[Scan]
initial_time=2015-12-22T16:28:41
final_time=2015-12-22T16:29:03
ip_count=19
run=1021
dataset=1
scan=3
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.78786E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.37596E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.24043E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.53999E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.38692E-8
mult1=-1.01739E-8
mult2=-2.60284E-9
rf_tmon=-4.22403E-3
rf_agc=3.33997E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=6.29318E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65833E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20614E1
lens5a_imon=1.96144E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.83278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=2.56779E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.35533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.52056E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.93152E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.05283E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1584E1
os_ea1_imon=2.37745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63221E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.19395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.94125E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.19003E-9
tplens_vset=0.0E0
tplens_vmon=-1.58736E0
tplens_imon=-2.92136E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99918E1
iondef3_imon=8.55802E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98723E1
iondef2_imon=9.30064E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=1.0007E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.75235E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.15323E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2515E0
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70945E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.44141E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.25434E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57596E1
iondef1_imon=5.18379E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50178E1
iondef4_imon=5.15065E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.55159E-8
olens1_vset=0.0E0
olens1_vmon=8.10623E-4
olens1_imon=1.22922E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16378E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.35653E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.34676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.76276E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.06171E0
defgridb_imon=5.89036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3342E1
os_fil1_imon=9.41657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63008E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30933E1
cs_fil1_imon=9.97783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62498E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63155E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91894E-2
os_fil2_imon=-2.85818E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14928E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22275E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.46207E-2
chamber_ion_pmon=2.42121E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.52685E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.916E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80016E1	-7.39098E-4	-8.79999E1	-1.90735E-4	5.10216E-3	9.35316E-2	1.58052E1	-1.98712E1	-1.9946E1	1.50196E1	2.42121E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.45353E-2
2.0E0	3.373E3	4.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80016E1	-5.48363E-4	-8.80001E1	-9.53674E-5	5.74589E-3	9.35316E-2	1.58069E1	-1.98526E1	-2.00051E1	1.50022E1	2.42564E-9	2.51919E-3	2.51919E-3	6.30212E-3	2.45551E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80017E1	-3.8147E-4	-8.80001E1	2.38419E-5	5.48363E-3	9.34839E-2	1.5765E1	-1.98771E1	-1.99594E1	1.50264E1	2.42208E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.45792E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80019E1	-3.57628E-4	-8.8E1	0.0E0	5.34058E-3	9.34839E-2	1.57861E1	-1.98562E1	-1.99802E1	1.50088E1	2.42121E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.4578E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80017E1	-4.05312E-4	-8.79996E1	1.66893E-4	5.55515E-3	9.31263E-2	1.57867E1	-1.98591E1	-1.99618E1	1.50058E1	2.42159E-9	2.51919E-3	2.51919E-3	6.34982E-3	2.45551E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80014E1	-4.05312E-4	-8.8E1	-1.43051E-4	5.36442E-3	9.30548E-2	1.57933E1	-1.98717E1	-1.99402E1	1.50167E1	2.42423E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.47539E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80013E1	-6.4373E-4	-8.8E1	1.90735E-4	5.29289E-3	9.3174E-2	1.57802E1	-1.98653E1	-1.99832E1	1.50334E1	2.4276E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.4724E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80016E1	-4.29153E-4	-8.8E1	-1.66893E-4	5.29289E-3	9.32217E-2	1.57729E1	-1.98314E1	-2.00015E1	1.50076E1	2.42864E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.46819E-2
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80017E1	-3.57628E-4	-8.80002E1	-9.53674E-5	5.17368E-3	9.32217E-2	1.58065E1	-1.98116E1	-1.99528E1	1.5013E1	2.42858E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.47279E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80015E1	-5.24521E-4	-8.80002E1	-9.53674E-5	5.07832E-3	9.33409E-2	1.57849E1	-1.98056E1	-1.99822E1	1.50052E1	2.42542E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.47925E-2
1.4E1	1.24E2	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80016E1	-4.29153E-4	-8.79998E1	-2.86102E-4	5.10216E-3	9.32932E-2	1.5802E1	-1.98617E1	-1.99726E1	1.50118E1	2.42542E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.47065E-2
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80016E1	-3.57628E-4	-8.79998E1	-1.90735E-4	5.26905E-3	9.34124E-2	1.58571E1	-1.98465E1	-1.99145E1	1.49734E1	2.42657E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.45978E-2
1.6E1	4.17E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80017E1	-2.86102E-4	-8.79998E1	-2.14577E-4	5.126E-3	9.34601E-2	1.57737E1	-1.98464E1	-1.99779E1	1.50088E1	2.42208E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.46664E-2
1.7E1	1.152E3	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80018E1	-5.96046E-4	-8.79997E1	-2.86102E-4	5.36442E-3	9.3174E-2	1.57819E1	-1.98422E1	-1.99708E1	1.49709E1	2.42964E-9	2.51334E-3	2.51334E-3	6.28006E-3	2.47925E-2
1.8E1	4.496E3	2.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80017E1	-6.91414E-4	-8.79999E1	-4.29153E-4	5.00679E-3	9.29356E-2	1.58179E1	-1.9838E1	-1.99264E1	1.5016E1	2.4214E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.46398E-2
1.9E1	2.138E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80015E1	-6.67572E-4	-8.79995E1	-2.14577E-4	5.00679E-3	9.32932E-2	1.57698E1	-1.98591E1	-1.99792E1	1.50122E1	2.42753E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.47925E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80017E1	-7.15256E-4	-8.79998E1	-2.6226E-4	5.43594E-3	9.34124E-2	1.58044E1	-1.98446E1	-1.99608E1	1.49929E1	2.42174E-9	2.51716E-3	2.51716E-3	6.31288E-3	2.47279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80016E1	-5.96046E-4	-8.80001E1	-1.66893E-4	5.65052E-3	9.3174E-2	1.57807E1	-1.98398E1	-1.99528E1	1.50376E1					
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80017E1	-3.8147E-4	-8.8E1	-2.6226E-4	5.60284E-3	9.33409E-2	1.58173E1	-1.98633E1	-1.99468E1	1.50022E1	2.42657E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.45768E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80015E1	-4.76837E-4	-8.79999E1	-1.19209E-4	5.96046E-3	9.31501E-2	1.57596E1	-1.98723E1	-1.99918E1	1.50178E1	2.42121E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.46207E-2