[Scan]
initial_time=2015-12-18T22:02:07
final_time=2015-12-18T22:02:26
ip_count=19
run=1020
dataset=6
scan=331
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-7.55095E-1
ql1_imon=1.38086E-8
ql2_vset=
ql2_vmon=-7.34496E-1
ql2_imon=2.00926E-9
ql3_vset=
ql3_vmon=-9.19499E0
ql3_imon=2.84207E-10
ql4_vset=
ql4_vmon=-9.18927E0
ql4_imon=2.64406E-11
mult1=-9.90129E-9
mult2=-2.79773E-9
rf_tmon=-4.76903E-3
rf_agc=3.3781E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.7234E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.7043E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.98078E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05112E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5249E1
cs_ef1b_imon=3.16954E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02109E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04878E1
cs_ea1_imon=1.08531E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42447E0
lens1_imon=2.55246E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64738E1
os_ef1alow_imon=2.99361E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03969E1
cs_ea2_imon=1.38938E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.04149E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.39057E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11409E1
os_restr1_imon=4.29519E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15118E1
os_ea1_imon=2.33352E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63493E1
os_ef1bup_imon=3.0882E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23523E0
cs_ionrep_imon=9.51766E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01912E1
cs_anode1_imon=1.96333E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.4047E-8
tplens_vset=1.4E-1
tplens_vmon=1.62197E0
tplens_imon=-2.85791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.48477E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26408E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.99826E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.47035E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33944E1
lens5b_imon=2.20231E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74436E1
cs_ef2b_imon=3.13374E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55383E0
os_ea2_imon=-5.31072E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00588E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.19718E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09478E0
os_ef2alow_imon=-2.5839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.21859E-1
os_ef2bup_imon=-5.30071E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.44745E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31252E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01802E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.08881E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08328E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.35154E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=8.11377E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10679E0
cs_ionaccel_imon=-8.67399E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.67616E-6
window_vset=0.0E0
window_vmon=2.14628E-1
window_imon=-1.01531E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39201E-4
mask2_vset=0.0E0
mask2_vmon=-1.86623E1
mask2_imon=-5.67693E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.4464E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.05258E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.19333E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42298E0
defgridb_imon=6.1616E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33288E1
os_fil1_imon=9.43958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07485E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65741E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31817E1
cs_fil1_imon=7.86338E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01533E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68156E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24705E-2
os_fil2_imon=-2.58091E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18065E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3105E-1
cs_fil2_imon=-2.31494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22676E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.90524E-1
res40_imon=-2.43599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-7.55477E-1	-7.34377E-1	-9.19447E0	-9.18927E0	5.60284E-3	9.35555E-2	2.72906E1	-3.26706E1	-3.26237E1	2.67955E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31902E-3	3.00363E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09719E0	-7.55501E-1	-7.34091E-1	-9.19456E0	-9.18946E0	5.48363E-3	9.33886E-2	2.73247E1	-3.26787E1	-3.26487E1	2.67995E1	1.1914E-7	2.51182E-3	2.51182E-3	6.31269E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09704E0	-7.55215E-1	-7.33972E-1	-9.19483E0	-9.18937E0	5.84126E-3	9.35078E-2	2.73057E1	-3.26726E1	-3.26219E1	2.68018E1	1.1929E-7	2.51952E-3	2.51952E-3	6.3245E-3	2.99981E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09766E0	-7.55453E-1	-7.34234E-1	-9.19483E0	-9.18911E0	5.55515E-3	9.36031E-2	2.73315E1	-3.26603E1	-3.26302E1	2.67842E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-7.55548E-1	-7.34138E-1	-9.19497E0	-9.1892E0	5.26905E-3	9.35078E-2	2.73105E1	-3.26561E1	-3.26404E1	2.68304E1	1.1929E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-7.55572E-1	-7.34544E-1	-9.19485E0	-9.18932E0	5.53131E-3	9.34362E-2	2.72957E1	-3.26254E1	-3.26225E1	2.67854E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-7.55358E-1	-7.34162E-1	-9.19497E0	-9.18908E0	5.48363E-3	9.33409E-2	2.7297E1	-3.26494E1	-3.26373E1	2.68064E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-7.55477E-1	-7.34448E-1	-9.19459E0	-9.18939E0	5.34058E-3	9.34362E-2	2.72913E1	-3.26771E1	-3.26146E1	2.6816E1	1.19329E-7	2.51252E-3	2.51252E-3	6.31563E-3	3.02002E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0968E0	-7.55525E-1	-7.34425E-1	-9.19485E0	-9.18941E0	5.14984E-3	9.32455E-2	2.73087E1	-3.26536E1	-3.26188E1	2.6792E1	1.19239E-7	2.51538E-3	2.51538E-3	6.33461E-3	3.00249E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-7.55715E-1	-7.3452E-1	-9.19502E0	-9.18913E0	5.10216E-3	9.36031E-2	2.73016E1	-3.26561E1	-3.2629E1	2.68124E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-7.55453E-1	-7.34448E-1	-9.19497E0	-9.18906E0	5.55515E-3	9.34362E-2	2.72865E1	-3.26597E1	-3.26308E1	2.68118E1	1.19238E-7	2.52209E-3	2.52209E-3	6.34588E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-7.5531E-1	-7.34091E-1	-9.19485E0	-9.18918E0	5.57899E-3	9.32217E-2	2.73479E1	-3.2686E1	-3.26187E1	2.68182E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-7.55358E-1	-7.34067E-1	-9.19495E0	-9.18934E0	5.60284E-3	9.33647E-2	2.72847E1	-3.26765E1	-3.26386E1	2.68358E1	1.19237E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.98819E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-7.55405E-1	-7.33924E-1	-9.19473E0	-9.18939E0	5.45979E-3	9.35555E-2	2.73153E1	-3.26603E1	-3.26308E1	2.68262E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-7.55501E-1	-7.34353E-1	-9.19507E0	-9.18961E0	5.36442E-3	9.35316E-2	2.73104E1	-3.26809E1	-3.26301E1	2.67955E1	1.19239E-7	2.52707E-3	2.52707E-3	6.33977E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.55262E-1	-7.34353E-1	-9.19502E0	-9.18956E0	5.24521E-3	9.36508E-2	2.73087E1	-3.26579E1	-3.26524E1	2.67854E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-7.54929E-1	-7.34162E-1	-9.19502E0	-9.18972E0	5.43594E-3	9.35555E-2	2.73003E1	-3.26326E1	-3.26452E1	2.68262E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-7.55119E-1	-7.34329E-1	-9.19497E0	-9.1892E0	5.34058E-3	9.35555E-2	2.73193E1	-3.26714E1	-3.26349E1	2.67902E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.96381E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.55262E-1	-7.34496E-1	-9.1953E0	-9.18939E0	5.55515E-3	9.33886E-2	2.73069E1	-3.26597E1	-3.26002E1	2.67839E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9714E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.55095E-1	-7.34496E-1	-9.19499E0	-9.18927E0	5.34058E-3	9.3627E-2	2.72927E1	-3.26408E1	-3.26089E1	2.68256E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97963E-1