[Scan]
initial_time=2015-12-18T22:00:20
final_time=2015-12-18T22:00:40
ip_count=19
run=1020
dataset=6
scan=327
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-7.55763E-1
ql1_imon=1.37519E-8
ql2_vset=
ql2_vmon=-7.34282E-1
ql2_imon=1.93708E-9
ql3_vset=
ql3_vmon=-9.19492E0
ql3_imon=2.92957E-10
ql4_vset=
ql4_vmon=-9.1893E0
ql4_imon=6.22392E-11
mult1=-9.28285E-9
mult2=-2.79446E-9
rf_tmon=-5.04115E-3
rf_agc=3.26546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.69069E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.70358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54649E1
cs_ef1b_imon=3.19497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=1.08688E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39659E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.4106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.387E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.33059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=9.44124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.95485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.39278E-8
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26392E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98299E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.97611E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22566E0
ionrepsh_imon=8.5436E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57895E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12243E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.44149E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.3137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67764E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.35641E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.11795E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39308E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.66039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.4275E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33281E1
os_fil1_imon=9.45712E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65822E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.53926E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43735E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68034E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45814E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7582E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-7.55262E-1	-7.34735E-1	-9.19464E0	-9.18953E0	5.26905E-3	9.3627E-2	2.7285E1	-3.26561E1	-3.26242E1	2.67816E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-7.55501E-1	-7.34735E-1	-9.1949E0	-9.18939E0	5.34058E-3	9.33886E-2	2.73147E1	-3.26302E1	-3.26236E1	2.67998E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.55191E-1	-7.34663E-1	-9.19476E0	-9.18965E0	5.62668E-3	9.34124E-2	2.73193E1	-3.26697E1	-3.26331E1	2.67722E1	1.1929E-7	2.51376E-3	2.51376E-3	6.31283E-3	3.00766E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.55167E-1	-7.34305E-1	-9.1949E0	-9.18963E0	5.60284E-3	9.35316E-2	2.73039E1	-3.26627E1	-3.26194E1	2.68172E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.5531E-1	-7.34735E-1	-9.19466E0	-9.18927E0	5.26905E-3	9.36508E-2	2.73273E1	-3.26759E1	-3.26134E1	2.68064E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-7.55239E-1	-7.34591E-1	-9.19464E0	-9.1892E0	5.26905E-3	9.377E-2	2.73181E1	-3.2649E1	-3.26095E1	2.68436E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.55191E-1	-7.34591E-1	-9.19447E0	-9.18913E0	5.34058E-3	9.38177E-2	2.72895E1	-3.26712E1	-3.26359E1	2.68296E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-7.55382E-1	-7.34711E-1	-9.19468E0	-9.18944E0	5.34058E-3	9.38416E-2	2.72968E1	-3.26368E1	-3.26432E1	2.67641E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.98342E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.55453E-1	-7.34496E-1	-9.19492E0	-9.18941E0	5.45979E-3	9.37223E-2	2.72853E1	-3.26783E1	-3.26428E1	2.68262E1	1.19235E-7	2.51411E-3	2.51411E-3	6.31321E-3	3.0147E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.55191E-1	-7.34591E-1	-9.19492E0	-9.18944E0	5.4121E-3	9.36031E-2	2.73069E1	-3.26555E1	-3.26337E1	2.68453E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-7.55262E-1	-7.34425E-1	-9.19487E0	-9.18941E0	5.38826E-3	9.36508E-2	2.72997E1	-3.26897E1	-3.26482E1	2.67968E1	1.19239E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.55239E-1	-7.34448E-1	-9.19514E0	-9.1898E0	5.36442E-3	9.37223E-2	2.72955E1	-3.26837E1	-3.26206E1	2.67932E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.55501E-1	-7.34401E-1	-9.19468E0	-9.18918E0	5.26905E-3	9.38892E-2	2.73222E1	-3.26627E1	-3.26321E1	2.67982E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-7.55167E-1	-7.34472E-1	-9.19454E0	-9.18937E0	5.43594E-3	9.39131E-2	2.73104E1	-3.26585E1	-3.2659E1	2.68157E1	1.1929E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.00942E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.55358E-1	-7.34186E-1	-9.19478E0	-9.18956E0	5.34058E-3	9.37223E-2	2.73153E1	-3.26615E1	-3.26428E1	2.67625E1	1.19239E-7	2.51096E-3	2.51096E-3	6.33977E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-7.55429E-1	-7.34377E-1	-9.19473E0	-9.18944E0	5.48363E-3	9.34839E-2	2.72985E1	-3.26675E1	-3.26579E1	2.68046E1	1.19186E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02133E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-7.55572E-1	-7.34568E-1	-9.19504E0	-9.18975E0	5.31673E-3	9.35078E-2	2.72979E1	-3.26873E1	-3.26603E1	2.67794E1	1.19238E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-7.55429E-1	-7.34591E-1	-9.19468E0	-9.18965E0	5.34058E-3	9.34839E-2	2.72909E1	-3.26573E1	-3.26101E1	2.68442E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-7.55453E-1	-7.34568E-1	-9.19476E0	-9.18949E0	5.26905E-3	9.34362E-2	2.73093E1	-3.26717E1	-3.26086E1	2.68016E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.55763E-1	-7.34282E-1	-9.19492E0	-9.1893E0	5.126E-3	9.36508E-2	2.72991E1	-3.26392E1	-3.26482E1	2.67764E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1