[Scan]
initial_time=2015-12-18T21:55:00
final_time=2015-12-18T21:55:20
ip_count=19
run=1020
dataset=6
scan=315
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-7.55978E-1
ql1_imon=1.38E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=1.97544E-9
ql3_vset=
ql3_vmon=-9.19447E0
ql3_imon=5.01454E-10
ql4_vset=
ql4_vmon=-9.18937E0
ql4_imon=-9.08375E-12
mult1=-9.61998E-9
mult2=-2.93419E-9
rf_tmon=-4.81885E-3
rf_agc=3.41747E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.70889E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97342E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52421E1
cs_ef1b_imon=3.15334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=1.10555E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41503E0
lens1_imon=2.59635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6467E1
os_ef1alow_imon=2.99835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.38269E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84291E1
cs_ef1a_imon=3.0302E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.3537E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.31218E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.34647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63756E1
os_ef1bup_imon=3.08788E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=9.37786E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02057E1
cs_anode1_imon=1.96159E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.35772E-8
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26242E1
iondef2_imon=1.56426E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.04745E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=8.31957E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.18295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74401E1
cs_ef2b_imon=3.12715E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53289E0
os_ea2_imon=-5.785E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00849E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71553E1
cs_ef2a_imon=3.19226E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06252E0
os_ef2alow_imon=-2.49225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9939E-1
os_ef2bup_imon=-5.14608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10693E1
os_restr2_imon=3.44951E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.32689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02027E1
cs_anode2_imon=2.09641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.09821E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.27316E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.93593E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13427E0
cs_ionaccel_imon=-9.95491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47481E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.46492E-6
window_vset=0.0E0
window_vmon=2.26069E-1
window_imon=-8.07953E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86721E1
mask2_imon=-4.0811E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.61523E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.43682E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07247E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64798E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31824E1
cs_fil1_imon=6.99233E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65796E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68296E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.48479E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20365E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29842E-1
cs_fil2_imon=-2.74427E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40057E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06133E-1
res40_imon=-2.4781E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-7.55906E-1	-7.35021E-1	-9.19449E0	-9.18941E0	5.17368E-3	9.35555E-2	2.72927E1	-3.26809E1	-3.2593E1	2.68041E1	1.19239E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.00966E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-7.5562E-1	-7.34305E-1	-9.19445E0	-9.18958E0	5.31673E-3	9.32693E-2	2.72886E1	-3.26456E1	-3.26572E1	2.68172E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-7.55882E-1	-7.34758E-1	-9.1949E0	-9.18939E0	5.14984E-3	9.35078E-2	2.73346E1	-3.26805E1	-3.26133E1	2.68324E1	1.1929E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.98554E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-7.55787E-1	-7.34735E-1	-9.19454E0	-9.1893E0	5.29289E-3	9.34124E-2	2.73279E1	-3.26585E1	-3.26567E1	2.68394E1	1.1929E-7	2.52025E-3	2.52025E-3	6.29684E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-7.55215E-1	-7.35068E-1	-9.19485E0	-9.18949E0	5.43594E-3	9.36508E-2	2.73207E1	-3.2638E1	-3.26056E1	2.6784E1	1.1929E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-7.55501E-1	-7.34735E-1	-9.19476E0	-9.18941E0	5.07832E-3	9.3317E-2	2.73093E1	-3.2653E1	-3.26116E1	2.68478E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-7.5562E-1	-7.34735E-1	-9.19499E0	-9.18939E0	5.45979E-3	9.35793E-2	2.73045E1	-3.26524E1	-3.262E1	2.6813E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.55835E-1	-7.34735E-1	-9.19476E0	-9.18934E0	5.19753E-3	9.34124E-2	2.72979E1	-3.26543E1	-3.26032E1	2.6798E1	1.1929E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.55739E-1	-7.3483E-1	-9.19468E0	-9.18965E0	5.126E-3	9.36508E-2	2.73057E1	-3.26803E1	-3.26124E1	2.68538E1	1.19239E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.55715E-1	-7.34639E-1	-9.19492E0	-9.18946E0	5.31673E-3	9.37462E-2	2.73111E1	-3.26549E1	-3.26476E1	2.67704E1	1.19238E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-7.55525E-1	-7.34782E-1	-9.19478E0	-9.18956E0	5.57899E-3	9.34362E-2	2.73393E1	-3.26933E1	-3.26314E1	2.68082E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.55668E-1	-7.35068E-1	-9.19468E0	-9.18949E0	5.43594E-3	9.39131E-2	2.72805E1	-3.26657E1	-3.2641E1	2.6795E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-7.56121E-1	-7.35331E-1	-9.1948E0	-9.18922E0	5.43594E-3	9.38892E-2	2.72862E1	-3.26443E1	-3.26325E1	2.68082E1	1.1929E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99879E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-7.5593E-1	-7.34949E-1	-9.19487E0	-9.1893E0	5.45979E-3	9.36985E-2	2.7318E1	-3.26872E1	-3.26242E1	2.68176E1	1.1929E-7	2.50882E-3	2.50882E-3	6.33436E-3	3.02769E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.55763E-1	-7.3452E-1	-9.19461E0	-9.18922E0	5.34058E-3	9.34839E-2	2.72903E1	-3.26815E1	-3.26036E1	2.68064E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.55692E-1	-7.34544E-1	-9.19464E0	-9.18949E0	5.10216E-3	9.34601E-2	2.73117E1	-3.26861E1	-3.26152E1	2.68235E1	1.19238E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.55882E-1	-7.34425E-1	-9.1944E0	-9.18961E0	5.4121E-3	9.35078E-2	2.73057E1	-3.26561E1	-3.26332E1	2.68007E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.55858E-1	-7.34401E-1	-9.19449E0	-9.18956E0	5.38826E-3	9.34839E-2	2.73075E1	-3.26402E1	-3.26113E1	2.68192E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-7.55811E-1	-7.34735E-1	-9.19471E0	-9.18965E0	5.4121E-3	9.35555E-2	2.72985E1	-3.26999E1	-3.26554E1	2.67842E1	1.19188E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.55978E-1	-7.34735E-1	-9.19447E0	-9.18937E0	5.36442E-3	9.36031E-2	2.73009E1	-3.26242E1	-3.26494E1	2.67992E1	1.1929E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.00824E-1