[Scan]
initial_time=2015-12-18T22:03:27
final_time=2015-12-18T22:03:46
ip_count=19
run=1020
dataset=6
scan=334
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-7.55429E-1
ql1_imon=1.38367E-8
ql2_vset=
ql2_vmon=-7.34282E-1
ql2_imon=1.93913E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=2.50196E-10
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=1.73569E-11
mult1=-9.4755E-9
mult2=-2.65074E-9
rf_tmon=-4.67465E-3
rf_agc=3.35619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.64049E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.68837E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.17515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.08609E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.54326E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.39508E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.38606E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=2.35001E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27628E0
cs_ionrep_imon=9.39201E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.94872E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.39985E-8
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98229E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.01657E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=8.57441E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.573E0
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.44112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.07511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67764E1
iondef4_imon=1.1126E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.31002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.10538E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-8.64372E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92679E3
multa_neg_imon=7.38517E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.63647E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.43724E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07443E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66077E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=8.54237E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.005E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68155E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.38638E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22705E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.61404E-1
res40_imon=-2.27713E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-7.55382E-1	-7.34138E-1	-9.19437E0	-9.18932E0	5.14984E-3	9.35316E-2	2.73173E1	-3.26787E1	-3.26205E1	2.67926E1	1.19188E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99941E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09727E0	-7.55334E-1	-7.34091E-1	-9.19452E0	-9.1892E0	5.29289E-3	9.33886E-2	2.73198E1	-3.2662E1	-3.26207E1	2.68244E1	1.1929E-7	2.51136E-3	2.51136E-3	6.31299E-3	2.99879E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-7.55286E-1	-7.34162E-1	-9.19461E0	-9.18913E0	5.10216E-3	9.32932E-2	2.73237E1	-3.26585E1	-3.26591E1	2.68196E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-7.55167E-1	-7.33662E-1	-9.19445E0	-9.18913E0	4.98295E-3	9.36031E-2	2.73375E1	-3.26729E1	-3.26308E1	2.6804E1	1.19239E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-7.55382E-1	-7.33948E-1	-9.19468E0	-9.18937E0	4.88758E-3	9.34601E-2	2.73157E1	-3.2652E1	-3.26366E1	2.67989E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-7.55334E-1	-7.34115E-1	-9.19483E0	-9.18934E0	4.95911E-3	9.33409E-2	2.72733E1	-3.26725E1	-3.26334E1	2.68028E1	1.19238E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-7.55501E-1	-7.339E-1	-9.19497E0	-9.18915E0	5.07832E-3	9.32455E-2	2.73157E1	-3.26561E1	-3.26054E1	2.68124E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.55286E-1	-7.33972E-1	-9.19483E0	-9.18911E0	5.53131E-3	9.32455E-2	2.73502E1	-3.26771E1	-3.2605E1	2.68022E1	1.1929E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-7.55191E-1	-7.34329E-1	-9.19449E0	-9.18922E0	5.43594E-3	9.34839E-2	2.73015E1	-3.26567E1	-3.26284E1	2.68238E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-7.55215E-1	-7.34282E-1	-9.19471E0	-9.18937E0	5.29289E-3	9.37223E-2	2.73275E1	-3.26531E1	-3.26101E1	2.68058E1	1.1929E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-7.55E-1	-7.33948E-1	-9.19466E0	-9.18956E0	5.45979E-3	9.36508E-2	2.73021E1	-3.26518E1	-3.2605E1	2.68334E1	1.1929E-7	2.52045E-3	2.52045E-3	6.32386E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.55191E-1	-7.34162E-1	-9.19468E0	-9.18965E0	5.4121E-3	9.38892E-2	2.73081E1	-3.26867E1	-3.26182E1	2.67938E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.55405E-1	-7.34162E-1	-9.19468E0	-9.1892E0	5.19753E-3	9.38177E-2	2.73204E1	-3.26862E1	-3.26119E1	2.68099E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.55453E-1	-7.34329E-1	-9.19468E0	-9.18961E0	5.55515E-3	9.35316E-2	2.7288E1	-3.26573E1	-3.26219E1	2.67872E1	1.1929E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.00852E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.55095E-1	-7.34258E-1	-9.19428E0	-9.18939E0	5.17368E-3	9.35555E-2	2.72525E1	-3.2645E1	-3.26291E1	2.68238E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.55429E-1	-7.34019E-1	-9.19473E0	-9.1897E0	5.31673E-3	9.34601E-2	2.72811E1	-3.26801E1	-3.2608E1	2.68262E1	1.1929E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.98222E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.0951E0	-7.55429E-1	-7.33852E-1	-9.1944E0	-9.18956E0	5.24521E-3	9.36508E-2	2.73201E1	-3.2638E1	-3.26524E1	2.68316E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-7.5531E-1	-7.339E-1	-9.19466E0	-9.18944E0	5.17368E-3	9.36985E-2	2.73305E1	-3.26608E1	-3.26644E1	2.67992E1	1.19186E-7	2.51716E-3	2.51716E-3	6.30192E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-7.55334E-1	-7.34329E-1	-9.19461E0	-9.18958E0	5.22137E-3	9.38177E-2	2.72636E1	-3.26554E1	-3.2632E1	2.68154E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-7.55429E-1	-7.34282E-1	-9.19485E0	-9.18953E0	5.14984E-3	9.38654E-2	2.73267E1	-3.26482E1	-3.265E1	2.67764E1	1.1929E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.02253E-1