[Scan]
initial_time=2015-12-18T21:57:40
final_time=2015-12-18T21:58:00
ip_count=19
run=1020
dataset=6
scan=321
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-7.55358E-1
ql1_imon=1.38143E-8
ql2_vset=
ql2_vmon=-7.34806E-1
ql2_imon=2.00343E-9
ql3_vset=
ql3_vmon=-9.19461E0
ql3_imon=4.39906E-10
ql4_vset=
ql4_vmon=-9.18922E0
ql4_imon=3.25561E-11
mult1=-9.84219E-9
mult2=-2.74285E-9
rf_tmon=-4.81622E-3
rf_agc=3.35274E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.64312E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63554E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5331E1
cs_ef1b_imon=3.16722E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.01979E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=1.08361E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40088E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.40888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.39131E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.29707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=2.33904E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30814E0
cs_ionrep_imon=9.43803E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.97143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=3.38473E-8
tplens_vset=1.4E-1
tplens_vmon=1.61548E0
tplens_imon=-2.06863E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26372E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.99183E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=8.5461E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56711E0
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.44437E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73328E1
iondef1_imon=1.07334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.32933E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.12138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.28607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.7233E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.01707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=5.91985E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.44414E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65942E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3184E1
cs_fil1_imon=7.4792E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.87583E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68189E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.44839E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22674E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36777E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=142
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-7.55692E-1	-7.3452E-1	-9.19433E0	-9.1893E0	5.29289E-3	9.37223E-2	2.73027E1	-3.26615E1	-3.26398E1	2.6801E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02133E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.55835E-1	-7.34425E-1	-9.19416E0	-9.18915E0	5.24521E-3	9.36747E-2	2.72991E1	-3.26452E1	-3.26254E1	2.68022E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-7.56001E-1	-7.34639E-1	-9.19411E0	-9.18944E0	5.34058E-3	9.37223E-2	2.73151E1	-3.26531E1	-3.26508E1	2.67978E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.56025E-1	-7.34425E-1	-9.19402E0	-9.18934E0	5.26905E-3	9.37223E-2	2.73134E1	-3.26526E1	-3.26284E1	2.68022E1	1.19239E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.55644E-1	-7.34353E-1	-9.1944E0	-9.18946E0	5.03063E-3	9.35555E-2	2.73057E1	-3.26621E1	-3.26494E1	2.6813E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-7.55763E-1	-7.34258E-1	-9.19421E0	-9.18922E0	5.126E-3	9.36747E-2	2.73087E1	-3.26597E1	-3.26266E1	2.68292E1	1.19238E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.5562E-1	-7.34115E-1	-9.19423E0	-9.18925E0	5.19753E-3	9.38416E-2	2.73234E1	-3.2659E1	-3.26366E1	2.67992E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.55954E-1	-7.34234E-1	-9.19461E0	-9.18949E0	5.07832E-3	9.30786E-2	2.72892E1	-3.26444E1	-3.26113E1	2.68178E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29098E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-7.55787E-1	-7.34305E-1	-9.19423E0	-9.1893E0	4.93526E-3	9.35316E-2	2.72957E1	-3.26767E1	-3.26231E1	2.67984E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-7.55644E-1	-7.34138E-1	-9.19449E0	-9.18911E0	5.10216E-3	9.33886E-2	2.73003E1	-3.26771E1	-3.26002E1	2.6843E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09673E0	-7.55572E-1	-7.34401E-1	-9.19456E0	-9.18927E0	5.26905E-3	9.36031E-2	2.73297E1	-3.26657E1	-3.2632E1	2.67986E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09711E0	-7.55072E-1	-7.34496E-1	-9.1948E0	-9.18927E0	5.36442E-3	9.35316E-2	2.72913E1	-3.26999E1	-3.26446E1	2.68304E1	1.1929E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-7.55501E-1	-7.34544E-1	-9.19476E0	-9.18946E0	5.03063E-3	9.38416E-2	2.73027E1	-3.26687E1	-3.2638E1	2.67884E1	1.19184E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00144E-1
1.7E1	3.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-7.55501E-1	-7.34615E-1	-9.19461E0	-9.18939E0	4.79221E-3	9.36985E-2	2.73116E1	-3.2662E1	-3.26213E1	2.68148E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-7.55405E-1	-7.34496E-1	-9.19483E0	-9.18911E0	5.03063E-3	9.36985E-2	2.73213E1	-3.26543E1	-3.26374E1	2.6828E1	1.19238E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-7.55596E-1	-7.34305E-1	-9.1949E0	-9.18922E0	5.126E-3	9.34839E-2	2.72986E1	-3.26496E1	-3.26054E1	2.67902E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-7.55405E-1	-7.34353E-1	-9.19459E0	-9.18906E0	5.24521E-3	9.34601E-2	2.73002E1	-3.26738E1	-3.26193E1	2.68213E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09719E0	-7.55358E-1	-7.34138E-1	-9.19456E0	-9.18911E0	5.14984E-3	9.34839E-2	2.73252E1	-3.26679E1	-3.26054E1	2.68204E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-7.5531E-1	-7.3483E-1	-9.19459E0	-9.18925E0	5.19753E-3	9.35555E-2	2.73333E1	-3.26747E1	-3.26416E1	2.68004E1	1.1929E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-7.55358E-1	-7.34806E-1	-9.19461E0	-9.18922E0	5.10216E-3	9.3627E-2	2.73328E1	-3.26526E1	-3.26372E1	2.68064E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1