[Scan]
initial_time=2015-12-18T21:55:54
final_time=2015-12-18T21:56:13
ip_count=19
run=1020
dataset=6
scan=317
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-7.55596E-1
ql1_imon=1.37776E-8
ql2_vset=
ql2_vmon=-7.34568E-1
ql2_imon=1.96691E-9
ql3_vset=
ql3_vmon=-9.19456E0
ql3_imon=4.50528E-10
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=5.72205E-12
mult1=-9.7949E-9
mult2=-2.79185E-9
rf_tmon=-4.18503E-3
rf_agc=3.42883E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.67383E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20355E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53142E1
cs_ef1b_imon=3.17551E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=1.08976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42183E0
lens1_imon=2.5702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.40412E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.35664E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.35871E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=9.6323E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.95269E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20604E0
olens4_imon=3.3534E-8
tplens_vset=1.4E-1
tplens_vmon=1.615E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.99103E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=8.47872E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55071E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.45013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.32163E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68029E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.25674E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.96039E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-8.96807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.39723E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.81323E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.4403E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08092E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64888E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=7.24494E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61154E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68071E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06123E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62313E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.23252E-1
res40_imon=-2.24109E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-7.55644E-1	-7.34448E-1	-9.19447E0	-9.18965E0	5.4121E-3	9.32693E-2	2.73249E1	-3.26585E1	-3.2617E1	2.6798E1	1.1929E-7	2.51552E-3	2.51552E-3	6.35692E-3	2.97963E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.0968E0	-7.5593E-1	-7.3452E-1	-9.19454E0	-9.18982E0	5.22137E-3	9.33409E-2	2.73234E1	-3.26708E1	-3.26396E1	2.68304E1	1.19238E-7	2.52318E-3	2.52318E-3	6.3514E-3	2.98222E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.55954E-1	-7.34663E-1	-9.19447E0	-9.18946E0	5.34058E-3	9.35793E-2	2.73015E1	-3.26458E1	-3.26579E1	2.68175E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98665E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.55835E-1	-7.3483E-1	-9.19456E0	-9.18951E0	5.62668E-3	9.35316E-2	2.73193E1	-3.26608E1	-3.26396E1	2.68208E1	1.1929E-7	2.5188E-3	2.5188E-3	6.36244E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-7.55835E-1	-7.34448E-1	-9.19464E0	-9.18946E0	5.65052E-3	9.36508E-2	2.73303E1	-3.26651E1	-3.2629E1	2.68154E1	1.19239E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.55453E-1	-7.3452E-1	-9.19459E0	-9.18951E0	5.55515E-3	9.35078E-2	2.73139E1	-3.2675E1	-3.26561E1	2.68105E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.55954E-1	-7.34663E-1	-9.19435E0	-9.18965E0	5.48363E-3	9.38177E-2	2.73051E1	-3.26633E1	-3.26284E1	2.67794E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-7.55715E-1	-7.34568E-1	-9.19454E0	-9.18961E0	5.74589E-3	9.38416E-2	2.73117E1	-3.26723E1	-3.26194E1	2.6801E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-7.55954E-1	-7.34711E-1	-9.19464E0	-9.18925E0	5.62668E-3	9.37223E-2	2.72859E1	-3.26579E1	-3.26362E1	2.6792E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.55763E-1	-7.34639E-1	-9.19476E0	-9.18934E0	5.57899E-3	9.37939E-2	2.73243E1	-3.26933E1	-3.26254E1	2.6795E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-7.55835E-1	-7.34639E-1	-9.19459E0	-9.18937E0	5.67436E-3	9.38177E-2	2.73345E1	-3.26681E1	-3.26398E1	2.68076E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.55978E-1	-7.34711E-1	-9.19464E0	-9.18932E0	5.6982E-3	9.38654E-2	2.73027E1	-3.26759E1	-3.26194E1	2.68412E1	1.19238E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.56001E-1	-7.34782E-1	-9.1944E0	-9.1892E0	5.67436E-3	9.377E-2	2.72522E1	-3.26494E1	-3.2632E1	2.68526E1	1.19238E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.5593E-1	-7.34663E-1	-9.19442E0	-9.18949E0	5.24521E-3	9.377E-2	2.73117E1	-3.26458E1	-3.2635E1	2.67746E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02922E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-7.55835E-1	-7.34591E-1	-9.19447E0	-9.18934E0	5.24521E-3	9.34839E-2	2.73189E1	-3.26657E1	-3.26314E1	2.68082E1	1.19186E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.55787E-1	-7.34663E-1	-9.19447E0	-9.18932E0	5.36442E-3	9.34124E-2	2.73039E1	-3.26699E1	-3.26476E1	2.6783E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.55787E-1	-7.34568E-1	-9.19442E0	-9.18953E0	5.17368E-3	9.32217E-2	2.72951E1	-3.2698E1	-3.26449E1	2.67794E1	1.1929E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.9829E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.55715E-1	-7.34639E-1	-9.19435E0	-9.18949E0	5.17368E-3	9.377E-2	2.73027E1	-3.26561E1	-3.25936E1	2.68442E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.55835E-1	-7.34758E-1	-9.19449E0	-9.18946E0	5.10216E-3	9.35555E-2	2.72847E1	-3.26494E1	-3.26038E1	2.68016E1	1.1929E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.55596E-1	-7.34568E-1	-9.19456E0	-9.18953E0	5.14984E-3	9.34124E-2	2.73316E1	-3.26467E1	-3.26366E1	2.68029E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1