[Scan]
initial_time=2015-12-18T22:03:00
final_time=2015-12-18T22:03:19
ip_count=19
run=1020
dataset=6
scan=333
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-7.54905E-1
ql1_imon=1.37895E-8
ql2_vset=
ql2_vmon=-7.34353E-1
ql2_imon=1.98168E-9
ql3_vset=
ql3_vmon=-9.19454E0
ql3_imon=3.01218E-10
ql4_vset=
ql4_vmon=-9.18882E0
ql4_imon=3.12328E-11
mult1=-9.71631E-9
mult2=-2.74855E-9
rf_tmon=-4.66263E-3
rf_agc=3.33636E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.63624E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.97873E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.08644E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37551E0
lens1_imon=2.82641E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.39225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.3879E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.36204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=9.49466E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.39421E-8
tplens_vset=1.4E-1
tplens_vmon=1.59306E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.97598E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23558E0
ionrepsh_imon=8.36559E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.19852E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57713E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0948E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3046E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.44761E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.32016E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.34588E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=8.11661E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-8.28332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.42678E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08098E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65894E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=6.81246E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94791E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-1.99923E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47589E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.55334E-1	-7.34282E-1	-9.19449E0	-9.18903E0	5.45979E-3	9.34601E-2	2.73021E1	-3.26537E1	-3.26272E1	2.68082E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-7.55239E-1	-7.34162E-1	-9.1949E0	-9.1892E0	5.22137E-3	9.34839E-2	2.72976E1	-3.26728E1	-3.26092E1	2.68182E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-7.55334E-1	-7.34282E-1	-9.19459E0	-9.18937E0	5.03063E-3	9.38177E-2	2.73178E1	-3.26642E1	-3.26625E1	2.67845E1	1.19237E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00942E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.55358E-1	-7.33995E-1	-9.19504E0	-9.18951E0	5.10216E-3	9.33886E-2	2.73183E1	-3.26609E1	-3.26272E1	2.6834E1	1.1929E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.55239E-1	-7.34115E-1	-9.19509E0	-9.18934E0	5.19753E-3	9.30548E-2	2.72973E1	-3.26957E1	-3.25912E1	2.67619E1	1.19238E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.55358E-1	-7.3421E-1	-9.19478E0	-9.18953E0	5.10216E-3	9.33886E-2	2.73045E1	-3.2636E1	-3.26307E1	2.68142E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.55429E-1	-7.3421E-1	-9.19447E0	-9.18934E0	5.10216E-3	9.35078E-2	2.73063E1	-3.2632E1	-3.2644E1	2.6792E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.55191E-1	-7.34282E-1	-9.19461E0	-9.18951E0	5.14984E-3	9.33886E-2	2.73057E1	-3.26248E1	-3.26278E1	2.6831E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-7.55334E-1	-7.3421E-1	-9.19445E0	-9.18925E0	4.91142E-3	9.35793E-2	2.73057E1	-3.27027E1	-3.25918E1	2.67955E1	1.19238E-7	2.50571E-3	2.50571E-3	6.34588E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-7.55119E-1	-7.34115E-1	-9.19468E0	-9.18949E0	5.57899E-3	9.35316E-2	2.73225E1	-3.26669E1	-3.26488E1	2.68256E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.55215E-1	-7.34186E-1	-9.19478E0	-9.18922E0	4.95911E-3	9.36031E-2	2.73219E1	-3.26645E1	-3.25761E1	2.67914E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-7.55453E-1	-7.33995E-1	-9.19442E0	-9.18915E0	5.10216E-3	9.35793E-2	2.72781E1	-3.26549E1	-3.26675E1	2.68094E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-7.55358E-1	-7.34019E-1	-9.19497E0	-9.1893E0	5.43594E-3	9.35555E-2	2.73099E1	-3.26506E1	-3.26332E1	2.6816E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09673E0	-7.55215E-1	-7.34091E-1	-9.19471E0	-9.18934E0	5.24521E-3	9.34839E-2	2.73093E1	-3.26741E1	-3.26128E1	2.6801E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09688E0	-7.5531E-1	-7.34091E-1	-9.19449E0	-9.18937E0	5.38826E-3	9.34362E-2	2.73177E1	-3.26585E1	-3.26723E1	2.68238E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09696E0	-7.55024E-1	-7.34353E-1	-9.19456E0	-9.18925E0	5.50747E-3	9.35316E-2	2.73099E1	-3.27101E1	-3.26524E1	2.67842E1	1.19186E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09704E0	-7.55095E-1	-7.3421E-1	-9.19485E0	-9.1892E0	5.31673E-3	9.34124E-2	2.73122E1	-3.26756E1	-3.26626E1	2.67958E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09688E0	-7.55262E-1	-7.34186E-1	-9.19464E0	-9.18937E0	5.29289E-3	9.34362E-2	2.73279E1	-3.26146E1	-3.26897E1	2.68455E1	1.19188E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-7.55191E-1	-7.34138E-1	-9.19466E0	-9.18925E0	5.26905E-3	9.34601E-2	2.73129E1	-3.26567E1	-3.2617E1	2.67704E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02277E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-7.54905E-1	-7.34353E-1	-9.19454E0	-9.18882E0	5.26905E-3	9.34362E-2	2.73093E1	-3.26446E1	-3.26314E1	2.68172E1	1.19239E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1