[Scan]
initial_time=2015-12-22T16:27:42
final_time=2015-12-22T16:28:04
ip_count=19
run=1021
dataset=1
scan=1
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.80288E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.7827E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.22809E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.50208E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=1.39192E-8
mult1=-9.51118E-9
mult2=-2.63703E-9
rf_tmon=-4.84572E-3
rf_agc=3.2967E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.12891E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18703E1
lens5a_imon=1.95459E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=2.83065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.01934E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0461E1
cs_ea1_imon=2.56239E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.43824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03426E1
cs_ea2_imon=1.49604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.93143E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.05009E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.30798E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.36556E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64018E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=1.18133E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02035E1
cs_anode1_imon=2.94673E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.12035E-9
tplens_vset=0.0E0
tplens_vmon=-1.57054E0
tplens_imon=-6.02162E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99455E1
iondef3_imon=8.54721E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.987E1
iondef2_imon=9.32227E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=9.25899E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=1.76425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.12014E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21004E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70377E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03776E0
os_ef2alow_imon=-2.74834E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.46252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=3.39121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.27405E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.2555E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57961E1
iondef1_imon=5.05761E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50226E1
iondef4_imon=5.27601E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.55368E-8
olens1_vset=0.0E0
olens1_vmon=6.4373E-4
olens1_imon=1.23554E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14578E0
cs_ionaccel_imon=-1.8135E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.52798E-6
window_vset=0.0E0
window_vmon=1.65557E-1
window_imon=-9.86392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86315E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=6.73392E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.07421E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.65821E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26622E0
defgridb_imon=5.91559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.41412E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07213E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63399E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.97584E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62695E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.75027E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95206E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33522E-1
cs_fil2_imon=-2.68656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22034E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.47065E-2
chamber_ion_pmon=2.42331E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62681E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.904E3	1.0E0	1.47E2	4.1E1	-7.44831E-2	-8.80017E1	-3.33786E-4	-8.79996E1	7.15256E-5	5.57899E-3	9.33886E-2	1.57983E1	-1.98365E1	-1.99755E1	1.49944E1	2.42657E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.4535E-2
2.0E0	3.269E3	4.0E0	3.16E2	1.6E2	-7.54105E-2	-8.80019E1	-5.00679E-4	-8.79998E1	2.38419E-5	5.50747E-3	9.35316E-2	1.58035E1	-1.98503E1	-1.99633E1	1.50046E1	2.42243E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.45559E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.6338E-2	-8.80014E1	-6.67572E-4	-8.79998E1	0.0E0	5.45979E-3	9.30786E-2	1.57983E1	-1.98452E1	-1.99662E1	1.50328E1	2.42745E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.46446E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.60287E-2	-8.8002E1	-3.09944E-4	-8.79996E1	-7.15256E-5	5.05447E-3	9.33409E-2	1.57896E1	-1.98228E1	-1.99956E1	1.5008E1	2.42037E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.45978E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.49466E-2	-8.80019E1	-4.76837E-4	-8.79998E1	2.38419E-5	5.45979E-3	9.3174E-2	1.57743E1	-1.98464E1	-1.99815E1	1.50039E1	2.42564E-9	2.52025E-3	2.52025E-3	6.30212E-3	2.46169E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.50241E-2	-8.80017E1	-3.8147E-4	-8.79999E1	-2.38419E-5	5.36442E-3	9.31263E-2	1.57929E1	-1.98568E1	-1.99536E1	1.50091E1	2.41934E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.47029E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47149E-2	-8.80014E1	-4.76837E-4	-8.79997E1	-1.43051E-4	5.55515E-3	9.31978E-2	1.5786E1	-1.98552E1	-1.99739E1	1.49966E1	2.42782E-9	2.52058E-3	2.52058E-3	6.31761E-3	2.47131E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.45602E-2	-8.80015E1	-5.00679E-4	-8.79998E1	-1.66893E-4	5.38826E-3	9.3174E-2	1.57808E1	-1.98735E1	-1.99561E1	1.50064E1	2.4215E-9	2.51321E-3	2.51321E-3	6.31925E-3	2.46293E-2
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80018E1	-5.48363E-4	-8.79999E1	1.90735E-4	5.29289E-3	9.30071E-2	1.57732E1	-1.98447E1	-1.99732E1	1.5011E1	2.42437E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.46207E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80018E1	-7.86781E-4	-8.79998E1	-9.53674E-5	5.53131E-3	9.32693E-2	1.57902E1	-1.98428E1	-1.9952E1	1.49987E1	2.42208E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.4601E-2
1.4E1	1.29E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80019E1	-5.72205E-4	-8.79998E1	4.76837E-5	5.36442E-3	9.34601E-2	1.57957E1	-1.9832E1	-1.99786E1	1.50521E1	2.4245E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.46608E-2
1.5E1	6.8E1	1.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80021E1	-4.05312E-4	-8.79999E1	-4.76837E-5	5.34058E-3	9.34124E-2	1.58143E1	-1.98531E1	-1.99702E1	1.501E1	2.42753E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.46421E-2
1.6E1	4.05E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80018E1	-7.86781E-4	-8.80001E1	7.15256E-5	5.34058E-3	9.3317E-2	1.57756E1	-1.98361E1	-1.99885E1	1.50304E1	2.42331E-9	2.50898E-3	2.50898E-3	6.29645E-3	2.47065E-2
1.7E1	1.189E3	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80017E1	-7.39098E-4	-8.8E1	-5.00679E-4	5.26905E-3	9.32693E-2	1.58089E1	-1.9844E1	-1.99402E1	1.49848E1	2.42542E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.4578E-2
1.8E1	4.65E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80017E1	-7.39098E-4	-8.79998E1	-1.90735E-4	5.62668E-3	9.32217E-2	1.58149E1	-1.98428E1	-1.9987E1	1.50244E1	2.42647E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.45994E-2
1.9E1	2.111E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80016E1	-6.67572E-4	-8.80001E1	2.38419E-4	5.53131E-3	9.3317E-2	1.57861E1	-1.98146E1	-1.99456E1	1.50047E1	2.42016E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.45353E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80017E1	-5.72205E-4	-8.80002E1	7.15256E-5	5.6982E-3	9.3627E-2	1.57987E1	-1.9835E1	-1.996E1	1.50335E1	2.4253E-9	2.51804E-3	2.51804E-3	6.34099E-3	2.45575E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80019E1	-6.4373E-4	-8.80003E1	1.19209E-4	5.74589E-3	9.34839E-2	1.57386E1	-1.98747E1	-2.00069E1	1.49991E1	2.42553E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.45559E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80021E1	-5.24521E-4	-8.80003E1	2.38419E-4	5.79357E-3	9.34124E-2	1.5794E1	-1.99053E1	-1.99598E1	1.49806E1	2.42315E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.46228E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80019E1	-7.62939E-4	-8.80002E1	-2.6226E-4	5.60284E-3	9.34362E-2	1.57961E1	-1.987E1	-1.99455E1	1.50226E1	2.42331E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.47065E-2