[Scan]
initial_time=2015-12-18T21:52:20
final_time=2015-12-18T21:52:40
ip_count=19
run=1020
dataset=6
scan=309
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-7.56383E-1
ql1_imon=1.39681E-8
ql2_vset=
ql2_vmon=-7.34687E-1
ql2_imon=1.94225E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=7.49052E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.49743E-11
mult1=-9.67155E-9
mult2=-2.74023E-9
rf_tmon=-4.16655E-3
rf_agc=3.39956E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.61462E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65504E0
bslens_imon=2.51E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.203E1
lens5a_imon=1.98648E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54318E1
cs_ef1b_imon=3.18641E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02073E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05025E1
cs_ea1_imon=1.09652E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40317E0
lens1_imon=2.4696E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6474E1
os_ef1alow_imon=2.98922E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03984E1
cs_ea2_imon=1.3988E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.04467E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.35239E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11209E1
os_restr1_imon=4.30415E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15349E1
os_ea1_imon=2.35745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6362E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26801E0
cs_ionrep_imon=9.49232E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93181E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02164E1
cs_anode1_imon=1.94271E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.34973E-8
tplens_vset=1.4E-1
tplens_vmon=1.60593E0
tplens_imon=-2.88803E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26346E1
iondef3_imon=1.48365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26572E1
iondef2_imon=1.59017E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.97652E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27291E0
ionrepsh_imon=8.56673E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.17637E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74666E1
cs_ef2b_imon=3.12912E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55206E0
os_ea2_imon=-6.23044E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71307E1
cs_ef2a_imon=3.18824E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10382E0
os_ef2alow_imon=-2.55694E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11908E-1
os_ef2bup_imon=-5.2742E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=3.4383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.3272E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01852E1
cs_anode2_imon=2.0951E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73271E1
iondef1_imon=1.09468E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68375E1
iondef4_imon=1.08971E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.27853E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.93979E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1179E0
cs_ionaccel_imon=-9.26591E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.8237E-6
window_vset=0.0E0
window_vmon=2.18691E-1
window_imon=-9.89015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39169E-4
mask2_vset=0.0E0
mask2_vmon=-1.86577E1
mask2_imon=-6.6221E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.6338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.52823E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.24813E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54144E0
defgridb_imon=6.2197E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.43259E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07813E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64724E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=7.94771E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.06766E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46282E-2
os_fil2_imon=-2.45007E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67838E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31697E-1
cs_fil2_imon=-2.67039E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44221E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22645E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.56338E-1
res40_imon=-2.49085E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.56335E-1	-7.34758E-1	-9.19452E0	-9.18891E0	5.10216E-3	9.38177E-2	2.73204E1	-3.26962E1	-3.26195E1	2.68018E1	1.19186E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-7.56383E-1	-7.34496E-1	-9.19471E0	-9.18901E0	5.19753E-3	9.3627E-2	2.73009E1	-3.26368E1	-3.26314E1	2.67782E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.56478E-1	-7.34806E-1	-9.19483E0	-9.18939E0	4.91142E-3	9.34124E-2	2.7311E1	-3.26767E1	-3.26443E1	2.6801E1	1.1929E-7	2.52599E-3	2.52599E-3	6.33436E-3	3.00197E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56359E-1	-7.34806E-1	-9.1944E0	-9.18963E0	5.10216E-3	9.38892E-2	2.73111E1	-3.26837E1	-3.26062E1	2.68376E1	1.19239E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.56335E-1	-7.35116E-1	-9.1944E0	-9.18925E0	4.93526E-3	9.36508E-2	2.73159E1	-3.26952E1	-3.26271E1	2.67947E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.56288E-1	-7.34854E-1	-9.19456E0	-9.18949E0	5.17368E-3	9.377E-2	2.7312E1	-3.26609E1	-3.26235E1	2.68219E1	1.19195E-7	2.52123E-3	2.52123E-3	6.30239E-3	2.98151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-7.56407E-1	-7.34448E-1	-9.19459E0	-9.18953E0	5.00679E-3	9.38416E-2	2.72979E1	-3.26422E1	-3.2614E1	2.67878E1	1.1929E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.00794E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.56264E-1	-7.34568E-1	-9.19454E0	-9.18946E0	4.86374E-3	9.38177E-2	2.73099E1	-3.26422E1	-3.26212E1	2.68274E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-7.56192E-1	-7.34901E-1	-9.19447E0	-9.18939E0	4.98295E-3	9.39369E-2	2.72805E1	-3.26296E1	-3.26128E1	2.67776E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-7.56097E-1	-7.34806E-1	-9.19461E0	-9.18946E0	5.24521E-3	9.37223E-2	2.72967E1	-3.26699E1	-3.26398E1	2.67926E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-7.56192E-1	-7.3483E-1	-9.19456E0	-9.18951E0	5.26905E-3	9.37462E-2	2.73145E1	-3.2682E1	-3.26231E1	2.68319E1	1.1929E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.56073E-1	-7.34806E-1	-9.19445E0	-9.18953E0	5.50747E-3	9.37223E-2	2.73051E1	-3.26461E1	-3.26195E1	2.67872E1	1.19238E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.56335E-1	-7.34806E-1	-9.1943E0	-9.18927E0	5.38826E-3	9.32693E-2	2.73225E1	-3.26591E1	-3.26356E1	2.6813E1	1.1929E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.56049E-1	-7.34782E-1	-9.19437E0	-9.1897E0	5.126E-3	9.34124E-2	2.72791E1	-3.26756E1	-3.26425E1	2.68166E1	1.19237E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01475E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56311E-1	-7.34639E-1	-9.1944E0	-9.18951E0	5.14984E-3	9.34124E-2	2.73302E1	-3.26695E1	-3.26107E1	2.68058E1	1.1929E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.03545E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.56311E-1	-7.34639E-1	-9.19459E0	-9.18958E0	5.07832E-3	9.34124E-2	2.73393E1	-3.26729E1	-3.26603E1	2.68701E1	1.1929E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.0041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56359E-1	-7.34758E-1	-9.19433E0	-9.1897E0	5.126E-3	9.34601E-2	2.73153E1	-3.27041E1	-3.26308E1	2.68016E1	1.19239E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.56431E-1	-7.34472E-1	-9.19447E0	-9.18937E0	5.4121E-3	9.33886E-2	2.73735E1	-3.27817E1	-3.26284E1	2.67734E1	1.19186E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-7.56407E-1	-7.34687E-1	-9.19478E0	-9.18963E0	5.43594E-3	9.37223E-2	2.73015E1	-3.26482E1	-3.26224E1	2.68202E1	1.19238E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.56383E-1	-7.34687E-1	-9.19471E0	-9.18987E0	5.19753E-3	9.37939E-2	2.73271E1	-3.26572E1	-3.26346E1	2.68375E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1