[Scan]
initial_time=2015-12-18T22:04:46
final_time=2015-12-18T22:05:06
ip_count=19
run=1020
dataset=6
scan=337
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08866E-4
ql1_vset=
ql1_vmon=-7.5531E-1
ql1_imon=1.37822E-8
ql2_vset=
ql2_vmon=-7.34639E-1
ql2_imon=1.97618E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=2.8851E-10
ql4_vset=
ql4_vmon=-9.18927E0
ql4_imon=3.89814E-11
mult1=-9.47527E-9
mult2=-2.71379E-9
rf_tmon=-5.14601E-3
rf_agc=3.28754E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.66785E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.2061E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54619E1
cs_ef1b_imon=3.18164E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02442E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04309E1
cs_ea1_imon=1.08616E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.41241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.38901E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.34212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.10668E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=9.54939E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02151E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.40121E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26132E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26725E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.00085E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=8.64094E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.14565E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59697E0
os_ea2_imon=-3.4621E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06051E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.45374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.33858E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.10874E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.30229E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=8.11138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-8.31936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.16073E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.49096E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.44384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65874E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=7.38309E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77372E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6797E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43365E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22639E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.02813E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52473E-3
foreline_cvt_pmon=2.52473E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.26566E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.55072E-1	-7.3452E-1	-9.19452E0	-9.18934E0	5.31673E-3	9.35555E-2	2.73045E1	-3.26962E1	-3.26614E1	2.67949E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-7.55215E-1	-7.34282E-1	-9.19504E0	-9.18965E0	5.03063E-3	9.3317E-2	2.72886E1	-3.26621E1	-3.26125E1	2.67783E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-7.55095E-1	-7.3452E-1	-9.19487E0	-9.19001E0	5.17368E-3	9.35078E-2	2.72903E1	-3.26555E1	-3.26549E1	2.6818E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.01609E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-7.5531E-1	-7.34425E-1	-9.19492E0	-9.18982E0	5.126E-3	9.34362E-2	2.73255E1	-3.26639E1	-3.26176E1	2.68052E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-7.55477E-1	-7.34258E-1	-9.19495E0	-9.18937E0	5.03063E-3	9.34362E-2	2.72843E1	-3.26321E1	-3.26744E1	2.68076E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09696E0	-7.55048E-1	-7.34377E-1	-9.19511E0	-9.18913E0	4.79221E-3	9.33409E-2	2.72915E1	-3.26738E1	-3.26384E1	2.68232E1	1.1929E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-7.55024E-1	-7.34282E-1	-9.19516E0	-9.18915E0	4.74453E-3	9.3317E-2	2.73093E1	-3.26464E1	-3.26188E1	2.68166E1	1.19087E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-7.55286E-1	-7.34425E-1	-9.19492E0	-9.18915E0	4.95911E-3	9.32932E-2	2.72939E1	-3.26579E1	-3.2626E1	2.68292E1	1.19238E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-7.55262E-1	-7.34711E-1	-9.19495E0	-9.18939E0	5.07832E-3	9.34362E-2	2.72979E1	-3.26549E1	-3.26284E1	2.68142E1	1.1929E-7	2.51484E-3	2.51484E-3	6.31555E-3	3.00896E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.55668E-1	-7.34806E-1	-9.19471E0	-9.18922E0	5.19753E-3	9.37223E-2	2.73484E1	-3.26464E1	-3.2617E1	2.67992E1					
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.55644E-1	-7.3452E-1	-9.19495E0	-9.18934E0	5.26905E-3	9.33886E-2	2.73057E1	-3.26651E1	-3.26182E1	2.68346E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-7.55572E-1	-7.34568E-1	-9.19495E0	-9.18937E0	5.07832E-3	9.38892E-2	2.73189E1	-3.26536E1	-3.25791E1	2.68448E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-7.55405E-1	-7.34425E-1	-9.19516E0	-9.1893E0	5.31673E-3	9.33409E-2	2.73187E1	-3.26567E1	-3.26183E1	2.68024E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-7.55668E-1	-7.34544E-1	-9.19504E0	-9.18951E0	5.50747E-3	9.37462E-2	2.72537E1	-3.26578E1	-3.26376E1	2.6777E1	1.19239E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.55739E-1	-7.34448E-1	-9.19454E0	-9.18965E0	5.38826E-3	9.34839E-2	2.72974E1	-3.26608E1	-3.2626E1	2.6828E1	1.19237E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.03349E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.5531E-1	-7.34425E-1	-9.19473E0	-9.18944E0	5.29289E-3	9.36508E-2	2.72751E1	-3.26705E1	-3.2605E1	2.6816E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.55477E-1	-7.34401E-1	-9.19442E0	-9.18932E0	5.53131E-3	9.36508E-2	2.73196E1	-3.2632E1	-3.2639E1	2.68153E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.55191E-1	-7.34329E-1	-9.19456E0	-9.1893E0	5.38826E-3	9.36031E-2	2.73033E1	-3.2672E1	-3.26266E1	2.68244E1	1.1929E-7	2.52111E-3	2.52111E-3	6.32107E-3	2.99764E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.5531E-1	-7.3452E-1	-9.19485E0	-9.18918E0	5.45979E-3	9.36031E-2	2.73231E1	-3.26506E1	-3.2638E1	2.67794E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.5531E-1	-7.34639E-1	-9.19473E0	-9.18927E0	5.22137E-3	9.3627E-2	2.7288E1	-3.26725E1	-3.26132E1	2.68118E1	1.1929E-7	2.52473E-3	2.52473E-3	6.31299E-3	3.02813E-1