[Scan]
initial_time=2015-12-18T21:55:27
final_time=2015-12-18T21:55:47
ip_count=19
run=1020
dataset=6
scan=316
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-7.55763E-1
ql1_imon=1.39247E-8
ql2_vset=
ql2_vmon=-7.3483E-1
ql2_imon=1.94291E-9
ql3_vset=
ql3_vmon=-9.19437E0
ql3_imon=5.15592E-10
ql4_vset=
ql4_vmon=-9.18934E0
ql4_imon=-9.70364E-12
mult1=-9.59393E-9
mult2=-2.70562E-9
rf_tmon=-4.43279E-3
rf_agc=3.42471E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.63776E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61447E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20614E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52781E1
cs_ef1b_imon=3.16758E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.01962E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=1.11284E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43745E0
lens1_imon=2.45123E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.41781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=3.03316E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.33455E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.81255E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93121E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.34143E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-3.61844E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.59446E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.97217E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=8.53279E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57835E0
os_ea2_imon=-7.86015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06042E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.43536E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23127E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73004E1
iondef1_imon=1.11139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67337E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.25498E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.95108E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.62074E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64518E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.43603E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07551E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64749E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=7.80355E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.20309E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67921E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61094E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-7.55739E-1	-7.34353E-1	-9.19518E0	-9.18944E0	5.48363E-3	9.33647E-2	2.72889E1	-3.26549E1	-3.25972E1	2.6828E1	1.19238E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-7.55644E-1	-7.34544E-1	-9.19499E0	-9.18927E0	5.72205E-3	9.33886E-2	2.72931E1	-3.26566E1	-3.26552E1	2.68024E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0968E0	-7.55882E-1	-7.34687E-1	-9.19459E0	-9.1892E0	5.34058E-3	9.36508E-2	2.72613E1	-3.26368E1	-3.26243E1	2.68157E1	1.1929E-7	2.51813E-3	2.51813E-3	6.31406E-3	2.99312E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-7.55739E-1	-7.3483E-1	-9.19471E0	-9.18941E0	5.55515E-3	9.37939E-2	2.73249E1	-3.26633E1	-3.26164E1	2.68106E1	1.1929E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-7.55978E-1	-7.34663E-1	-9.19454E0	-9.18934E0	5.45979E-3	9.37939E-2	2.72919E1	-3.26681E1	-3.26122E1	2.68406E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03712E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-7.55858E-1	-7.34639E-1	-9.19445E0	-9.18908E0	5.26905E-3	9.37939E-2	2.72871E1	-3.26621E1	-3.26338E1	2.67908E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-7.5593E-1	-7.34615E-1	-9.19452E0	-9.18915E0	5.17368E-3	9.34124E-2	2.72979E1	-3.26603E1	-3.26092E1	2.68064E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-7.55882E-1	-7.34448E-1	-9.19464E0	-9.1892E0	5.53131E-3	9.36508E-2	2.72803E1	-3.26549E1	-3.26178E1	2.67758E1	1.1929E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09688E0	-7.55978E-1	-7.34568E-1	-9.19466E0	-9.18941E0	5.6982E-3	9.35793E-2	2.72907E1	-3.26585E1	-3.2635E1	2.68154E1	1.1929E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.56073E-1	-7.34615E-1	-9.19461E0	-9.1893E0	5.74589E-3	9.36985E-2	2.73195E1	-3.26663E1	-3.26212E1	2.68001E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.03976E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.55835E-1	-7.34663E-1	-9.19476E0	-9.1893E0	5.50747E-3	9.34362E-2	2.73003E1	-3.26597E1	-3.2641E1	2.67782E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-7.55787E-1	-7.34687E-1	-9.19464E0	-9.18939E0	5.34058E-3	9.35555E-2	2.72985E1	-3.26705E1	-3.262E1	2.68267E1	1.19238E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.55501E-1	-7.3452E-1	-9.19447E0	-9.18934E0	5.07832E-3	9.35793E-2	2.73063E1	-3.26837E1	-3.26386E1	2.68064E1	1.19186E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.55453E-1	-7.3483E-1	-9.19402E0	-9.1893E0	4.91142E-3	9.32217E-2	2.7308E1	-3.26779E1	-3.2636E1	2.67986E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.55858E-1	-7.3452E-1	-9.19433E0	-9.18913E0	4.98295E-3	9.36031E-2	2.73159E1	-3.26717E1	-3.26554E1	2.6783E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-7.55763E-1	-7.34425E-1	-9.19418E0	-9.18913E0	4.8399E-3	9.34362E-2	2.73022E1	-3.26521E1	-3.26451E1	2.68204E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-7.55954E-1	-7.34591E-1	-9.19466E0	-9.18939E0	5.00679E-3	9.35078E-2	2.73127E1	-3.26871E1	-3.26565E1	2.67839E1	1.1929E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.00097E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09673E0	-7.56073E-1	-7.34735E-1	-9.19447E0	-9.18899E0	5.17368E-3	9.33886E-2	2.73486E1	-3.26955E1	-3.26167E1	2.68146E1	1.1929E-7	2.51527E-3	2.51527E-3	6.3016E-3	3.00087E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-7.56097E-1	-7.34663E-1	-9.19433E0	-9.18918E0	5.10216E-3	9.35078E-2	2.72925E1	-3.26723E1	-3.25978E1	2.67728E1	1.1924E-7	2.52342E-3	2.52342E-3	6.31798E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-7.55763E-1	-7.3483E-1	-9.19437E0	-9.18934E0	5.31673E-3	9.35555E-2	2.73004E1	-3.26797E1	-3.26166E1	2.67337E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02659E-1