E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.2855E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.9298E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12266E0
cs_ionaccel_imon=-9.68748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47267E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56368E1
einzel_imon=7.76269E-6
window_vset=0.0E0
window_vmon=2.38181E-1
window_imon=-1.07728E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39226E-4
mask2_vset=0.0E0
mask2_vmon=-1.86444E1
mask2_imon=-5.45837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.47586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.09849E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.21508E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50774E0
defgridb_imon=6.18664E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.44092E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08153E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64819E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31851E1
cs_fil1_imon=7.57969E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80653E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67789E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31827E-2
os_fil2_imon=-2.55023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14671E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30727E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.82859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22552E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71662E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.56598E-1	-7.34711E-1	-9.19433E0	-9.18944E0	5.126E-3	9.35555E-2	2.73239E1	-3.26579E1	-3.25998E1	2.67808E1	1.19186E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.56502E-1	-7.34472E-1	-9.19421E0	-9.18958E0	4.8399E-3	9.35555E-2	2.73051E1	-3.26629E1	-3.2633E1	2.68127E1	1.19192E-7	2.51472E-3	2.51472E-3	6.33863E-3	3.00741E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.56741E-1	-7.34639E-1	-9.19442E0	-9.18913E0	4.673E-3	9.33886E-2	2.73231E1	-3.26845E1	-3.26034E1	2.68458E1	1.19235E-7	2.51296E-3	2.51296E-3	6.3074E-3	3.00916E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.56717E-1	-7.34782E-1	-9.19435E0	-9.18934E0	4.86374E-3	9.34124E-2	2.73153E1	-3.26693E1	-3.2614E1	2.68004E1	1.19239E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-7.56741E-1	-7.34568E-1	-9.19421E0	-9.18937E0	4.64916E-3	9.33647E-2	2.73287E1	-3.26431E1	-3.26378E1	2.67842E1	1.19238E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-7.56645E-1	-7.34687E-1	-9.19442E0	-9.18951E0	5.07832E-3	9.33647E-2	2.731E1	-3.2634E1	-3.26468E1	2.68076E1	1.1929E-7	2.51954E-3	2.51954E-3	6.26985E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-7.56502E-1	-7.34615E-1	-9.19433E0	-9.18951E0	5.17368E-3	9.36747E-2	2.7321E1	-3.26543E1	-3.26242E1	2.68178E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.56383E-1	-7.34901E-1	-9.19449E0	-9.18958E0	5.22137E-3	9.34839E-2	2.72775E1	-3.26482E1	-3.26362E1	2.68383E1	1.19238E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-7.56741E-1	-7.34639E-1	-9.19435E0	-9.18939E0	5.4121E-3	9.33886E-2	2.73069E1	-3.26633E1	-3.26182E1	2.6818E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-7.56598E-1	-7.34782E-1	-9.19459E0	-9.18944E0	5.31673E-3	9.34601E-2	2.72985E1	-3.26699E1	-3.26086E1	2.67998E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.56717E-1	-7.34591E-1	-9.19442E0	-9.18934E0	5.126E-3	9.3627E-2	2.73183E1	-3.26392E1	-3.2647E1	2.67966E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-7.56621E-1	-7.34782E-1	-9.1943E0	-9.18941E0	5.17368E-3	9.36985E-2	2.72967E1	-3.2635E1	-3.2617E1	2.68154E1	1.1929E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.56717E-1	-7.34568E-1	-9.19466E0	-9.18937E0	5.24521E-3	9.35078E-2	2.73369E1	-3.26446E1	-3.2602E1	2.6816E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-7.56717E-1	-7.34901E-1	-9.19492E0	-9.18934E0	4.8399E-3	9.34124E-2	2.72827E1	-3.26596E1	-3.26502E1	2.6804E1	1.1929E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.00144E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.56812E-1	-7.35188E-1	-9.19466E0	-9.18934E0	5.17368E-3	9.33886E-2	2.73255E1	-3.26675E1	-3.26428E1	2.67968E1	1.19239E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.56598E-1	-7.35021E-1	-9.1944E0	-9.18915E0	4.81606E-3	9.34362E-2	2.72883E1	-3.26693E1	-3.26591E1	2.68286E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9926E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.56812E-1	-7.34878E-1	-9.19471E0	-9.18915E0	4.95911E-3	9.35078E-2	2.72997E1	-3.26987E1	-3.26386E1	2.6783E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.57003E-1	-7.34806E-1	-9.19445E0	-9.1893E0	4.98295E-3	9.3317E-2	2.72927E1	-3.26337E1	-3.25487E1	2.67984E1	1.19264E-7	2.50944E-3	2.50944E-3	6.32371E-3	3.00637E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.57027E-1	-7.34711E-1	-9.19456E0	-9.18953E0	5.43594E-3	9.30548E-2	2.73213E1	-3.2626E1	-3.26795E1	2.6789E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.56836E-1	-7.34806E-1	-9.19452E0	-9.18941E0	5.00679E-3	9.29832E-2	2.73075E1	-3.26437E1	-3.26248E1	2.68328E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1