[Scan]
initial_time=2015-12-18T21:54:34
final_time=2015-12-18T21:54:53
ip_count=19
run=1020
dataset=6
scan=314
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-7.56168E-1
ql1_imon=1.37898E-8
ql2_vset=
ql2_vmon=-7.34949E-1
ql2_imon=1.97855E-9
ql3_vset=
ql3_vmon=-9.1949E0
ql3_imon=4.9752E-10
ql4_vset=
ql4_vmon=-9.18946E0
ql4_imon=1.79887E-11
mult1=-9.48754E-9
mult2=-2.7065E-9
rf_tmon=-4.29986E-3
rf_agc=3.32072E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.67136E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5402E1
cs_ef1b_imon=3.1966E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=1.07534E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43505E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04261E1
cs_ea2_imon=1.37744E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.35435E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.29756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.36736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.10902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.39437E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=1.94967E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.35302E-8
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26143E1
iondef3_imon=1.52524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27138E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.95691E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21064E0
ionrepsh_imon=8.57244E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34072E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53148E0
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.19034E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0673E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.48201E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.44542E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.09286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73096E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68453E1
iondef4_imon=1.08816E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.28102E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.94817E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-8.85609E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47174E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.77472E-6
window_vset=0.0E0
window_vmon=2.27532E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86402E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.34315E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42999E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07856E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64693E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=8.37053E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33202E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67914E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65664E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22655E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36241E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.55668E-1	-7.3452E-1	-9.19461E0	-9.18963E0	5.48363E-3	9.35316E-2	2.73225E1	-3.2635E1	-3.26512E1	2.68106E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.55668E-1	-7.34282E-1	-9.19454E0	-9.18911E0	5.45979E-3	9.36031E-2	2.73081E1	-3.26759E1	-3.26434E1	2.68182E1	1.19264E-7	2.51552E-3	2.51552E-3	6.31563E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.55477E-1	-7.34401E-1	-9.1948E0	-9.18963E0	5.48363E-3	9.36508E-2	2.73057E1	-3.26708E1	-3.26354E1	2.6801E1					
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.55644E-1	-7.34496E-1	-9.19466E0	-9.18961E0	5.17368E-3	9.35316E-2	2.72622E1	-3.26521E1	-3.26486E1	2.67769E1	1.19188E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.55572E-1	-7.34329E-1	-9.19476E0	-9.18951E0	5.36442E-3	9.34124E-2	2.73277E1	-3.26444E1	-3.25972E1	2.6807E1	1.1929E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-7.55596E-1	-7.34472E-1	-9.19473E0	-9.18944E0	5.29289E-3	9.35555E-2	2.72629E1	-3.26591E1	-3.26334E1	2.68038E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.02813E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-7.55835E-1	-7.3452E-1	-9.19452E0	-9.18927E0	5.53131E-3	9.35078E-2	2.72883E1	-3.2648E1	-3.26179E1	2.68233E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-7.56145E-1	-7.34496E-1	-9.19456E0	-9.18944E0	5.67436E-3	9.35316E-2	2.7291E1	-3.26762E1	-3.26407E1	2.6825E1	1.1924E-7	2.51182E-3	2.51182E-3	6.31798E-3	3.02368E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56121E-1	-7.34663E-1	-9.19483E0	-9.18939E0	5.62668E-3	9.3627E-2	2.73057E1	-3.2688E1	-3.25971E1	2.6819E1	1.1929E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-7.55978E-1	-7.34544E-1	-9.19454E0	-9.18941E0	5.67436E-3	9.38177E-2	2.72913E1	-3.26236E1	-3.26452E1	2.68322E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-7.56001E-1	-7.34234E-1	-9.1944E0	-9.18961E0	5.67436E-3	9.35555E-2	2.73045E1	-3.26472E1	-3.26136E1	2.67688E1	1.19213E-7	2.51863E-3	2.51863E-3	6.33461E-3	3.00378E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-7.55882E-1	-7.34353E-1	-9.19449E0	-9.18963E0	5.62668E-3	9.35316E-2	2.73069E1	-3.26615E1	-3.26334E1	2.68051E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-7.56049E-1	-7.34401E-1	-9.19471E0	-9.18965E0	5.60284E-3	9.34839E-2	2.73151E1	-3.26756E1	-3.2629E1	2.67926E1	1.1929E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.98026E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.55906E-1	-7.34258E-1	-9.19471E0	-9.18922E0	5.57899E-3	9.32932E-2	2.73249E1	-3.26825E1	-3.25966E1	2.68184E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29128E-3	2.98156E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-7.55882E-1	-7.34258E-1	-9.19456E0	-9.18937E0	5.38826E-3	9.34601E-2	2.73189E1	-3.26561E1	-3.26002E1	2.68046E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29919E-3	2.9965E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.55858E-1	-7.34448E-1	-9.19466E0	-9.18934E0	5.29289E-3	9.34124E-2	2.73281E1	-3.26449E1	-3.26425E1	2.68322E1					
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09588E0	-7.55811E-1	-7.34305E-1	-9.19492E0	-9.18944E0	5.60284E-3	9.36031E-2	2.73183E1	-3.26206E1	-3.26056E1	2.68178E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-7.55835E-1	-7.34329E-1	-9.19509E0	-9.18975E0	5.50747E-3	9.40323E-2	2.7334E1	-3.26655E1	-3.2616E1	2.67845E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-7.56001E-1	-7.34496E-1	-9.19499E0	-9.18944E0	5.48363E-3	9.36031E-2	2.73429E1	-3.26428E1	-3.26164E1	2.6792E1	1.19239E-7	2.51847E-3	2.51847E-3	6.2752E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-7.56168E-1	-7.34949E-1	-9.1949E0	-9.18946E0	5.60284E-3	9.36747E-2	2.73096E1	-3.27138E1	-3.26143E1	2.68453E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00563E-1