[Scan]
initial_time=2015-12-18T21:51:00
final_time=2015-12-18T21:51:20
ip_count=19
run=1020
dataset=6
scan=306
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-7.56931E-1
ql1_imon=1.40109E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=1.99262E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=9.12452E-10
ql4_vset=
ql4_vmon=-9.18918E0
ql4_imon=-6.25372E-11
mult1=-9.1504E-9
mult2=-2.74855E-9
rf_tmon=-4.81284E-3
rf_agc=3.34778E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.62815E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20172E1
lens5a_imon=1.97094E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=1.11015E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43332E0
lens1_imon=2.79102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03507E1
cs_ea2_imon=1.39331E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.35436E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=2.34789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28336E0
cs_ionrep_imon=9.46988E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.95629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.34744E-8
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.97748E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=8.63104E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53525E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.24397E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.93315E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86789E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.40121E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.44426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64804E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.54527E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03383E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67986E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67112E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.14242E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=197
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.57051E-1	-7.34735E-1	-9.19435E0	-9.18968E0	5.10216E-3	9.33886E-2	2.72967E1	-3.26633E1	-3.26206E1	2.68358E1	1.19239E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.98156E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.56669E-1	-7.34925E-1	-9.19435E0	-9.18951E0	5.00679E-3	9.32932E-2	2.73167E1	-3.26664E1	-3.26223E1	2.67872E1	1.19238E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.56812E-1	-7.34758E-1	-9.19449E0	-9.18934E0	5.31673E-3	9.34839E-2	2.72927E1	-3.2659E1	-3.26514E1	2.68012E1	1.19238E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.56836E-1	-7.34591E-1	-9.19459E0	-9.1897E0	5.38826E-3	9.34839E-2	2.73027E1	-3.26506E1	-3.26008E1	2.68226E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.56598E-1	-7.34496E-1	-9.1943E0	-9.18972E0	5.22137E-3	9.34362E-2	2.73021E1	-3.26368E1	-3.2635E1	2.6795E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.56717E-1	-7.34615E-1	-9.19409E0	-9.18951E0	5.03063E-3	9.34362E-2	2.72775E1	-3.26561E1	-3.26344E1	2.68412E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.56526E-1	-7.34878E-1	-9.19394E0	-9.18968E0	5.126E-3	9.3627E-2	2.72949E1	-3.26314E1	-3.26302E1	2.67535E1	1.19186E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-7.56717E-1	-7.34735E-1	-9.19409E0	-9.1893E0	5.22137E-3	9.39369E-2	2.73021E1	-3.26627E1	-3.265E1	2.68394E1	1.1929E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-7.56598E-1	-7.34735E-1	-9.19423E0	-9.1893E0	5.22137E-3	9.39846E-2	2.73207E1	-3.26693E1	-3.2599E1	2.68041E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.56502E-1	-7.34425E-1	-9.19423E0	-9.18913E0	5.14984E-3	9.37223E-2	2.72931E1	-3.26579E1	-3.26392E1	2.68154E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.99E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.56192E-1	-7.34615E-1	-9.19442E0	-9.18941E0	5.14984E-3	9.37462E-2	2.73187E1	-3.26673E1	-3.26378E1	2.68076E1	1.19239E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-7.56359E-1	-7.34401E-1	-9.19461E0	-9.18932E0	5.38826E-3	9.38654E-2	2.7312E1	-3.26787E1	-3.26596E1	2.68302E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.56526E-1	-7.34568E-1	-9.19423E0	-9.18918E0	5.19753E-3	9.35555E-2	2.72965E1	-3.26566E1	-3.26315E1	2.67806E1	1.1929E-7	2.51182E-3	2.51182E-3	6.31798E-3	2.99594E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-7.56764E-1	-7.34234E-1	-9.19437E0	-9.18915E0	5.38826E-3	9.34362E-2	2.72973E1	-3.26693E1	-3.262E1	2.68069E1	1.1929E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.00676E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.56574E-1	-7.34282E-1	-9.19459E0	-9.18946E0	5.22137E-3	9.34839E-2	2.73207E1	-3.26831E1	-3.26008E1	2.67885E1	1.19238E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.56454E-1	-7.34377E-1	-9.1943E0	-9.18922E0	5.07832E-3	9.36508E-2	2.73099E1	-3.26518E1	-3.26194E1	2.68238E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.5686E-1	-7.34854E-1	-9.19454E0	-9.18925E0	5.126E-3	9.36031E-2	2.73171E1	-3.26681E1	-3.26224E1	2.67962E1	1.1929E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-7.57027E-1	-7.34735E-1	-9.1943E0	-9.18941E0	5.07832E-3	9.36985E-2	2.73334E1	-3.26366E1	-3.25127E1	2.68016E1	1.1929E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.03027E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.5686E-1	-7.35021E-1	-9.19423E0	-9.18932E0	5.00679E-3	9.32217E-2	2.73198E1	-3.26413E1	-3.25859E1	2.67891E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-7.56931E-1	-7.34901E-1	-9.19445E0	-9.18918E0	5.19753E-3	9.32217E-2	2.73249E1	-3.26765E1	-3.26326E1	2.67932E1	1.19238E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01085E-1