[Scan]
initial_time=2015-12-18T21:51:27
final_time=2015-12-18T21:51:46
ip_count=19
run=1020
dataset=6
scan=307
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-7.56812E-1
ql1_imon=1.39897E-8
ql2_vset=
ql2_vmon=-7.34568E-1
ql2_imon=1.98728E-9
ql3_vset=
ql3_vmon=-9.1944E0
ql3_imon=8.86917E-10
ql4_vset=
ql4_vmon=-9.18937E0
ql4_imon=-2.17795E-11
mult1=-9.83036E-9
mult2=-2.74677E-9
rf_tmon=-4.60976E-3
rf_agc=3.34448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.64753E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.76126E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20223E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=1.08508E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40561E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64458E1
os_ef1alow_imon=3.0018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.39799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84761E1
cs_ef1a_imon=3.02523E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.35565E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.32302E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.34357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=9.49892E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93272E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02464E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.35653E-8
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.0187E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=8.55802E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53389E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7154E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.06299E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.4523E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02175E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67804E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.24609E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.95989E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-9.86907E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.38965E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-4.57124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.49456E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=6.8637E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21209E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33259E1
os_fil1_imon=9.43411E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64824E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31833E1
cs_fil1_imon=6.80045E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.47339E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68119E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24744E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7198E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.16935E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17556E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-7.56788E-1	-7.34353E-1	-9.19423E0	-9.18941E0	5.38826E-3	9.35316E-2	2.73171E1	-3.2638E1	-3.26627E1	2.67662E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-7.56574E-1	-7.34639E-1	-9.19445E0	-9.18922E0	5.29289E-3	9.34839E-2	2.73228E1	-3.26927E1	-3.25954E1	2.6798E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-7.56717E-1	-7.34758E-1	-9.19442E0	-9.18925E0	5.38826E-3	9.32217E-2	2.7301E1	-3.2659E1	-3.26173E1	2.67816E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.5655E-1	-7.34735E-1	-9.19456E0	-9.18941E0	5.17368E-3	9.3627E-2	2.72931E1	-3.26567E1	-3.26885E1	2.68469E1	1.19239E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-7.56311E-1	-7.34591E-1	-9.19452E0	-9.18937E0	5.14984E-3	9.36747E-2	2.73628E1	-3.26314E1	-3.26579E1	2.68406E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56788E-1	-7.3483E-1	-9.19445E0	-9.18956E0	5.05447E-3	9.37223E-2	2.72833E1	-3.26679E1	-3.26325E1	2.6801E1	1.19264E-7	2.51214E-3	2.51214E-3	6.3074E-3	3.01414E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.56478E-1	-7.35092E-1	-9.19452E0	-9.18944E0	5.126E-3	9.38177E-2	2.72871E1	-3.26386E1	-3.2632E1	2.67968E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.56335E-1	-7.35092E-1	-9.19445E0	-9.1893E0	5.19753E-3	9.36031E-2	2.7296E1	-3.26567E1	-3.26209E1	2.68194E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-7.56526E-1	-7.34806E-1	-9.19454E0	-9.18951E0	5.03063E-3	9.36031E-2	2.72841E1	-3.26712E1	-3.26107E1	2.68127E1	1.1929E-7	2.51679E-3	2.51679E-3	6.33341E-3	2.99506E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-7.56431E-1	-7.34544E-1	-9.19456E0	-9.1897E0	5.14984E-3	9.34362E-2	2.73315E1	-3.26536E1	-3.26362E1	2.67692E1	1.19211E-7	2.51748E-3	2.51748E-3	6.32978E-3	3.0041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.5655E-1	-7.34687E-1	-9.19414E0	-9.18927E0	5.126E-3	9.35078E-2	2.73135E1	-3.26723E1	-3.2626E1	2.684E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.56383E-1	-7.34663E-1	-9.19399E0	-9.18918E0	5.07832E-3	9.377E-2	2.73207E1	-3.26711E1	-3.26194E1	2.67902E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-7.56502E-1	-7.3483E-1	-9.19428E0	-9.18946E0	5.19753E-3	9.35316E-2	2.72976E1	-3.26579E1	-3.26324E1	2.68354E1	1.19238E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.56383E-1	-7.34711E-1	-9.19421E0	-9.18925E0	5.10216E-3	9.35078E-2	2.72947E1	-3.26211E1	-3.26505E1	2.67926E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.04322E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.56407E-1	-7.35092E-1	-9.19411E0	-9.18932E0	4.98295E-3	9.38416E-2	2.7311E1	-3.26785E1	-3.26242E1	2.68016E1	1.19186E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-7.56335E-1	-7.34949E-1	-9.19452E0	-9.18911E0	5.17368E-3	9.34362E-2	2.73057E1	-3.26964E1	-3.26076E1	2.68088E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.56741E-1	-7.34544E-1	-9.19437E0	-9.18953E0	5.29289E-3	9.34362E-2	2.73243E1	-3.26843E1	-3.2611E1	2.67558E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.56502E-1	-7.34758E-1	-9.19442E0	-9.18934E0	5.00679E-3	9.37462E-2	2.73428E1	-3.26054E1	-3.25192E1	2.68626E1	1.19237E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.0201E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.56812E-1	-7.34687E-1	-9.19416E0	-9.18946E0	5.43594E-3	9.377E-2	2.73339E1	-3.26777E1	-3.26206E1	2.6795E1	1.19264E-7	2.5233E-3	2.5233E-3	6.31009E-3	3.00582E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-7.56812E-1	-7.34568E-1	-9.1944E0	-9.18937E0	5.43594E-3	9.35555E-2	2.73033E1	-3.26555E1	-3.26136E1	2.67804E1