[Scan]
initial_time=2015-12-18T21:59:53
final_time=2015-12-18T22:00:13
ip_count=19
run=1020
dataset=6
scan=326
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08851E-4
ql1_vset=
ql1_vmon=-7.55215E-1
ql1_imon=1.37751E-8
ql2_vset=
ql2_vmon=-7.34639E-1
ql2_imon=1.92902E-9
ql3_vset=
ql3_vmon=-9.19452E0
ql3_imon=3.48449E-10
ql4_vset=
ql4_vmon=-9.18939E0
ql4_imon=6.41465E-11
mult1=-9.43937E-9
mult2=-2.77849E-9
rf_tmon=-4.17596E-3
rf_agc=3.35679E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.7596E-9
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53274E1
cs_ef1b_imon=3.16362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05259E1
cs_ea1_imon=1.09175E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40618E0
lens1_imon=2.70607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.38198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.38846E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.34966E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2751E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=1.97323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.37848E-8
tplens_vset=1.4E-1
tplens_vmon=1.5966E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98381E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.95857E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31404E0
ionrepsh_imon=8.5107E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34041E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56711E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46077E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.48522E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.10325E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82593E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.48073E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.26672E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.44252E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65902E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=6.79444E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2091E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68019E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48382E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.1914E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.35866E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-7.55143E-1	-7.34329E-1	-9.19433E0	-9.18922E0	5.19753E-3	9.35316E-2	2.73051E1	-3.26536E1	-3.26621E1	2.68076E1	1.19239E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01223E-1
2.0E0	5.3E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-7.55382E-1	-7.34043E-1	-9.19459E0	-9.18944E0	5.50747E-3	9.33409E-2	2.7272E1	-3.26456E1	-3.26462E1	2.68058E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-7.5531E-1	-7.34425E-1	-9.19437E0	-9.18925E0	5.14984E-3	9.33886E-2	2.73184E1	-3.26625E1	-3.26289E1	2.68175E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.0041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.55382E-1	-7.3421E-1	-9.19468E0	-9.18939E0	5.31673E-3	9.3317E-2	2.73187E1	-3.26478E1	-3.26396E1	2.68082E1	1.1924E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-7.55548E-1	-7.34067E-1	-9.1943E0	-9.18946E0	5.53131E-3	9.3317E-2	2.73243E1	-3.26549E1	-3.26146E1	2.68202E1	1.1929E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-7.55501E-1	-7.34019E-1	-9.19459E0	-9.18963E0	5.10216E-3	9.32932E-2	2.73213E1	-3.26482E1	-3.26356E1	2.68118E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-7.5562E-1	-7.34425E-1	-9.19454E0	-9.18937E0	5.26905E-3	9.36747E-2	2.73069E1	-3.26713E1	-3.26248E1	2.68088E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.98554E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.55262E-1	-7.3452E-1	-9.19473E0	-9.18927E0	5.36442E-3	9.37223E-2	2.72957E1	-3.26632E1	-3.2629E1	2.68052E1	1.19186E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.55477E-1	-7.34472E-1	-9.19454E0	-9.18927E0	5.126E-3	9.36985E-2	2.73207E1	-3.26476E1	-3.26044E1	2.68106E1	1.1929E-7	2.52492E-3	2.52492E-3	6.29128E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-7.55334E-1	-7.34282E-1	-9.19456E0	-9.1892E0	5.03063E-3	9.36508E-2	2.73087E1	-3.26699E1	-3.26152E1	2.67998E1	1.1929E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.99E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-7.55382E-1	-7.34401E-1	-9.19459E0	-9.1897E0	5.29289E-3	9.35316E-2	2.73213E1	-3.26549E1	-3.2638E1	2.68136E1	1.19238E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01478E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.55334E-1	-7.34401E-1	-9.19452E0	-9.18937E0	5.17368E-3	9.35078E-2	2.73116E1	-3.2685E1	-3.26113E1	2.67897E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.55501E-1	-7.34663E-1	-9.19428E0	-9.18932E0	5.126E-3	9.36031E-2	2.73039E1	-3.26699E1	-3.26308E1	2.67884E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.03027E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.55477E-1	-7.34448E-1	-9.19445E0	-9.18925E0	5.72205E-3	9.34839E-2	2.72931E1	-3.26639E1	-3.26212E1	2.67938E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02133E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.55644E-1	-7.34401E-1	-9.19495E0	-9.18946E0	5.50747E-3	9.35555E-2	2.73015E1	-3.26356E1	-3.26464E1	2.68208E1	1.1929E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.55405E-1	-7.34663E-1	-9.19459E0	-9.18934E0	5.31673E-3	9.35793E-2	2.73237E1	-3.26885E1	-3.26242E1	2.68118E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.55477E-1	-7.34568E-1	-9.19471E0	-9.18922E0	5.62668E-3	9.35316E-2	2.72898E1	-3.26567E1	-3.26231E1	2.681E1	1.1929E-7	2.51771E-3	2.51771E-3	6.35692E-3	3.03185E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.55382E-1	-7.34591E-1	-9.19468E0	-9.18906E0	5.19753E-3	9.37223E-2	2.72949E1	-3.26813E1	-3.26494E1	2.6771E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.02253E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.55548E-1	-7.34591E-1	-9.19473E0	-9.18937E0	5.10216E-3	9.3317E-2	2.7326E1	-3.26544E1	-3.25849E1	2.68007E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.55215E-1	-7.34639E-1	-9.19452E0	-9.18939E0	4.88758E-3	9.33409E-2	2.73321E1	-3.26819E1	-3.26518E1	2.68124E1	1.1914E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.00097E-1