[Scan]
initial_time=2015-12-22T16:28:11
final_time=2015-12-22T16:28:33
ip_count=19
run=1021
dataset=1
scan=2
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.76805E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-8.02028E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.2301E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.52589E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.38229E-8
mult1=-9.42252E-9
mult2=-2.68308E-9
rf_tmon=-5.5831E-3
rf_agc=3.26096E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.61397E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71852E0
bslens_imon=2.81107E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19415E1
lens5a_imon=1.96233E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04882E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5359E1
cs_ef1b_imon=2.83799E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05106E1
cs_ea1_imon=2.55282E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96969E0
lens1_imon=1.4838E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6479E1
os_ef1alow_imon=2.9685E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03444E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84366E1
cs_ef1a_imon=2.93301E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=1.05274E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11333E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=2.34399E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64398E1
os_ef1bup_imon=3.07611E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22359E0
cs_ionrep_imon=1.19074E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91834E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02015E1
cs_anode1_imon=2.93873E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.22468E-9
tplens_vset=0.0E0
tplens_vmon=-1.60014E0
tplens_imon=-5.27769E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99499E1
iondef3_imon=8.82217E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98342E1
iondef2_imon=9.2351E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=9.66454E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26193E0
ionrepsh_imon=1.76707E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33416E1
lens5b_imon=2.14815E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74635E1
cs_ef2b_imon=3.10702E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24128E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70485E1
cs_ef2a_imon=3.18314E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05551E0
os_ef2alow_imon=-2.70685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81524E-1
os_ef2bup_imon=-5.62033E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10971E1
os_restr2_imon=3.38463E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.27864E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01758E1
cs_anode2_imon=2.2261E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5804E1
iondef1_imon=4.93472E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50259E1
iondef4_imon=5.27233E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27966E1
olens3_imon=2.54913E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.22357E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16639E0
cs_ionaccel_imon=-1.93984E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47232E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56443E1
einzel_imon=7.75653E-6
window_vset=0.0E0
window_vmon=1.64944E-1
window_imon=-1.12131E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39078E-4
mask2_vset=0.0E0
mask2_vmon=-1.85924E1
mask2_imon=-7.09189E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92581E3
multa_neg_imon=6.88729E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.58054E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50167E3
multb_neg_imon=7.11145E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4341E0
defgridb_imon=5.83727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33364E1
os_fil1_imon=9.43737E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0649E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63429E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.97217E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.624E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6331E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.69883E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90895E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.85609E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34998E-1
cs_fil2_imon=-2.85147E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23162E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22358E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.46636E-2
