[Scan]
initial_time=2015-12-18T22:01:40
final_time=2015-12-18T22:01:59
ip_count=19
run=1020
dataset=6
scan=330
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08886E-4
ql1_vset=
ql1_vmon=-7.5562E-1
ql1_imon=1.3811E-8
ql2_vset=
ql2_vmon=-7.34782E-1
ql2_imon=2.03377E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=3.20137E-10
ql4_vset=
ql4_vmon=-9.1893E0
ql4_imon=1.84655E-11
mult1=-1.00655E-8
mult2=-2.77051E-9
rf_tmon=-4.36823E-3
rf_agc=3.40185E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.62079E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62648E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53226E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.09697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42423E0
lens1_imon=2.53054E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=3.0E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03492E1
cs_ea2_imon=1.39943E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84046E1
cs_ef1a_imon=3.02847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.38504E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.33888E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93665E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02169E1
cs_anode1_imon=1.96602E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.38419E-8
tplens_vset=1.4E-1
tplens_vmon=1.61319E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.48126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.59986E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.00423E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=8.40662E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57955E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00745E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33464E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.07895E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.33088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.10529E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16618E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54292E0
defgridb_imon=6.36261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.44234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0811E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65798E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=8.01378E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70765E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68141E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24143E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5793E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-1.99323E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22735E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45787E-1
res40_imon=-2.19063E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-7.55405E-1	-7.34591E-1	-9.19454E0	-9.18963E0	5.24521E-3	9.35316E-2	2.73228E1	-3.26738E1	-3.2636E1	2.68256E1	1.19239E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9892E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.55429E-1	-7.34401E-1	-9.19471E0	-9.18944E0	5.19753E-3	9.39369E-2	2.73171E1	-3.26774E1	-3.26287E1	2.68148E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.55835E-1	-7.3452E-1	-9.19442E0	-9.18944E0	5.29289E-3	9.34601E-2	2.73135E1	-3.26843E1	-3.2617E1	2.68036E1	1.1919E-7	2.52342E-3	2.52342E-3	6.31445E-3	3.00936E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.55906E-1	-7.34711E-1	-9.19456E0	-9.18939E0	5.19753E-3	9.36031E-2	2.72962E1	-3.26726E1	-3.26508E1	2.68118E1	1.19239E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-7.55811E-1	-7.34425E-1	-9.19466E0	-9.18932E0	5.26905E-3	9.33886E-2	2.73098E1	-3.26437E1	-3.26461E1	2.68268E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.55715E-1	-7.34568E-1	-9.1948E0	-9.18927E0	5.126E-3	9.3627E-2	2.73086E1	-3.26661E1	-3.26325E1	2.67781E1	1.1929E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.55668E-1	-7.34782E-1	-9.19487E0	-9.18934E0	5.31673E-3	9.37939E-2	2.72955E1	-3.26627E1	-3.26404E1	2.68448E1	1.1929E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.55644E-1	-7.34925E-1	-9.19466E0	-9.18939E0	5.55515E-3	9.38654E-2	2.72898E1	-3.26676E1	-3.26119E1	2.67812E1	1.19186E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.55787E-1	-7.34663E-1	-9.19452E0	-9.1892E0	5.29289E-3	9.34362E-2	2.7321E1	-3.26478E1	-3.26166E1	2.68148E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.55858E-1	-7.34615E-1	-9.19452E0	-9.18925E0	5.126E-3	9.35555E-2	2.73129E1	-3.26639E1	-3.26002E1	2.68118E1	1.19238E-7	2.51225E-3	2.51225E-3	6.3514E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.55429E-1	-7.34377E-1	-9.19478E0	-9.18939E0	5.17368E-3	9.35793E-2	2.73149E1	-3.26523E1	-3.2626E1	2.68007E1	1.19186E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.55048E-1	-7.34353E-1	-9.19459E0	-9.1892E0	5.24521E-3	9.34124E-2	2.72895E1	-3.2641E1	-3.26392E1	2.68046E1	1.19184E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00942E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.55167E-1	-7.34377E-1	-9.19461E0	-9.18899E0	5.05447E-3	9.35316E-2	2.7324E1	-3.26649E1	-3.26107E1	2.68244E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.55453E-1	-7.34329E-1	-9.19468E0	-9.18915E0	4.98295E-3	9.34839E-2	2.73173E1	-3.26554E1	-3.26181E1	2.67882E1	1.1929E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0148E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-7.55501E-1	-7.34377E-1	-9.19466E0	-9.1893E0	5.14984E-3	9.33409E-2	2.73132E1	-3.26712E1	-3.26028E1	2.68146E1	1.1929E-7	2.51136E-3	2.51136E-3	6.31299E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-7.55477E-1	-7.3421E-1	-9.19461E0	-9.18901E0	5.05447E-3	9.35316E-2	2.73088E1	-3.26695E1	-3.26425E1	2.6816E1	1.1929E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.97843E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09711E0	-7.55668E-1	-7.34282E-1	-9.19471E0	-9.18953E0	5.10216E-3	9.36985E-2	2.72979E1	-3.26681E1	-3.2632E1	2.67956E1	1.1929E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.0041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09734E0	-7.55692E-1	-7.3421E-1	-9.19473E0	-9.18915E0	5.05447E-3	9.35078E-2	2.72998E1	-3.26431E1	-3.26113E1	2.68232E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-7.5562E-1	-7.34496E-1	-9.19459E0	-9.18941E0	5.126E-3	9.35555E-2	2.73263E1	-3.2659E1	-3.26549E1	2.68325E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-7.5562E-1	-7.34782E-1	-9.19473E0	-9.1893E0	5.126E-3	9.36747E-2	2.73057E1	-3.26645E1	-3.26242E1	2.67974E1	1.1929E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.03286E-1