[Scan]
initial_time=2015-12-18T22:03:53
final_time=2015-12-18T22:04:13
ip_count=19
run=1020
dataset=6
scan=335
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-7.55143E-1
ql1_imon=1.3736E-8
ql2_vset=
ql2_vmon=-7.34448E-1
ql2_imon=2.01062E-9
ql3_vset=
ql3_vmon=-9.19478E0
ql3_imon=3.04735E-10
ql4_vset=
ql4_vmon=-9.18927E0
ql4_imon=5.89728E-11
mult1=-9.32203E-9
mult2=-2.70758E-9
rf_tmon=-4.72184E-3
rf_agc=3.36689E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.66998E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.77332E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20113E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54253E1
cs_ef1b_imon=3.18777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=1.09069E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.53972E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.99928E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.40286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.3889E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=2.35036E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=9.37432E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.95773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.38911E-8
tplens_vset=1.4E-1
tplens_vmon=1.60427E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.98381E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=8.41514E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.19321E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58775E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53285E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.45302E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08387E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.34832E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=8.10755E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.33208E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.31981E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.31627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.45087E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66068E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31816E1
cs_fil1_imon=7.89966E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76771E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67876E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.35221E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22615E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19358E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-7.55286E-1	-7.33781E-1	-9.19423E0	-9.18939E0	5.60284E-3	9.35555E-2	2.73273E1	-3.26398E1	-3.26699E1	2.6801E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01995E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.55596E-1	-7.34258E-1	-9.19464E0	-9.18927E0	5.48363E-3	9.36031E-2	2.72932E1	-3.26609E1	-3.26173E1	2.68112E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-7.55525E-1	-7.34353E-1	-9.19449E0	-9.18932E0	5.34058E-3	9.33409E-2	2.73016E1	-3.2677E1	-3.26359E1	2.67839E1	1.19236E-7	2.51952E-3	2.51952E-3	6.29035E-3	2.9944E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.55572E-1	-7.34138E-1	-9.19471E0	-9.18884E0	5.50747E-3	9.36031E-2	2.73189E1	-3.26657E1	-3.26302E1	2.68288E1	1.1929E-7	2.51287E-3	2.51287E-3	6.32858E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.55525E-1	-7.34138E-1	-9.19464E0	-9.18913E0	5.6982E-3	9.377E-2	2.73039E1	-3.2647E1	-3.26038E1	2.67776E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-7.55477E-1	-7.34448E-1	-9.19452E0	-9.18958E0	5.55515E-3	9.3317E-2	2.72853E1	-3.26699E1	-3.26404E1	2.68412E1	1.19237E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99879E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.55906E-1	-7.34496E-1	-9.19435E0	-9.1893E0	5.17368E-3	9.35316E-2	2.73087E1	-3.26476E1	-3.26188E1	2.67944E1	1.19188E-7	2.51632E-3	2.51632E-3	6.35601E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-7.56097E-1	-7.34353E-1	-9.19428E0	-9.18925E0	5.29289E-3	9.36985E-2	2.72895E1	-3.26579E1	-3.2653E1	2.6819E1	1.1929E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.00824E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-7.55668E-1	-7.34305E-1	-9.19437E0	-9.18944E0	5.43594E-3	9.33886E-2	2.72901E1	-3.2629E1	-3.2632E1	2.68436E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-7.55477E-1	-7.34186E-1	-9.19445E0	-9.18941E0	5.45979E-3	9.37223E-2	2.73075E1	-3.26639E1	-3.26074E1	2.67728E1	1.19238E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09734E0	-7.55358E-1	-7.34258E-1	-9.1948E0	-9.18932E0	4.93526E-3	9.3627E-2	2.72949E1	-3.26681E1	-3.26446E1	2.6804E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.55167E-1	-7.33995E-1	-9.19471E0	-9.1893E0	4.88758E-3	9.377E-2	2.72925E1	-3.26669E1	-3.2653E1	2.67962E1	1.19186E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.01347E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-7.54929E-1	-7.34115E-1	-9.19485E0	-9.18932E0	5.05447E-3	9.34601E-2	2.73181E1	-3.26638E1	-3.26278E1	2.68001E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.54857E-1	-7.3421E-1	-9.19478E0	-9.18939E0	5.03063E-3	9.34839E-2	2.72867E1	-3.26554E1	-3.26223E1	2.68088E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98481E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.54929E-1	-7.34353E-1	-9.19485E0	-9.18932E0	5.17368E-3	9.31263E-2	2.73099E1	-3.26579E1	-3.26104E1	2.68294E1	1.19238E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.54976E-1	-7.34186E-1	-9.19492E0	-9.18944E0	5.126E-3	9.33409E-2	2.73021E1	-3.26663E1	-3.26861E1	2.67703E1	1.19264E-7	2.5068E-3	2.5068E-3	6.31837E-3	3.00432E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09572E0	-7.55191E-1	-7.34258E-1	-9.19452E0	-9.18934E0	5.19753E-3	9.34839E-2	2.73435E1	-3.2653E1	-3.26344E1	2.68088E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-7.55239E-1	-7.34162E-1	-9.19454E0	-9.18937E0	5.29289E-3	9.36508E-2	2.72933E1	-3.26596E1	-3.26437E1	2.68198E1	1.19237E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.02545E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-7.55072E-1	-7.34425E-1	-9.19466E0	-9.18949E0	5.43594E-3	9.34601E-2	2.73165E1	-3.26651E1	-3.26194E1	2.68184E1	1.1924E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.02115E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-7.55143E-1	-7.34448E-1	-9.19478E0	-9.18927E0	5.26905E-3	9.34362E-2	2.73045E1	-3.26661E1	-3.26219E1	2.6783E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1