[Scan]
initial_time=2015-12-18T21:59:00
final_time=2015-12-18T21:59:20
ip_count=19
run=1020
dataset=6
scan=324
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-7.55334E-1
ql1_imon=1.38224E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=1.98733E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=3.61085E-10
ql4_vset=
ql4_vmon=-9.18958E0
ql4_imon=5.57423E-11
mult1=-9.67668E-9
mult2=-2.61939E-9
rf_tmon=-4.89881E-3
rf_agc=3.34448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.72474E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68037E0
bslens_imon=2.40876E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54275E1
cs_ef1b_imon=3.17574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.08149E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39144E0
lens1_imon=2.76624E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64886E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.38587E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=3.04959E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.38599E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.29408E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.36735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.10033E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27923E0
cs_ionrep_imon=9.42387E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=1.95072E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.38994E-8
tplens_vset=1.4E-1
tplens_vmon=1.62787E0
tplens_imon=-4.47542E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.98172E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=8.44345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33947E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.14099E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59483E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71061E1
cs_ef2a_imon=3.19416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0951E0
os_ef2alow_imon=-2.44947E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29667E-1
os_ef2bup_imon=-5.32351E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.46141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.0866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.3377E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=8.10515E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09365E0
cs_ionaccel_imon=-8.61283E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86616E1
mask2_imon=-5.03332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.27026E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.39579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=6.23132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.44586E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66141E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=6.84722E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44207E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6798E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20775E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28279E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22649E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98013E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.5562E-1	-7.34329E-1	-9.19454E0	-9.18937E0	5.4121E-3	9.34362E-2	2.72957E1	-3.26874E1	-3.25989E1	2.68058E1					
2.0E0	4.8E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-7.56025E-1	-7.34305E-1	-9.19435E0	-9.18941E0	5.34058E-3	9.34124E-2	2.73432E1	-3.26797E1	-3.26185E1	2.67976E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.55954E-1	-7.3452E-1	-9.19433E0	-9.18911E0	5.65052E-3	9.36508E-2	2.73263E1	-3.26732E1	-3.26413E1	2.6843E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.55787E-1	-7.34401E-1	-9.19428E0	-9.18927E0	5.126E-3	9.34601E-2	2.73189E1	-3.26633E1	-3.26032E1	2.67962E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-7.55954E-1	-7.34353E-1	-9.19445E0	-9.18911E0	5.57899E-3	9.36508E-2	2.72871E1	-3.26621E1	-3.26176E1	2.68388E1	1.1929E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.55835E-1	-7.34329E-1	-9.19418E0	-9.1893E0	5.24521E-3	9.35555E-2	2.72847E1	-3.26549E1	-3.25846E1	2.6813E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.55954E-1	-7.34138E-1	-9.19445E0	-9.18925E0	5.19753E-3	9.34839E-2	2.72925E1	-3.265E1	-3.26032E1	2.68076E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.55811E-1	-7.34138E-1	-9.19428E0	-9.18908E0	5.29289E-3	9.35316E-2	2.72514E1	-3.2626E1	-3.26354E1	2.6834E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.5562E-1	-7.34258E-1	-9.19433E0	-9.18937E0	5.22137E-3	9.36031E-2	2.73027E1	-3.26651E1	-3.26296E1	2.68166E1	1.1929E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.55596E-1	-7.34162E-1	-9.19437E0	-9.18937E0	5.22137E-3	9.34601E-2	2.73177E1	-3.26633E1	-3.26212E1	2.68238E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.55882E-1	-7.34329E-1	-9.19449E0	-9.18908E0	5.45979E-3	9.33647E-2	2.7308E1	-3.26826E1	-3.26219E1	2.68343E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.55525E-1	-7.3452E-1	-9.19428E0	-9.1893E0	5.31673E-3	9.37223E-2	2.72833E1	-3.26703E1	-3.2636E1	2.68244E1	1.19137E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.55525E-1	-7.34425E-1	-9.19433E0	-9.1892E0	5.17368E-3	9.35555E-2	2.73333E1	-3.26464E1	-3.26152E1	2.67782E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.55548E-1	-7.34544E-1	-9.1948E0	-9.18934E0	5.29289E-3	9.37939E-2	2.73222E1	-3.26673E1	-3.26296E1	2.67787E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.5531E-1	-7.34496E-1	-9.19485E0	-9.1893E0	5.31673E-3	9.3627E-2	2.73228E1	-3.26358E1	-3.26542E1	2.68045E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.55453E-1	-7.34687E-1	-9.1948E0	-9.18899E0	5.26905E-3	9.36508E-2	2.73021E1	-3.26645E1	-3.26561E1	2.6816E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01337E-1
2.0E1	6.0E0	1.0E0	8.08E2	5.58E2	-2.09371E0	-7.55143E-1	-7.3452E-1	-9.19478E0	-9.18915E0	5.43594E-3	9.3627E-2	2.72797E1	-3.26655E1	-3.25936E1	2.68001E1	1.1929E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.55358E-1	-7.34639E-1	-9.19447E0	-9.18944E0	5.31673E-3	9.35793E-2	2.73189E1	-3.26663E1	-3.2617E1	2.67854E1	1.19264E-7	2.51268E-3	2.51268E-3	6.29655E-3	2.99991E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-7.55501E-1	-7.34806E-1	-9.19449E0	-9.18951E0	4.98295E-3	9.36985E-2	2.73201E1	-3.26512E1	-3.26524E1	2.67974E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.55334E-1	-7.34711E-1	-9.19485E0	-9.18958E0	5.57899E-3	9.34601E-2	2.73104E1	-3.26638E1	-3.26408E1	2.6834E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1