chamber_ion_pmon=2.42753E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.58012E-1
res40_imon=-2.48361E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.927E3	4.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80019E1	-3.33786E-4	-8.79999E1	1.19209E-4	5.45979E-3	9.34362E-2	1.58058E1	-1.98504E1	-1.99558E1	1.49784E1	2.42003E-9	2.51932E-3	2.51932E-3	6.2987E-3	2.45818E-2
2.0E0	3.29E3	2.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80018E1	-4.76837E-4	-8.80003E1	1.19209E-4	5.4121E-3	9.35316E-2	1.57744E1	-1.98581E1	-1.9961E1	1.50222E1	2.42666E-9	2.51603E-3	2.51603E-3	6.32858E-3	2.46582E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80019E1	-4.29153E-4	-8.80001E1	2.38419E-5	5.79357E-3	9.32217E-2	1.58215E1	-1.98446E1	-1.99714E1	1.503E1	2.42408E-9	2.51725E-3	2.51725E-3	6.33021E-3	2.47139E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.8002E1	-6.67572E-4	-8.80002E1	2.38419E-4	5.8651E-3	9.34124E-2	1.58006E1	-1.98544E1	-1.99784E1	1.5007E1	2.41934E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.46188E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80017E1	-9.53674E-4	-8.80004E1	2.14577E-4	5.76973E-3	9.34601E-2	1.57927E1	-1.98398E1	-1.9939E1	1.50382E1	2.4276E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.46608E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80019E1	-6.91414E-4	-8.80001E1	1.66893E-4	5.53131E-3	9.34362E-2	1.57584E1	-1.98411E1	-1.99714E1	1.49745E1	2.4245E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.4724E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80019E1	-3.8147E-4	-8.80001E1	-1.43051E-4	5.74589E-3	9.34839E-2	1.57885E1	-1.98651E1	-1.99402E1	1.5034E1	2.42542E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.44927E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80018E1	-4.29153E-4	-8.79999E1	1.90735E-4	5.79357E-3	9.35555E-2	1.58132E1	-1.98588E1	-2.00033E1	1.50106E1	2.42553E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.46819E-2
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80018E1	-4.76837E-4	-8.79997E1	0.0E0	5.60284E-3	9.31263E-2	1.5794E1	-1.98337E1	-1.99347E1	1.50274E1	2.42331E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.46636E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80018E1	-5.00679E-4	-8.80002E1	0.0E0	5.48363E-3	9.29594E-2	1.57939E1	-1.98735E1	-1.99744E1	1.49704E1	2.42542E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.4685E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80015E1	-3.57628E-4	-8.80001E1	-2.38419E-5	5.79357E-3	9.29832E-2	1.58297E1	-1.98841E1	-1.98942E1	1.50412E1	2.42858E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.46421E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80018E1	-2.6226E-4	-8.79998E1	0.0E0	5.62668E-3	9.26256E-2	1.57909E1	-1.98879E1	-1.99798E1	1.50091E1	2.42016E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.4685E-2
1.6E1	4.33E2	1.0E0	6.47E2	4.41E2	-7.37103E-2	-8.8002E1	-5.48363E-4	-8.8E1	0.0E0	5.93662E-3	9.28879E-2	1.58191E1	-1.98298E1	-1.99971E1	1.5019E1	2.42657E-9	2.51525E-3	2.51525E-3	6.29128E-3	2.45559E-2
1.7E1	1.073E3	0.0E0	6.87E2	4.7E2	-7.47923E-2	-8.8002E1	-5.00679E-4	-8.80001E1	4.76837E-5	5.57899E-3	9.31025E-2	1.57775E1	-1.98597E1	-1.99291E1	1.50185E1	2.42875E-9	2.51679E-3	2.51679E-3	6.34385E-3	2.45949E-2
1.8E1	4.661E3	5.0E0	7.27E2	5.0E2	-7.42513E-2	-8.80018E1	-4.29153E-4	-8.8E1	-1.90735E-4	5.29289E-3	9.29594E-2	1.57767E1	-1.9857E1	-1.99703E1	1.5019E1	2.42833E-9	2.51439E-3	2.51439E-3	6.32518E-3	2.45601E-2
1.9E1	2.143E3	1.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80014E1	-4.29153E-4	-8.79997E1	0.0E0	5.60284E-3	9.29117E-2	1.57918E1	-1.98542E1	-1.99812E1	1.49988E1	2.42331E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.46421E-2
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80017E1	-5.00679E-4	-8.79997E1	-7.15256E-5	6.07967E-3	9.31025E-2	1.57924E1	-1.98517E1	-1.99306E1	1.50053E1	2.42586E-9	2.5165E-3	2.5165E-3	6.28194E-3	2.46134E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80016E1	-6.67572E-4	-8.79998E1	9.53674E-5	5.50747E-3	9.30309E-2	1.57831E1	-1.98434E1	-2.00003E1	1.49932E1	2.42282E-9	2.51874E-3	2.51874E-3	6.3074E-3	2.4627E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80014E1	-5.24521E-4	-8.79995E1	-2.38419E-5	5.22137E-3	9.31501E-2	1.58131E1	-1.98296E1	-1.9978E1	1.50124E1	2.42542E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.47279E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80016E1	-5.72205E-4	-8.79997E1	2.14577E-4	5.19753E-3	9.30786E-2	1.5804E1	-1.98342E1	-1.99499E1	1.50259E1	2.42753E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.46636E-2